Patents by Inventor Jennifer Y. Sun

Jennifer Y. Sun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SHOWERHEAD HAVING A DETACHABLE GAS DISTRIBUTION PLATE
    Publication number: 20200238303
    Abstract: Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a substrate processing chamber includes a body having a first side and an opposing second side; a gas distribution plate disposed proximate the second side of the body; and a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the body, wherein the body is electrically coupled to the gas distribution plate through the clamp.
    Type: Application
    Filed: April 10, 2020
    Publication date: July 30, 2020
    Inventors: Dmitry LUBOMIRSKY, Vladimir KNYAZIK, Hamid NOORBAKHSH, Jason DELLA ROSA, Zheng John YE, Jennifer Y. SUN, Sumanth BANDA
  • PLASMA SPRAY COATING DESIGN USING PHASE AND STRESS CONTROL
    Publication number: 20200190653
    Abstract: An article includes a body having a plasma-sprayed ceramic coating on a surface thereof. The body can be formed of at one least one of the following materials: Al, Al2O3, AlN, Y2O3, YSZ, or SiC. The plasma-sprayed ceramic coating can include at least one of Y2O3, Y4Al2O9, Y3Al5O12 or a solid-solution of Y2O3 mixed with at least one of ZrO2, Al2O3, HfO2, Er2O3, Nd2O3, Nb2O5, CeO2, Sm2O3 or Yb2O3. The plasma-sprayed ceramic coating can further include splats.
    Type: Application
    Filed: February 19, 2020
    Publication date: June 18, 2020
    Inventors: Jennifer Y. Sun, Yikai Chen, Biraja Prasad Kanungo
  • ATOMIC LAYER DEPOSITION COATINGS FOR HIGH TEMPERATURE CERAMIC COMPONENTS
    Publication number: 20200181771
    Abstract: Certain embodiments of the present disclosure relate to coated articles and methods of coating articles. In one embodiment, a coated article comprises an article adapted for use in a processing chamber, and a coating formed on exterior and interior surfaces of the article. In one embodiment, the coating comprises a rare earth metal-containing ceramic, and the coating is substantially uniform, conformal, and porosity-free.
    Type: Application
    Filed: December 6, 2018
    Publication date: June 11, 2020
    Inventors: Xiaowei Wu, Jennifer Y. Sun, Michael R. Rice
  • CORROSION RESISTANT GROUND SHIELD OF PROCESSING CHAMBER
    Publication number: 20200185203
    Abstract: A substrate support assembly includes a ground shield and a heater that is surrounded by the ground shield. The ground shield includes a plate. In one embodiment, the ground shield is composed of a ceramic body and includes an electrically conductive layer, a first protective layer on the upper surface of the plate. In another embodiment, the ground shield is composed of an electrically conductive body and a first protective layer on the upper surface of the plate.
    Type: Application
    Filed: December 6, 2018
    Publication date: June 11, 2020
    Inventors: Dmitry Lubomirsky, Xiao Ming He, Jennifer Y. Sun, Xiaowei Wu, Laksheswar Kalita, Soonam Park
  • MULTI-LAYER PLASMA RESISTANT COATING BY ATOMIC LAYER DEPOSITION
    Publication number: 20200185200
    Abstract: Described herein are articles, systems and methods where a plasma resistant coating is deposited onto a surface of a chamber component using an atomic layer deposition (ALD) process. The plasma resistant coating has a stress relief layer and a layer comprising a solid solution of Y2O3—ZrO2 and uniformly covers features, such as those having an aspect ratio of about 3:1 to about 300:1.
    Type: Application
    Filed: January 6, 2020
    Publication date: June 11, 2020
    Inventors: Xiaowei Wu, David Fenwick, Jennifer Y. Sun, Guodong Zhan
  • Non-line of sight deposition of erbium based plasma resistant ceramic coating
    Patent number: 10676819
    Abstract: Described herein is a method of depositing a plasma resistant ceramic coating onto a surface of a chamber component using a non-line-of-sight (NLOS) deposition process, such as atomic layer deposition (ALD) and chemical vapor deposition (CVD). The plasma resistant ceramic coating consists of an erbium containing oxide, an erbium containing oxy-fluoride, or an erbium containing fluoride. Also described are chamber components having a plasma resistant ceramic coating of an erbium containing oxide, an erbium containing oxy-fluoride, or an erbium containing fluoride.
