Patents by Inventor Hua Pan

Hua Pan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230307299
    Abstract: The present disclosure provides a fabrication method that includes providing a workpiece having a semiconductor substrate with a first circuit area and a second circuit area; forming a first active region within the first circuit area and a second active region within the second circuit area; forming a first gate structure on the first active region and a second gate structure on the second active region; introducing a doping species to the first active region but not the second active region; performing an etching process, thereby simultaneously recessing both first source/drain regions of the first active region and second source/drain regions of the second active region at a same etch rate; and thereafter, epitaxially growing first source/drain features within the first source/drain regions and second source/drain features within the second source/drain regions.
    Type: Application
    Filed: May 22, 2023
    Publication date: September 28, 2023
    Inventors: Ta-Chun Lin, Kuo-Hua Pan, Jhon Jhy Liaw
  • Patent number: 11756962
    Abstract: Provided is a semiconductor device including a substrate, one hybrid fin, a gate, and a dielectric structure. The substrate includes at least two fins. The hybrid fin is disposed between the at least two fins. The gate covers portions of the at least two fins and the hybrid fin. The dielectric structure lands on the hybrid fin to divide the gate into two segment. The two segments are electrically isolated to each other by the dielectric structure and the hybrid fin. The hybrid fin includes a first portion, disposed between the two segments of the gate; and a second portion, disposed aside the first portion, wherein a top surface of the second portion is lower than a top surface of the first portion.
    Type: Grant
    Filed: May 23, 2022
    Date of Patent: September 12, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-San Chien, Chun-Sheng Liang, Jhon-Jhy Liaw, Kuo-Hua Pan, Hsin-Che Chiang
  • Patent number: 11749677
    Abstract: A semiconductor structure includes a first semiconductor device formed over a substrate and a second semiconductor device formed over the substrate. The first semiconductor device includes a first source/drain feature over the substrate, a first gate structure over the substrate, a first conductive feature over the first source/drain feature, and a first insulation layer between the first gate structure and the first conductive feature. The second semiconductor device includes a second source/drain feature over the substrate, a second gate structure over the substrate, a second conductive feature over the second source/drain feature, and a second insulation layer between the second gate structure and the second conductive feature. A width of the first conductive feature and a width of the second conductive feature are different, and a width of the first insulation layer is less than a width of the second insulation layer.
    Type: Grant
    Filed: July 21, 2021
    Date of Patent: September 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ta-Chun Lin, Kuo-Hua Pan, Jhon Jhy Liaw
  • Patent number: 11749683
    Abstract: A semiconductor device includes a first active region and a second active region disposed over a substrate. A first source/drain component is grown on the first active region. A second source/drain component is grown on the second active region. An interlayer dielectric (ILD) is disposed around the first source/drain component and the second source/drain component. An isolation structure extends vertically through the ILD. The isolation structure separates the first source/drain component from the second source/drain component.
    Type: Grant
    Filed: April 25, 2022
    Date of Patent: September 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO. LTD.
    Inventors: Ta-Chun Lin, Kuan-Lin Yeh, Chun-Jun Lin, Kuo-Hua Pan, Mu-Chi Chiang
  • Publication number: 20230274562
    Abstract: Bootstrapped semantic preprocessing techniques for medical datasets such as whole slide histopathology image datasets can be used to more efficiently and effectively train artificial intelligence used for medical purposes. The bootstrapped semantic preprocessing techniques generally include deriving metrics from image features and adjusting images according to the metrics. This process can be repeated iteratively for unknown and unlabeled data using a bootstrapping technique to normalize unknown samples to the training dataset distribution.
    Type: Application
    Filed: February 27, 2023
    Publication date: August 31, 2023
    Inventors: Christopher Collazo, Lawrence Hall, Dmitry Goldgof, Samuel Wickline, Hua Pan
  • Patent number: 11742349
    Abstract: A method includes forming a first channel region, a second channel region, and a third channel region over a substrate, depositing a first interfacial layer over the first, second, and third channel regions, removing the first interfacial layer from the first and second channel regions, depositing a second interfacial layer over the first and second channel regions, thinning a thickness of the second interfacial layer over the first channel region, depositing a high-k dielectric layer over the first, second, and third channel regions, and forming a gate electrode layer over the first, second, and third channel regions.
    Type: Grant
    Filed: April 11, 2022
    Date of Patent: August 29, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Ta-Chun Lin, Kuo-Hua Pan, Jhon Jhy Liaw, Shien-Yang Wu
  • Publication number: 20230263855
    Abstract: The present disclosure relates to nanoparticles and methods for polynucleotide transfection.
