Patents by Inventor Haiyang Zhang

Haiyang Zhang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180247867
    Abstract: A semiconductor structure includes a semiconductor substrate having fins and gate structures on the fins. A protective layer is formed on top surfaces of the gate structures. Sidewall spacers are formed on side surfaces of the gate structures and the protective layer. A first dielectric layer is formed on the surface of the semiconductor substrate and covering the fins and the side surfaces of the sidewall spacers. A mask layer is formed on a portion of the first dielectric layer between adjacent gate structures. The mask layer and the protective layer are formed by etching a mask material layer. A second dielectric layer is formed on the first dielectric layer, the protective layer and the sidewall spacers and covering the side surfaces of the mask layer. Conductive vias are formed in the first dielectric layer between the adjacent gate structures and at both sides of the mask layer.
    Type: Application
    Filed: April 20, 2018
    Publication date: August 30, 2018
    Inventors: CHENGLONG ZHANG, HAIYANG ZHANG
  • Patent number: 10031961
    Abstract: Systems, methods, and software program products discussed herein can create a backup or replica of a master. A method can include receiving, at a backup server, a serialized stream of data representative of changes to a first file of a computer and sorting the received stream of data and storing the sorted data in a memory. The method can include sending an acknowledgment to the computer indicating that the stream of data was received, writing all the sorted data to a single second file, and merging, on the backup server, the written data with data representative of a backup of data on the computer in response to writing all the sorted data to the single second file.
    Type: Grant
    Filed: June 20, 2013
    Date of Patent: July 24, 2018
    Assignee: CA, Inc.
    Inventors: Xiaopin Wang, Haiyang Zhang, Shishen Liu, Ran Shuai
  • Publication number: 20180158928
    Abstract: The present disclosure relates to the technical field of semiconductors, and discloses a semiconductor device and a manufacturing method therefor. The manufacturing method may include: providing a semiconductor structure, where the semiconductor structure includes a semiconductor fin and an interlayer dielectric layer covering the semiconductor fin, the interlayer dielectric layer having an opening exposing a part of the semiconductor fin; forming a data storage layer at a bottom portion and a side surface of the opening; and filling a conductive material layer in the opening on the data storage layer.
    Type: Application
    Filed: November 27, 2017
    Publication date: June 7, 2018
    Applicants: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventors: Zhuofan Chen, Haiyang Zhang
  • Patent number: 9978641
    Abstract: A method for forming a semiconductor structure includes providing a semiconductor substrate; forming a plurality of fins on the semiconductor substrate; forming a plurality of gate structures on the plurality of fins and sidewall spacers on side surfaces of the gate structures; forming a first dielectric layer on the semiconductor substrate; recessing the gate structures to form a plurality of trenches on top surfaces of the gate structures; forming a mask material layer filling the trenches and on the first dielectric layer; forming a protective layer on the top surfaces of the remaining gate structures and a mask layer on a portion of the first dielectric layer between adjacent gate structures by etching the mask material layer; forming contact through-holes in the first dielectric layer between adjacent gates structure at both sides of the mask layer; and forming a metal contact via in each of the contact through-holes.
    Type: Grant
    Filed: March 3, 2016
    Date of Patent: May 22, 2018
    Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventors: Chenglong Zhang, Haiyang Zhang
  • Publication number: 20180122855
    Abstract: A magnetic random access memory and its manufacturing method related to semiconductor techniques. The magnetic random access memory comprises a word line, a bit line, and a memory unit positioned between the word line and the bit line, wherein the memory unit comprises a fixture layer connecting the bit line, a free layer connecting the word line, and an insulation layer positioned between the fixture layer and the free layer. This magnetic random access memory has a simpler design than conventional devices and can be manufactured more easily, which improves the integrity of the manufacturing process.
    Type: Application
    Filed: October 31, 2017
    Publication date: May 3, 2018
    Inventors: Zhuofan CHEN, Yibin SONG, Haiyang ZHANG
  • Publication number: 20180108667
    Abstract: A flash memory device and its manufacturing method, which is related to semiconductor techniques. The flash memory device comprises: a substrate; and a memory unit on the substrate, comprising: a channel structure on the substrate, wherein the channel structure comprise, in an order from inner to outer of the channel structure, a channel layer, an insulation layer wrapped around the channel layer, and a charge capture layer wrapped around the insulation layer; a plurality of gate structures wrapped around the channel structure and arranged along a symmetry axis of the channel structure, wherein there exist cavities between neighboring gate structures; a support structure supporting the gate structures; and a plurality of gate contact components each contacting a gate structure. The cavities between neighboring gate structures lower the parasitic capacitance, reduce inter-gate interference, and suppress the influence from writing or erasing operations of nearby memory units.
    Type: Application
    Filed: October 17, 2017
    Publication date: April 19, 2018
    Inventors: Rongyao CHANG, Zhuofan CHEN, Haiyang ZHANG
  • Patent number: 9923762
    Abstract: A method includes receiving a request for modification of computer readable program code associated with a scenario being executed at a production server. The production server is configured to provide a computing service. Writing to a storage medium associated with the production server with respect to data specified by the protection scenario is suspended during the modification responsive to the request, such that synchronization of the data specified by the scenario is maintained between the production server and a standby server during the modification. Related systems and computer program products are also discussed.