    Type: Grant
    Filed: November 22, 2017
    Date of Patent: June 9, 2020
    Assignee: Applied Materials, Inc.
    Inventor: Jennifer Y Sun
  • COPOLYMERIZED HIGH TEMPERATURE BONDING COMPONENT
    Publication number: 20200140620
    Abstract: A method for preparing a bonding component comprises mixing a first solution comprising an organofluorine monomer unit with a second solution comprising an organosilicon monomer unit to form, in-situ, a copolymer solution comprising a copolymer of an organofluorine polymer and an organosilicon polymer based on the organofluorine monomer unit and the organosilicon monomer unit. The method further comprises depositing the copolymer solution onto a body to form a film of the copolymer, and curing the film of the copolymer.
    Type: Application
    Filed: December 20, 2019
    Publication date: May 7, 2020
    Inventors: Jennifer Y. Sun, Sumanth Banda
  • METAL OXY-FLOURIDE FILMS BASED ON OXIDATION OF METAL FLOURIDES
    Publication number: 20200140996
    Abstract: An article comprises a body having a coating. The coating comprises a Y—O—F coating or other yttrium-based oxy-fluoride coating generated either by performing a fluorination process on a yttrium-based oxide coating or an oxidation process on a yttrium-based fluorine coating.
    Type: Application
    Filed: January 6, 2020
    Publication date: May 7, 2020
    Inventors: Xiaowei Wu, David Fenwick, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice
  • Showerhead having a detachable gas distribution plate
    Patent number: 10625277
    Abstract: Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a substrate processing chamber includes a body having a first side and an opposing second side; a gas distribution plate disposed proximate the second side of the body; and a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the body, wherein the body is electrically coupled to the gas distribution plate through the clamp.
    Type: Grant
    Filed: March 3, 2017
    Date of Patent: April 21, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Dmitry Lubomirsky, Vladimir Knyazik, Hamid Noorbakhsh, Jason Della Rosa, Zheng John Ye, Jennifer Y. Sun, Sumanth Banda
  • Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance
    Patent number: 10622194
    Abstract: A bulk, sintered solid solution-comprising ceramic article useful in semiconductor processing, which is resistant to erosion by halogen-containing plasmas and provides advantageous mechanical properties. The solid solution-comprising ceramic article is formed from a combination of yttrium oxide and zirconium oxide. The bulk, sintered solid solution-comprising article is formed from zirconium oxide at a molar concentration ranging from about 96 mole % to about 94 mole %, and yttrium oxide at a molar concentration ranging from about 4 mole % to about 6 mole %.
    Type: Grant
    Filed: October 20, 2015
    Date of Patent: April 14, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Li Xu, Kenneth S. Collins
  • Plasma resistant coating with tailorable coefficient of thermal expansion
    Patent number: 10612121
    Abstract: An article comprises a body and at least one final plasma resistant coating layer on at least one surface of the body. The at least one final plasma resistant coating layer is a mixture of a ScF3 and an initial plasma resistant coating material selected from the group consisting of YF3, Y2O3, a compound of Y4Al2O9, a solid-solution of Y2O3—ZrO2, CaF2, MgF2, SrF2, AlF3, ErF3, LaF3, NdF3, ScF3, CeF4, ZrF4, and combinations thereof. The at least one final plasma resistant coating layer has a thermal expansion coefficient that is within about 20% of the thermal expansion coefficient of the body.
    Type: Grant
    Filed: January 27, 2017
    Date of Patent: April 7, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Chengtsin Lee, Jennifer Y. Sun
  • Plasma spray coating design using phase and stress control
    Patent number: 10604831
    Abstract: A ceramic coating is coated on a body of an article, wherein the ceramic coating includes Y2O3, Y4Al2O9, Y3Al5O12, or a solid-solution of Y2O3 mixed with at least one of ZrO2, Al2O3, HfO2, Er2O3, Nd2O3, Nb2O5, CeO2, Sm2O3 or Yb2O3. The ceramic coating is applied to the body by a method including providing a plasma spraying system having a plasma current in the range of between about 100 A to about 1000 A, positioning a torch standoff of the plasma spraying system a distance from the body between about 60 mm and about 250 mm, flowing a first gas through the plasma spraying system at a rate of between about 30 L/min and about 400 L/min, and plasma spray coating the body to form a ceramic coating, wherein splats of the coating are amorphous and have a pancake shape.
