Abstract: Integrated circuits that include a magnetic tunnel junction (MTJ) for a magnetoresistive random-access memory (MRAM) and methods for fabricating such integrated circuits are provided. In one example, a method for fabricating an integrated circuit includes forming a lower electrode on a metal interconnect. The metal interconnect is disposed above a semiconductor substrate and is aligned with a normal axis that is substantially perpendicular to the semiconductor substrate. The lower electrode includes a conductive metal plug. A MTJ stack is formed on the lower electrode aligned with the normal axis.

Abstract: A method of forming a self-aligned MTJ without using a photolithography mask and the resulting device are provided. Embodiments include forming a first electrode over a metal layer, the metal layer recessed in a low-k dielectric layer; forming a MTJ layer over the first electrode; forming a second electrode over the MTJ layer; removing portions of the second electrode, the MTJ layer, and the first electrode down to the low-k dielectric layer; forming a silicon nitride-based layer over the second electrode and the low-k dielectric layer; and planarizing the silicon nitride-based layer down to the second electrode.

Abstract: A method for making a semiconductor device may include forming a first semiconductor layer on a substrate comprising a first semiconductor material, forming a second semiconductor layer on the first semiconductor layer comprising a second semiconductor material, and forming mask regions on the second semiconductor layer and etching through the first and second semiconductor layers to define a plurality of spaced apart pillars on the substrate. The method may further include forming an oxide layer laterally surrounding the pillars and mask regions, and removing the mask regions and forming inner spacers on laterally adjacent corresponding oxide layer portions atop each pillar. The method may additionally include etching through the second semiconductor layer between respective inner spacers to define a pair of semiconductor fins of the second semiconductor material from each pillar, and removing the inner spacers and forming an oxide beneath each semiconductor fin.

Abstract: Embodiments herein provide a magnetic tunnel junction (MTJ) formed between metal layers of a semiconductor device. Specifically, provided is an approach for forming the semiconductor device using only one or two masks, the approach comprising: forming a first metal layer in a dielectric layer of the semiconductor device, forming a bottom electrode layer over the first metal layer, forming a MTJ over the bottom electrode layer, forming a top electrode layer over the MTJ, patterning the top electrode layer and the MTJ with a first mask, and forming a second metal layer over the top electrode layer. Optionally, the bottom electrode layer may be patterned using a second mask. Furthermore, in another embodiment, an insulator layer (e.g., manganese) is formed atop the dielectric layer, wherein a top surface of the first metal layer remains exposed following formation of the insulator layer such that the bottom electrode layer contacts the top surface of the first metal layer.

Abstract: A light guide plate includes a light incident surface, a light facing surface facing the light incident surface, a connection surface connecting the light incident surface with the light facing surface, and a top surface connected with the light incident surface, the light facing surface, and the connection surface. The light incident surface receives light from a light source, the light facing surface reflects light, and the top surface outputs light toward a display panel. The connection surface includes at least two absorption surfaces parallel to a straight line linking a center of an arc with an end of the light incident surface and at least one reflective surface interposed the two adjacent absorption surfaces to reflect the light.

Abstract: An apparatus for crystallizing an active layer of a thin film transistor, the apparatus includes a first laser irradiating a first beam toward a substrate, an amorphous layer on the substrate being crystallizable into the active layer of the thin film transistor by the first beam, and a second laser irradiating a second beam toward the substrate to heat the active layer, the second beam having an asymmetric intensity profile in a scanning direction of the first and second beams.

Abstract: Approaches for spacer chamfering in a replacement metal gate (RMG) device are provided. Specifically, a semiconductor device is provided with a set of fins formed from a substrate; a silicon-based layer conformally deposited over the set of fins; an etch-stop layer (e.g., titanium nitride (TiN)) formed over the silicon-based layer, the etch-stop layer being selective to at least one of: silicon, oxide, and nitride; a set of RMG structures formed over the substrate; a set of spacers formed along each of the set of RMG structures, wherein a vertical layer of material from each of the set of spacers is removed selective to the etch-stop layer. By chamfering each sidewall spacer, a wider area for subsequent work-function (WF) metal deposition is provided. Meanwhile, each transistor channel region is covered by the etch-stop layer (e.g., TiN), which maintains the original gate critical dimension during reactive ion etching.

