Patents by Inventor Jennifer Y. Sun

Jennifer Y. Sun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS AND APPARATUS FOR ENHANCED FLOW DETECTION REPEATABILITY OF THERMAL-BASED MASS FLOW CONTROLLERS (MFCS)
    Publication number: 20180188748
    Abstract: An electronic device manufacturing system includes a mass flow controller (MFC) that has a thermal flow sensor. The thermal flow sensor may measure a mass flow rate and may include a sensor tube having an inner surface coated with a material to form an inner barrier layer. The inner barrier layer may prevent or substantially reduce the likelihood of a corrosive reaction from occurring on the inner surface, which may prevent or reduce the likelihood of the MFC drifting beyond the MFC's mass flow rate accuracy specifications. This may improve the repeatability of flow detection by the MFC. Methods of measuring and controlling a mass flow rate in an electronic device manufacturing system are also provided, as are other aspects.
    Type: Application
    Filed: December 31, 2016
    Publication date: July 5, 2018
    Inventors: Ming Xu, Sushant S. Koshti, Michael R. Rice, Steven E. Babayan, Jennifer Y. Sun
  • SEMICONDUCTOR PROCESSING APPARATUS WITH A CERAMIC-COMPRISING SURFACE WHICH EXHIBITS FRACTURE TOUGHNESS AND HALOGEN PLASMA RESISTANCE
    Publication number: 20180174866
    Abstract: A solid solution-comprising ceramic article useful in semiconductor processing, which article may be in the form of a solid, bulk ceramic, or may be in the form of a substrate having a ceramic coating of the same composition as the bulk ceramic material on at least one outer surface. The ceramic article is resistant to erosion by halogen-containing plasmas and provides advantageous mechanical properties. The solid solution-comprising ceramic article is formed from a combination of yttrium oxide and zirconium oxide. The ceramic-comprising article includes ceramic which is formed from zirconium oxide at a molar concentration ranging from about 96 mole % to about 91 mole %, and yttrium oxide at a molar concentration ranging from about 4 mole % to about 9 mole %.
    Type: Application
    Filed: November 26, 2013
    Publication date: June 21, 2018
    Applicant: Applied Materials, Inc.
    Inventors: Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Li Xu, Kenneth S. Collins
  • Cleaning process that precipitates yttrium oxy-flouride
    Patent number: 9999907
    Abstract: A method includes immersing an article comprising a yttrium based oxide in an acidic cleaning solution comprising water and 1-10 mol % HF acid. A portion of the yttrium based oxide is dissolved by the HF acid. A yttrium based oxy-fluoride is formed based on a reaction between the HF acid and the dissolved portion of the yttrium based. The yttrium based oxy-fluoride is precipitated onto the article over the yttrium based oxide to form a yttrium based oxy-fluoride coating. The acidic cleaning solution may include a yttrium based salt, which may additionally react with the HF acid to form more of the yttrium based oxy-fluoride.
    Type: Grant
    Filed: April 1, 2016
    Date of Patent: June 19, 2018
    Assignee: Applied Materials, Inc.
    Inventors: Chengtsin Lee, Jennifer Y. Sun, Yikai Chen
  • SUBSTRATE SUPPORT ASSEMBLY HAVING A PLASMA RESISTANT PROTECTIVE LAYER
    Publication number: 20180151401
    Abstract: A substrate support assembly comprises a ceramic body and a thermally conductive base bonded to a lower surface of the ceramic body. The substrate support assembly further comprises a protective layer covering an upper surface of the ceramic body, wherein the protective layer comprises at least one of yttrium aluminum garnet (YAG) or a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.
    Type: Application
    Filed: January 18, 2018
    Publication date: May 31, 2018
    Inventors: Jennifer Y. Sun, Senh Thach, Biraja P. Kanungo, Vahid Firouzdor
  • Plasma erosion resistant thin film coating for high temperature application
    Patent number: 9976211
    Abstract: An article such as a susceptor includes a body of a thermally conductive material coated by a first protective layer and a second protective layer over a surface of the body. The first protective layer is a thermally conductive ceramic. The second protective layer covers the first protective layer and is a plasma resistant ceramic thin film that is resistant to cracking at temperatures of 650 degrees Celsius.
    Type: Grant
    Filed: April 22, 2015
    Date of Patent: May 22, 2018
    Assignee: Applied Materials, Inc.
    Inventors: Vahid Firouzdor, Biraja P. Kanungo, Jennifer Y. Sun, Martin J. Salinas, Jared Ahmad Lee
  • CERAMIC COMPONENT FORMED FROM CERAMIC PORTIONS BONDED TOGETHER WITH A HALOGEN PLASMA RESISTANT BONDING AGENT
    Publication number: 20180134612
    Abstract: A bonded ceramic component which is resistant to reactive halogen-containing plasmas, said component comprising ceramic portions which are bonded together by a bonding material which includes an oxyfluoride glass-ceramic-comprising transition area between interfaces of the ceramic portions, where the transition area includes form at least 0.1 volume % amorphous phase up to about 50 volume % amorphous phase.