    Type: Grant
    Filed: December 21, 2018
    Date of Patent: March 31, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Jennifer Y. Sun, Yikai Chen, Biraja Prasad Kanungo
  • PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS
    Publication number: 20200087776
    Abstract: An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of Y3Al5O12, Er2O3, Er3Al5O12, and a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.
    Type: Application
    Filed: November 15, 2019
    Publication date: March 19, 2020
    Inventors: Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor, Tom Cho
  • Rare-earth oxide based chamber material
    Patent number: 10584068
    Abstract: An article comprises a plasma resistant ceramic material comprising 80-90 mol % of Y2O3, over 0 mol % to 20 mol % of ZrO2, and 10-20 mol % of Al2O3.
    Type: Grant
    Filed: October 27, 2017
    Date of Patent: March 10, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Jennifer Y. Sun, Biraja P. Kanungo
  • Rare-earth oxide based chamber material
    Patent number: 10577286
    Abstract: An article comprises a plasma resistant ceramic material comprising 40-60 mol % of Y2O3, 35-50 mol % of ZrO2, and 10-20 mol % of Al2O3.
    Type: Grant
    Filed: October 27, 2017
    Date of Patent: March 3, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Jennifer Y. Sun, Biraja P. Kanungo
  • Multi-layer plasma resistant coating by atomic layer deposition
    Patent number: 10573497
    Abstract: Described herein are articles, systems and methods where a plasma resistant coating is deposited onto a surface of a chamber component using an atomic layer deposition (ALD) process. The plasma resistant coating has a stress relief layer and a layer comprising a solid solution of Y2O3—ZrO2 and uniformly covers features, such as those having an aspect ratio of about 3:1 to about 300:1.
    Type: Grant
    Filed: December 20, 2017
    Date of Patent: February 25, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Xiaowei Wu, David Fenwick, Jennifer Y. Sun, Guodong Zhan
  • Copolymerized high temperature bonding component
    Patent number: 10570257
    Abstract: A copolymerized high temperature bonding component that includes a first amount of an organofluorine polymer and a second amount of an organosilicon polymer which are chemically bound to each other to form a copolymer. The bonding component may have properties that allow it to be used for binding dissimilar materials.
    Type: Grant
    Filed: November 16, 2016
    Date of Patent: February 25, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Jennifer Y. Sun, Sumanth Banda
  • Ion assisted deposition top coat of rare-earth oxide
    Patent number: 10563297
    Abstract: A method of manufacturing an article comprises providing an article. An ion assisted deposition (IAD) process is performed to deposit a second protective layer over a first protective layer. The second protective layer is a plasma resistant rare earth oxide having a thickness of less than 50 microns and a porosity of less than 1%. The second protective layer seals a plurality of cracks and pores of the first protective layer.
    Type: Grant
    Filed: November 28, 2017
    Date of Patent: February 18, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor
  • Metal oxy-flouride films based on oxidation of metal flourides
    Patent number: 10563303
    Abstract: An article comprises a body having a coating. The coating comprises a Y-O-F coating or other yttrium-based oxy-fluoride coating generated either by performing a fluorination process on a yttrium-based oxide coating or an oxidation process on a yttrium-based fluorine coating.
    Type: Grant
    Filed: April 27, 2018
    Date of Patent: February 18, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Xiaowei Wu, David Fenwick, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice
  • PLASMA SPRAY COATING ENHANCEMENT USING PLASMA FLAME HEAT TREATMENT
    Publication number: 20200035463
    Abstract: A method for forming a plasma resistant ceramic coating on an article includes placing the article into a chamber or spray cell of a plasma spraying system. A ceramic powder is then fed into the plasma spraying system at a powder feed rate, and a plasma resistant ceramic coating is deposited onto at least one surface of the article in a plasma spray process by the plasma spray system. The plasma spray system is then used to perform an in-situ plasma flame heat treatment of the plasma resistant ceramic coating to form crust on the plasma resistant ceramic coating.
    Type: Application
    Filed: October 7, 2019
    Publication date: January 30, 2020
    Inventors: Jennifer Y. Sun, Yikai Chen, Biraja P. Kanungo