Abstract: A method of forming a self-aligned MTJ without using a photolithography mask and the resulting device are provided. Embodiments include forming a first electrode over a metal layer, the metal layer recessed in a low-k dielectric layer; forming a MTJ layer over the first electrode; forming a second electrode over the MTJ layer; removing portions of the second electrode, the MTJ layer, and the first electrode down to the low-k dielectric layer; forming a silicon nitride-based layer over the second electrode and the low-k dielectric layer; and planarizing the silicon nitride-based layer down to the second electrode.

Abstract: One illustrative method disclosed herein includes, among other things, forming a sacrificial gate structure above a semiconductor substrate, forming a sidewall spacer adjacent opposite sides of the sacrificial gate structure, removing the sacrificial gate structure and forming a replacement gate structure in its place, at some point after forming the replacement gate structure, performing an etching process to reduce the height of the spacers so as to thereby define recessed spacers having an upper surface that partially defines a spacer recess, and forming a spacer etch block cap on the upper surface of each recessed spacer structure and within the spacer recess.

Abstract: Approaches for spacer chamfering in a replacement metal gate (RMG) device are provided. Specifically, a semiconductor device is provided with a set of fins formed from a substrate; a silicon-based layer conformally deposited over the set of fins; an etch-stop layer (e.g., titanium nitride (TiN)) formed over the silicon-based layer, the etch-stop layer being selective to at least one of: silicon, oxide, and nitride; a set of RMG structures formed over the substrate; a set of spacers formed along each of the set of RMG structures, wherein a vertical layer of material from each of the set of spacers is removed selective to the etch-stop layer. By chamfering each sidewall spacer, a wider area for subsequent work-function (WF) metal deposition is provided. Meanwhile, each transistor channel region is covered by the etch-stop layer (e.g., TiN), which maintains the original gate critical dimension during reactive ion etching.

Abstract: A conformal doping process for FinFET devices on a semiconductor substrate which includes NFET fins and PFET fins. In a first exemplary embodiment, an N-type dopant composition is conformally deposited over the NFET fins and the PFET fins. The semiconductor substrate is annealed to drive in an N-type dopant from the N-type dopant composition into the NFET fins. A P-type dopant composition is conformally deposited over the NFET fins and the PFET fins. The semiconductor substrate is annealed to drive in a P-type dopant from the P-type dopant composition into the PFET fins. In a second exemplary embodiment, one of the NFET fins and PFET fins may be covered with a first dopant composition and then a second dopant composition may cover both the NFET fins and the PFET fins followed by an anneal to drive in both dopants.

Abstract: Embodiments herein provide a magnetic tunnel junction (MTJ) formed between metal layers of a semiconductor device. Specifically, provided is an approach for forming the semiconductor device using only one or two masks, the approach comprising: forming a first metal layer in a dielectric layer of the semiconductor device, forming a bottom electrode layer over the first metal layer, forming a MTJ over the bottom electrode layer, forming a top electrode layer over the MTJ, patterning the top electrode layer and the MTJ with a first mask, and forming a second metal layer over the top electrode layer. Optionally, the bottom electrode layer may be patterned using a second mask. Furthermore, in another embodiment, an insulator layer (e.g., manganese) is formed atop the dielectric layer, wherein a top surface of the first metal layer remains exposed following formation of the insulator layer such that the bottom electrode layer contacts the top surface of the first metal layer.

Abstract: A method for making a semiconductor device may include forming a first semiconductor layer on a substrate comprising a first semiconductor material, forming a second semiconductor layer on the first semiconductor layer comprising a second semiconductor material, and forming mask regions on the second semiconductor layer and etching through the first and second semiconductor layers to define a plurality of spaced apart pillars on the substrate. The method may further include forming an oxide layer laterally surrounding the pillars and mask regions, and removing the mask regions and forming inner spacers on laterally adjacent corresponding oxide layer portions atop each pillar. The method may additionally include etching through the second semiconductor layer between respective inner spacers to define a pair of semiconductor fins of the second semiconductor material from each pillar, and removing the inner spacers and forming an oxide beneath each semiconductor fin.