    Type: Application
    Filed: January 9, 2018
    Publication date: May 17, 2018
    Inventors: Jennifer Y. Sun, Ren-Guan Duan, Kenneth S. Collins
  • Ion assisted deposition top coat of rare-earth oxide
    Patent number: 9970095
    Abstract: A method of manufacturing an article comprises providing an article. An ion assisted deposition (IAD) process is performed to deposit a second protective layer over a first protective layer. The second protective layer is a plasma resistant rare earth oxide having a thickness of less than 50 microns and a porosity of less than 1%. The second protective layer seals a plurality of cracks and pores of the first protective layer.
    Type: Grant
    Filed: July 15, 2016
    Date of Patent: May 15, 2018
    Assignee: Applied Materials, Inc.
    Inventors: Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor
  • Multi-Tiered Safety Control System and Methods for Online Communities
    Publication number: 20180121557
    Abstract: A system and method of maintaining community safety standards within an Internet community. A balance is achieved between open communication and costly supervision of an immersive online community by use of automated algorithms, human supervision and peer monitoring. An automated filtering process is used in conjunction with an evaluation and penalty process. The filter is enhanced over time. A peer-to-peer control and peer-to-administrator reporting scheme complete the system and methods to synergistically maintain safety and set standards within the community.
    Type: Application
    Filed: December 29, 2017
    Publication date: May 3, 2018
    Inventors: Mark A. Dinan, Jennifer Y. Sun, Ann M. Pickard, James M. Bower, Munir F. Bhatti, Joseph Vaughn Lewis Cook
  • Low temperature fluoride glasses and glazes
    Patent number: 9957192
    Abstract: An article comprises a body having a coating. The coating comprising a eutectic system having a super-lattice of a first fluoride and a second fluoride. The coating includes a glaze on a surface of the coating, the glaze comprising the eutectic system having the super-lattice of the first fluoride and the second fluoride.
    Type: Grant
    Filed: January 27, 2017
    Date of Patent: May 1, 2018
    Assignee: Applied Materials, Inc.
    Inventors: Chengtsin Lee, Jennifer Y. Sun
  • MULTI-LAYER COATING WITH DIFFUSION BARRIER LAYER AND EROSION RESISTANT LAYER
    Publication number: 20180112311
    Abstract: A multi-layer coating for a surface of an article comprises a diffusion barrier layer and an erosion resistant layer. The diffusion barrier layer may be a nitride film including but not limited to TiNx, TaNx, Zr3N4, and TiZrxNy. The erosion resistant layer may be a rare oxide film comprising YZrxOy. The diffusion barrier layer and the erosion resistant layer may be deposited on the article's surface using a thin film deposition technique including but not limited to, ALD, PVD, and CVD.
    Type: Application
    Filed: December 15, 2017
    Publication date: April 26, 2018
    Inventors: David Fenwick, Xiaowei Wu, Jennifer Y. Sun
  • HIGH PURITY METALLIC TOP COAT FOR SEMICONDUCTOR MANUFACTURING COMPONENTS
    Publication number: 20180105938
    Abstract: A component for a manufacturing chamber comprises a coating and an anodization layer on the coating. The anodization layer has a thickness of about 2-10 mil. The anodization layer comprises a low porosity bottom layer portion having a porosity that is less than about 40-50% and a porous columnar top layer portion having a porosity of about 40-40% and comprising a plurality of columnar nanopores having a diameter of about 10-50 nm.
    Type: Application
    Filed: December 19, 2017
    Publication date: April 19, 2018
    Inventors: Jennifer Y. Sun, Vahid Firouzdor
  • ATOMIC LAYER DEPOSITION OF PROTECTIVE COATINGS FOR SEMICONDUCTOR PROCESS CHAMBER COMPONENTS
    Publication number: 20180105932
    Abstract: A multi-component coating composition for a surface of a chamber component comprising at least one first film layer of a yttrium oxide coated onto the surface of the chamber component using an atomic layer deposition process and at least one second film layer of zirconium oxide coated onto the surface of the chamber component using an atomic layer deposition process, wherein the multi-component coating comprises YZrxOy.
    Type: Application
    Filed: December 19, 2017
    Publication date: April 19, 2018
    Inventors: David Fenwick, Jennifer Y. Sun
  • ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CHAMBER COMPONENTS
    Publication number: 20180105922
    Abstract: An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 ?m, wherein the plasma resistant rare earth oxide film consists essentially of 40 mol % to less than 100 mol % of Y2O3, over 0 mol % to 60 mol % of ZrO2, and 0 mol % to 9 mol % of Al2O3.
    Type: Application
    Filed: December 15, 2017
    Publication date: April 19, 2018
    Inventors: Jennifer Y. Sun, Vahid Firouzdor, Biraja Prasad Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang
  • COATING ARCHITECTURE FOR PLASMA SPRAYED CHAMBER COMPONENTS
    Publication number: 20180108517
    Abstract: A method of plasma spraying an article comprises inserting the article into a vacuum chamber for a low pressure plasma spraying system. A low pressure plasma spray process is then performed by the low pressure plasma spraying system to form a first plasma resistant layer having a thickness of 20-500 microns and a porosity of over 1%. A plasma spray thin film, plasma spray chemical vapor deposition or plasma spray physical vapor deposition process is then performed by the low pressure plasma spraying system to deposit a second plasma resistant layer on the first plasma resistant layer, the second plasma resistant layer having a thickness of less than 50 microns and a porosity of less than 1%.