    Type: Grant
    Filed: August 13, 2013
    Date of Patent: March 20, 2018
    Assignee: CA, INC.
    Inventors: Haiyang Zhang, Xiaopin Wang, Ran Shuai, Pengfei Yu
  • Publication number: 20180012842
    Abstract: A method is provided for fabricating a semiconductor structure. The method includes providing a semiconductor substrate; forming an initial metal layer; simultaneously forming a plurality of discrete first metal layers and openings by etching the initial metal layer; forming a plurality of sidewalls covering the side surface of the first metal layers; and forming a plurality of second metal layers to fill the openings.
    Type: Application
    Filed: September 14, 2017
    Publication date: January 11, 2018
    Inventors: CHENGLONG ZHANG, HAIYANG ZHANG
  • Publication number: 20180005886
    Abstract: A method for manufacturing a semiconductor device includes providing a substrate structure having an action region and a gate structure having a gate dielectric layer, a gate, a hardmask. The method also includes forming a first dielectric layer on the gate structure, forming a second dielectric layer on the first dielectric layer, performing a surface treatment on the second dielectric layer so that the upper surface of the second dielectric layer is flush with the upper surface of the mask member, which has a first recess is in its middle portion, forming a third dielectric layer on the second dielectric layer covering the mask member and selectively etching the third dielectric layer and the second dielectric layer relative to the first dielectric layer and the hardmask to form an opening adjacent to the gate structure and exposing the first dielectric layer on sidewalls of the gate structure.
    Type: Application
    Filed: June 16, 2017
    Publication date: January 4, 2018
    Inventors: CHENGLONG ZHANG, ERHU ZHENG, HAIYANG ZHANG
  • Publication number: 20180005894
    Abstract: The disclosed subject matter provides a semiconductor structure and fabrication method thereof. In a semiconductor structure, a dielectric layer, a plurality of discrete gate structures, and a plurality of sidewall spacers are formed on a semiconductor substrate. The plurality of discrete gate structures and sidewall spacers are formed in the dielectric layer, and a sidewall spacer is formed on each side of each gate structure. A top portion of each gate structure and a top portion of the dielectric layer between neighboring sidewall spacers of neighboring gate structures are removed. A protective layer is formed on each of the remaining dielectric layer and the remaining gate structures. Contact holes are formed on the semiconductor substrate, between neighboring sidewall spacers, and on opposite sides of the protective layer on the remaining dielectric layer. A metal plug is formed in each contact hole.
    Type: Application
    Filed: September 18, 2017
    Publication date: January 4, 2018
    Inventors: CHENGLONG ZHANG, HAIYANG ZHANG
  • Publication number: 20170352739
    Abstract: A method of manufacturing a semiconductor device includes forming a first semiconductor layer on a substrate, forming a stack of semiconductor layer structures on the first semiconductor layer, and etching the stack to form a fin structure. Each of the semiconductor layer structures includes a first insulator layer and a second semiconductor layer on the first insulator layer. The first and second semiconductor layers have the same semiconductor compound. The fin structure according to the novel method includes one or more insulator layers to achieve a higher on current/off current ratio, thereby improving the device performance relative to conventional fin structures without the insulator layers.
    Type: Application
    Filed: March 29, 2017
    Publication date: December 7, 2017
    Inventors: HAIYANG ZHANG, Yan Wang
  • Patent number: 9831313
    Abstract: The disclosed subject matter provides a Fin-FET with a thinned-down InP layer and thinning-down method thereof. In a Fin-FET, the fin structure is made of InGaAs and an InP layer is formed to cover the fin structure. The InP layer is obtained from an initial InP layer formed on the fin structure through a thinning down process including converting a surface portion of the InP layer into a Phosphorus-rich layer and removing the Phosphorus-rich layer. The thickness of the ultimately-formed InP layer is less than or equal to 1 nm. According to the disclosed method, the InP layer in the Fin-FET may be easily thinned down, and during the thinning-down process, contamination may be avoided.
    Type: Grant
    Filed: August 12, 2016
    Date of Patent: November 28, 2017
    Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventors: Haiyang Zhang, Chenglong Zhang
  • Patent number: 9798791
    Abstract: During a synchronization phase of a replication process, a master server generates and saves a shadow copy of predefined files to one or more replica servers so as to synchronize the files on both servers. Thereafter, during a replication phase of the replication process, the master server supplements the shadow copy with copies of individual files that have been modified. Each replica server is associated with a filter that controls which of the modified individual files, if any, is sent from the master server to that replica server for storage.
    Type: Grant
    Filed: December 4, 2013
    Date of Patent: October 24, 2017
    Assignee: CA, Inc.