Abstract: A conformal doping process for FinFET devices on a semiconductor substrate which includes NFET fins and PFET fins. In a first exemplary embodiment, an N-type dopant composition is conformally deposited over the NFET fins and the PFET fins. The semiconductor substrate is annealed to drive in an N-type dopant from the N-type dopant composition into the NFET fins. A P-type dopant composition is conformally deposited over the NFET fins and the PFET fins. The semiconductor substrate is annealed to drive in a P-type dopant from the P-type dopant composition into the PFET fins. In a second exemplary embodiment, one of the NFETfins and PFET fins may be covered with a first dopant composition and then a second dopant composition may cover both the NFET fins and the PFET fins followed by an anneal to drive in both dopants.

Abstract: Provided is a liquid crystal display including: a lower display panel including a lower insulating substrate and a lower reflective layer; an upper display panel including an upper insulating substrate and an upper reflective layer; a liquid crystal layer positioned between the lower reflective layer of the lower display panel and the upper reflective layer of the upper display panel; and a backlight unit positioned on a lower portion of the lower display panel and including a light source, wherein a pair of field generating electrodes are formed in at least one display panel of the lower display panel and the upper display panel, wherein microcavities are formed in the lower reflective layer, the upper reflective layer, and the liquid crystal layer, and wherein a wavelength and luminance of light resonated and emitted in the microcavities are changed by an electric field generated by the field generating electrodes.

Abstract: Approaches for spacer chamfering in a replacement metal gate (RMG) device are provided. Specifically, a semiconductor device is provided with a set of fins formed from a substrate; a silicon-based layer conformally deposited over the set of fins; an etch-stop layer (e.g., titanium nitride (TiN)) formed over the silicon-based layer, the etch-stop layer being selective to at least one of: silicon, oxide, and nitride; a set of RMG structures formed over the substrate; a set of spacers formed along each of the set of RMG structures, wherein a vertical layer of material from each of the set of spacers is removed selective to the etch-stop layer. By chamfering each sidewall spacer, a wider area for subsequent work-function (WF) metal deposition is provided. Meanwhile, each transistor channel region is covered by the etch-stop layer (e.g., TiN), which maintains the original gate critical dimension during reactive ion etching.

Abstract: Disclosed is a novel system and method to form local interconnects in a continuity test structure. The method begins with a first set of transistor gate lines and a second set of transistor gate lines are formed. Next, a first group of two or more local interconnect lines landing on transistor gates and formed substantially perpendicular to the first set of transistor gate lines and electrically coupled therewith is formed using a first lithography pass. A second group of two or more local interconnect lines landing and formed substantially perpendicular to the second set of transistor gate lines and electrically coupled therewith is formed during second lithography pass. For some technologies, a third set of transistor gate lines is formed along with a third group using a third lithography pass.

Abstract: The present invention relates to a method of embodying a cooperation system between SEND and IPSec in an IPv6 environment. The cooperation system between SEND and IPSec in accordance with the present invention includes: receiving an authentication completion report message including a first IP address of a host whose authentication is completed by the SEND; generating new authentication information corresponding to the host and storing the new authentication information in a temporary storage area, if authentication information for the host is not present in the temporary storage area, wherein the authentication information includes the first IP address; and if an authentication check request message including a second IP address is received from the IPSec, checking whether the second IP address is present in the temporary storage area, and sending the result of checking to the IPSec.

Abstract: The present invention relates to a method for differentiation of mesenchymal stem cells. More specifically, the invention relates to a method for differentiating mesenchymal stem cells to neural cells by treating the mesenchymal stem cells with low-frequency sound waves. The differentiation method of the present invention can induce differentiation even with low-cost media rather than induced neural differentiation mediums which are expensive due to addition of growth factors, and the neural cells differentiated according to the present invention may be useful for treatment of neurological diseases.

Abstract: A backlight unit includes a light source part, a light guide plate, a prism sheet, and a reflecting element. The light source part is configured to provide light. The light guide plate includes: a light incident portion disposed adjacent to the light source part, a corresponding portion spaced apart from and facing the light incident portion, a light exiting surface, and a bottom surface spaced apart from and facing the light exiting surface. A thickness of the light incident portion is greater than a thickness of the corresponding portion. The prism sheet is disposed on the light guide plate. The prism sheet includes a plurality of prisms extending toward the light guide plate. The reflecting element is disposed under the light guide plate. The reflecting element is configured to reflect at least some of the light toward the light guide plate.