    Type: Application
    Filed: November 18, 2022
    Publication date: August 24, 2023
    Inventors: Samuel A. Wickline, Hua Pan, Christine Thien-Nga Pham, Huimin Yan
  • Publication number: 20230260796
    Abstract: In a method of manufacturing a semiconductor device, an initial pattern layout is obtained. The initial pattern layout incudes fin patterns which include active fin patterns to be formed as active fin structures and dummy fin patterns not to be formed as actual fin structures or to be removed. The locations of the fin patterns are modified, as follows. A space between adjacent active fin patterns is increased by a first amount, a space between the dummy fin patterns is decreased by a second amount, and a space between one of the dummy fin patterns and one of the active fin patterns adjacent to the one of the dummy fin patterns is decreased by a third amount. Mandrel patterns are placed so that the fin patterns of which locations are modified are placed along longitudinal edges of the mandrel patterns.
    Type: Application
    Filed: May 24, 2022
    Publication date: August 17, 2023
    Inventors: Yu-Jen CHANG, Chih-Yang CHEN, Hua Feng CHEN, Kuo-Hua PAN, Mu-Chi CHIANG
  • Patent number: 11728206
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a first fin structure and an adjacent second fin structure protruding from the semiconductor substrate and an isolation structure formed in the semiconductor substrate and in direct contact with the first fin structure and the second fin structure. The first fin structure and the second fin structure each include a first portion protruding above a top surface of the isolation structure, a second portion in direct contact with a bottom surface of the first portion, and a third portion extending from a bottom of the second portion. A top width of the third portion is different than a bottom width of the third portion and a bottom width of the second portion.
    Type: Grant
    Filed: January 25, 2022
    Date of Patent: August 15, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ta-Chun Lin, Tien-Shao Chuang, Kuang-Cheng Tai, Chun-Hung Chen, Chih-Hung Hsieh, Kuo-Hua Pan, Jhon-Jhy Liaw
  • Patent number: 11721763
    Abstract: A method comprises forming a source/drain region on a substrate; forming a dielectric layer over the source/drain region; forming a contact hole in the dielectric layer; forming a contact hole liner in the contact hole; removing a first portion of the contact hole liner to expose a sidewall of the contact hole; etching the exposed sidewall of the contact hole to laterally expand the contact hole; and forming a contact plug in the laterally expanded contact hole.
    Type: Grant
    Filed: December 17, 2020
    Date of Patent: August 8, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wen-Che Tsai, Min-Yann Hsieh, Hua-Feng Chen, Kuo-Hua Pan
  • Publication number: 20230238603
    Abstract: The present disclosure relates to a battery energy processing device and method and a vehicle. The battery energy processing device includes: a bridge arm converter, having a first bus terminal connected with a positive electrode of a battery and a second bus terminal connected with a negative electrode of the battery; a motor winding, having a first end connected with a midpoint of the bridge arm converter; an energy storage device, respectively connected with a second end of the motor winding and the second bus terminal; and a controller, configured to control, in a first preset state, the bridge arm converter to charge and discharge the battery, so as to realize heating of the battery. In this way, the charging and discharging of the battery can be controlled, and internal resistance of the battery causes the battery to generate a large amount of heat, which causes a temperature rise of the battery, thereby realizing the heating of the battery.
    Type: Application
    Filed: June 4, 2021
    Publication date: July 27, 2023
    Inventors: Yubo LIAN, Heping LING, Hua PAN, Lei YAN, Feiyue XIE
  • Patent number: 11688791
    Abstract: A semiconductor structure includes a first active region over a substrate and extending along a first direction, a gate structure over the first active region and extending along a second direction substantially perpendicular to the first direction, a gate-cut feature abutting an end of the gate structure, and a channel isolation feature extending along the second direction and between the first active region and a second active region. The gate structure includes a metal electrode in direct contact with the gate-cut feature. The channel isolation feature includes a liner on sidewalls extending along the second direction and a dielectric fill layer between the sidewalls. The gate-cut feature abuts an end of the channel isolation feature and the dielectric fill layer is in direct contact with the gate-cut feature.
    Type: Grant
    Filed: November 12, 2019
    Date of Patent: June 27, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ta-Chun Lin, Jhon Jhy Liaw, Kuo-Hua Pan
  • Patent number: 11658074
    Abstract: The present disclosure provides a fabrication method that includes providing a workpiece having a semiconductor substrate that includes a first circuit area and a second circuit area; forming a first active region in the first circuit area and a second active region on the second circuit area; forming first stacks with a first gate spacing on the first active region and second gate stacks with a second gate spacing on the second active region, the second gate spacing being different from the first gate spacing; performing an ion implantation to introduce a doping species to the first active region; performing an etching process, thereby recessing both first source/drain regions of the first active region with a first etch rate and second source/drain regions of the second active region; and epitaxially growing first source/drain features within the first source/drain regions and second source/drain features within the second source/drain regions.