    Inventors: Haiyang Zhang, Victor Liu, Xiaopin Wang, Lei Huang
  • Patent number: 9799564
    Abstract: The disclosed subject matter provides a semiconductor structure and fabrication method thereof. In a semiconductor structure, a dielectric layer, a plurality of discrete gate structures, and a plurality of sidewall spacers are formed on a semiconductor substrate. The plurality of discrete gate structures and sidewall spacers are formed in the dielectric layer, and a sidewall spacer is formed on each side of each gate structure. A top portion of each gate structure and a top portion of the dielectric layer between neighboring sidewall spacers of neighboring gate structures are removed. A protective layer is formed on each of the remaining dielectric layer and the remaining gate structures. Contact holes are formed on the semiconductor substrate, between neighboring sidewall spacers, and on opposite sides of the protective layer on the remaining dielectric layer. A metal plug is formed in each contact hole.
    Type: Grant
    Filed: March 3, 2016
    Date of Patent: October 24, 2017
    Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventors: Chenglong Zhang, Haiyang Zhang
  • Patent number: 9793209
    Abstract: A method is provided for fabricating a semiconductor structure. The method includes providing a semiconductor substrate; forming an initial metal layer; simultaneously forming a plurality of discrete first metal layers and openings by etching the initial metal layer; forming a plurality of sidewalls covering the side surface of the first metal layers; and forming a plurality of second metal layers to fill the openings.
    Type: Grant
    Filed: October 16, 2015
    Date of Patent: October 17, 2017
    Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventors: Chenglong Zhang, Haiyang Zhang
  • Patent number: 9754799
    Abstract: A method for forming an interconnect structure is provided. The method includes providing a substrate with a surface; and forming a metal layer covering the surface of the substrate and with a desired grain size to reduce grain boundary scattering of the interconnect structure subsequently formed with the metal layer. The method also includes etching the metal layer to form a plurality of metal lines on the surface of the substrate and a plurality of metal pillars on each of the plurality of the metal lines of the interconnect structure; and forming a dielectric layer covering the surface of the substrate, surfaces of the metal lines, and side surfaces of the metal pillars.
    Type: Grant
    Filed: October 14, 2015
    Date of Patent: September 5, 2017
    Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventors: Chenglong Zhang, Haiyang Zhang
  • Patent number: 9755080
    Abstract: A method for fabricating a FinFET structure comprises providing a semiconductor substrate; forming a hard mask layer on the semiconductor substrate; forming a dummy gate structure having a dummy gate, a first sidewall spacer and a second sidewall spacer; removing the dummy gate to form a first trench; forming first sub-fins in the semiconductor substrate under the hard mask layer in the first trench; forming a first metal gate structure in the first trench; removing the first sidewall spacer to form a second trench; forming second sub-fins in the semiconductor substrate under the hard mask layer in the second trench; forming a second metal gate structure in the second trench; removing the second sidewall spacer to form a third trench; forming third sub-fins in the semiconductor substrate under the hard mask layer in the third trench; and forming a third metal gate structure in the third trench.
    Type: Grant
    Filed: December 5, 2016
    Date of Patent: September 5, 2017
    Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventors: Haiyang Zhang, Chenglong Zhang
  • Patent number: 9741819
    Abstract: The present disclosure provides a transistor device and fabrication method thereof. A dummy gate is formed on a substrate. An interlayer dielectric layer is formed on the substrate and sidewall surfaces of the dummy gate. The interlayer dielectric layer has a top surface coplanar with a top surface of the dummy gate. A mask layer is formed on the top surface of the interlayer dielectric layer. The mask layer is used as an etch mask to remove the dummy gate to form a trench in the interlayer dielectric layer to provide a trench footing on sidewall surfaces of the trench and near a trench bottom. The trench footing is then removed by applying a dry etching process. A gate electrode is then formed in the trench to form a transistor with improved electrical performance.
    Type: Grant
    Filed: September 10, 2015
    Date of Patent: August 22, 2017
    Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventors: Haiyang Zhang, Xuan Zhang
  • Publication number: 20170233831
    Abstract: A Sidt1 gene controlling a determinate growth habit of sesame, the gene having a length of 1809 bp and including four exons and three introns. The Sidt1 gene is located on the fourth chromosome of sesame and in an 18.0-19.2 cM interval of the eighth linkage group on an SNP genetic map of sesame. The DNA sequence of the Sidt1 gene is represented by SEQ ID NO. 1. A cDNA sequence of the Sidt1 gene has a length of 531 bp and encodes 176 amino acids, and the cDNA sequence is represented by SEQ ID NO. 2. An SNP molecular marker Sidt27-1 of the Sidt1 gene has a length of 92 bp and is located at a base sequence from 378 to 469 of the Sidt1 gene, and a DNA sequence of the SNP molecular marker Sidt27-1 is represented by SEQ ID NO. 3.
    Type: Application
    Filed: April 27, 2017
    Publication date: August 17, 2017
    Inventors: Haiyang ZHANG, Hongmei MIAO, Chun LI, Libin WEI, Yinghui DUAN, Fangfang XU, Huili WANG
  • Patent number: D826492
    Type: Grant
    Filed: June 7, 2017
    Date of Patent: August 21, 2018
    Assignee: Guangzhou Highspot Home Appliance Co., Ltd
    Inventors: Shengwan Huang, Qijin Fan, Haiyang Zhang