    Type: Application
    Filed: December 15, 2017
    Publication date: April 19, 2018
    Inventors: Jennifer Y. Sun, Yikai Chen, Biraja P. Kanungo
  • High temperature electrostatic chuck with real-time heat zone regulating capability
    Patent number: 9948214
    Abstract: Embodiments of the present invention provide electrostatic chucks for operating at elevated temperatures. One embodiment of the present invention provides a dielectric chuck body for an electrostatic chuck. The dielectric chuck body includes a substrate supporting plate having a top surface for receiving a substrate and a back surface opposing the top surface, an electrode embedded in the substrate supporting plate, and a shaft having a first end attached to the back surface of the substrate supporting plate and a second end opposing the first end. The second end is configured to contact a cooling base and provide temperature control to the substrate supporting plate. The shaft is hollow having a sidewall enclosing a central opening, and two or more channels formed through the sidewall and extending from the first end to the second end.
    Type: Grant
    Filed: March 11, 2013
    Date of Patent: April 17, 2018
    Assignee: Applied Materials, Inc.
    Inventors: Dmitry Lubomirsky, Jennifer Y. Sun, Sehn Thach, Xing Lin, Michael D. Willwerth, Konstantin Makhratchev
  • RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION
    Publication number: 20180100228
    Abstract: A component for a semiconductor processing chamber includes a ceramic body having at least one surface with a first average surface roughness of approximately 8-16 micro-inches. The component further includes a conformal protective layer on at least one surface of the ceramic body, wherein the conformal protective layer is a plasma resistant rare earth oxide film having a substantially uniform thickness of less than 300 ?m over the at least one surface and having a second average surface roughness of below 10 micro-inches, wherein the second average surface roughness is less than the first average surface roughness.
    Type: Application
    Filed: December 11, 2017
    Publication date: April 12, 2018
    Inventors: Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor, Ying Zhang
  • RARE-EARTH OXIDE BASED EROSION RESISTANT COATINGS FOR SEMICONDUCTOR APPLICATION
    Publication number: 20180102237
    Abstract: An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 0 mol % to about 55 mol %, and Al2O3 in a range between about 0 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 30 mol % to about 60 mol %, ZrO2 in a range between about 0 mol % to about 20 mol %, and Al2O3 in a range between about 30 mol % to about 60 mol %.
    Type: Application
    Filed: December 8, 2017
    Publication date: April 12, 2018
    Inventors: Jennifer Y. Sun, Biraja P. Kanungo, Tom Cho
  • FLOURIDE GLAZES FROM FLOURINE ION TREATMENT
    Publication number: 20180093919
    Abstract: An article comprises a body having a coating. The coating comprising a mixture of a first oxide and a second oxide. The coating includes a glaze on a surface of the coating, the glaze comprising a eutectic system having a super-lattice of a first fluoride and a second fluoride.
    Type: Application
    Filed: November 17, 2017
    Publication date: April 5, 2018
    Inventors: Chengtsin Lee, Jennifer Y. Sun
  • ION ASSISTED DEPOSITION FOR RARE-EARTH OXIDE BASED THIN FILM COATINGS ON PROCESS RINGS
    Publication number: 20180096825
    Abstract: A ring shaped body includes a top flat region, a ring inner side and a ring outer side. The ring inner side comprises an approximately vertical wall. A conformal protective layer comprising 40 mol % to less than 100 mol % of Y2O3 and above 0 mol % to less than 60 mol % of ZrO2 is disposed on at least the top flat region, the ring inner side and the ring outer side of the ring shaped body by ion assisted deposition. The protective layer has a first thickness of less than 300 ?m on the top flat region and a second thickness on the vertical wall of the ring inner side, where the second thickness is 45-70% of the first thickness.
    Type: Application
    Filed: December 4, 2017
    Publication date: April 5, 2018
    Inventors: Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor, Ying Zhang
  • Non-Line of Sight Deposition of Erbium Based Plasma Resistant Ceramic Coating
    Publication number: 20180094348
    Abstract: Described herein is a method of depositing a plasma resistant ceramic coating onto a surface of a chamber component using a non-line-of-sight (NLOS) deposition process, such as atomic layer deposition (ALD) and chemical vapor deposition (CVD). The plasma resistant ceramic coating consists of an erbium containing oxide, an erbium containing oxy-fluoride, or an erbium containing fluoride. Also described are chamber components having a plasma resistant ceramic coating of an erbium containing oxide, an erbium containing oxy-fluoride, or an erbium containing fluoride.
    Type: Application
    Filed: November 22, 2017
    Publication date: April 5, 2018
    Inventor: Jennifer Y. Sun