    Type: Grant
    Filed: April 8, 2021
    Date of Patent: May 23, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ta-Chun Lin, Kuo-Hua Pan, Jhon Jhy Liaw
  • Publication number: 20230145984
    Abstract: A method includes depositing a semiconductor stack within a first region and a second region on a substrate, the semiconductor stack having alternating layers of a first type of semiconductor material and a second type of semiconductor material. The method further includes removing a portion of the semiconductor stack from the second region to form a trench and with an epitaxial growth process, filling the trench with the second type of semiconductor material.
    Type: Application
    Filed: January 3, 2023
    Publication date: May 11, 2023
    Inventors: Ta-Chun Lin, Kuo-Hua Pan, Jhon Jhy Liaw
  • Publication number: 20230101278
    Abstract: A semiconductor structure includes a semiconductor fin protruding from a substrate, an S/D feature disposed over the semiconductor fin, and a first dielectric fin and a second dielectric fin disposed over the substrate, where the semiconductor fin is disposed between the first dielectric fin and the second dielectric fin, where a first air gap is enclosed by a first sidewall of the epitaxial S/D feature and the first dielectric fin, and where a second air gap is enclosed by a second sidewall of the epitaxial S/D feature and the second dielectric fin.
    Type: Application
    Filed: December 7, 2022
    Publication date: March 30, 2023
    Inventors: Ta-Chun Lin, Kuo-Hua Pan, Jhon Jhy Liaw
  • Publication number: 20230081710
    Abstract: Semiconductor structures and methods are provided. A semiconductor structure according to an embodiment includes a first cell disposed over a first well doped with a first-type dopant, a second cell disposed over the first well, and a tap cell disposed over the first well. The tap cell is sandwiched between the first cell and the second cell. The first cell includes a first plurality of transistors and the second cell includes a second plurality of transistors.
    Type: Application
    Filed: November 21, 2022
    Publication date: March 16, 2023
    Inventors: Ta-Chun Lin, Kuo-Hua Pan, Jhon Jhy Liaw
  • Publication number: 20230062379
    Abstract: Semiconductor structures and methods of forming the same are provided. A method according to an embodiment includes receiving a workpiece comprising a first semiconductor element and a second semiconductor element, and a dielectric fin disposed between the first semiconductor element and the second semiconductor element. The method also includes forming a masking layer directly over the dielectric fin, etching the first semiconductor element and the second semiconductor element to form a first recess and a second recess, and forming a first source/drain feature and a second source/drain feature in the first recess and the second recess, respectively. By employing a masking layer and patterning the masking layer to have different widths, a parasitic resistance and a parasitic capacitance of the semiconductor structure may be adjusted accordingly, and undesirably bridging between two adjacent epitaxial source/drain features may be prevented.
    Type: Application
    Filed: August 30, 2021
    Publication date: March 2, 2023
    Inventors: Ta-Chun Lin, Kuo-Hua Pan, Jhon Jhy Liaw
  • Patent number: 11583595
    Abstract: The invention provides nucleic acids and nucleic acid expression vectors containing optimized mGluR6 promoters for expression of transgenes in the retina. The compositions and methods of the invention are useful for expression of gene products to preserve, improve, or restore phototransduction or vision.
    Type: Grant
    Filed: April 26, 2019
    Date of Patent: February 21, 2023
    Assignee: Wayne State University
    Inventors: Zhuo-Hua Pan, Qi Lu, Tushar H. Ganjawala, JrGang Cheng
  • Publication number: 20230038790
    Abstract: The present disclosure relates to the technical field of vehicles, and provides a vehicle and an energy conversion device and a control method therefor. The energy conversion device includes a motor controller, a bus capacitor, a first switch module, a motor, and a second switch module. By controlling the first switch module and the second switch module to be turned on/off, a motor driving circuit can be formed by a battery pack, the first switch module, the bus capacitor, the motor controller, and the motor, and a charging and discharging circuit can be formed by the battery pack, the second switch module, the motor, the motor controller, and the bus capacitor.
    Type: Application
    Filed: December 10, 2020
    Publication date: February 9, 2023
    Inventors: Heping LING, Hua PAN, Feiyue XIE, Ri HUANG, Yihao ZHENG
  • Publication number: 20230009852
    Abstract: According to the present disclosure, hybrid fins positioned between two different epitaxial source/drain features are recessed to prevent conductive material from entering interior air gaps of the hybrid fins, thus, preventing short circuit between source/drain contacts and gate electrodes. Recessing the hybrid fins may be achieved by enlarging mask during semiconductor fin etch back, therefore, without increasing production cost.
    Type: Application
    Filed: April 5, 2022
    Publication date: January 12, 2023
    Inventors: Ta-Chun LIN, Chun-Jun LIN, Kuo-Hua PAN, Jhon Jhy LIAW, Hsiu-Yu KANG, Yu-Hsuan LU, Hui-Chi CHUANG