Abstract: A plasma processing apparatus includes a processing vessel, a lower electrode, an annular member, an inner upper electrode, an outer upper electrode, a processing gas supply, a first high frequency power supply and a first DC power supply. The lower electrode is configured to place a processing target substrate. The annular member is disposed on an outer peripheral portion of the lower electrode. The inner upper electrode is disposed to face the lower electrode. The outer upper electrode is disposed at an outside of the inner upper electrode. The first high frequency power supply applies a first high frequency power. The first DC power supply applies a first variable DC voltage to the outer upper electrode. At least a part of a surface of the outer upper electrode exposed to the processing space is located higher than a surface of the inner upper electrode exposed to the processing space.

Abstract: A fixing device includes a body and a cover. The body includes a roller and a positioning projection projecting from the body. The cover is supported on one end side in an axial direction of the roller and has a slot in which the positioning projection is inserted. The cover is configured to pivot on the positioning projection inserted in the slot, from a closed position to a retreated position from the body.

Abstract: A plasma processing apparatus includes a processing vessel, a lower electrode, an annular member, an inner upper electrode, an outer upper electrode, a processing gas supply, a first high frequency power supply and a first DC power supply. The lower electrode is configured to place a processing target substrate. The annular member is disposed on an outer peripheral portion of the lower electrode. The inner upper electrode is disposed to face the lower electrode. The outer upper electrode is disposed at an outside of the inner upper electrode. The first high frequency power supply applies a first high frequency power. The first DC power supply applies a first variable DC voltage to the outer upper electrode. At least a part of a surface of the outer upper electrode exposed to the processing space is located higher than a surface of the inner upper electrode exposed to the processing space.

Abstract: A placing table includes an edge ring disposed to surround a substrate; an electrostatic chuck having a first placing surface on which the substrate is placed and a second placing surface on which the edge ring is placed; and an elastic member placed at a position lower than the first placing surface within a gap between an inner circumferential surface of the edge ring and a side surface of the electrostatic chuck between the first placing surface and the second placing surface.

Abstract: A dechuck control method of dechucking a processed object electrostatically attracted to an electrostatic chuck is provided. The method includes a step of dechucking the processed object by lifting the processed object with a supporting mechanism. The dechucking step is performed while applying a given voltage to an electrode of the electrostatic chuck.

Abstract: A de-chuck control method is provided for de-chucking a workpiece from an electrostatic chuck that electrostatically attracts the workpiece. The de-chuck control method includes a discharge step of introducing an inert gas into a chamber after a plasma process and performing a discharge process; a high pressure step of introducing a gas having a lower ionization energy than helium gas after the discharge step, and maintaining a pressure within the chamber to a higher pressure than a pressure during the plasma process or a pressure during the discharge step; and a de-chuck step of de-chucking the workpiece from the electrostatic chuck with a support pin while the higher pressure is maintained by the high pressure step or after the higher pressure is maintained by the high pressure step.

Abstract: An electronic device whose power consumption can be reduced appropriately depending on the condition of use by a user is provided. The electronic device having a power saving mode includes a processor and a plurality of memories configured to be able to become a stopped state individually, and available to the processor. The processor causes a predetermined number of memories among the plurality of memories to become the stopped state, based on a processing load of the processor, to thereby make a shift to the power saving mode. In the power saving mode, the processor has a standby state of restricting the operation of a part of the electronic device and an active state of normally controlling the operation of the electronic device, and maintains the stopped state of the predetermined number of memories regardless of whether the processor is in the standby state or the active state.

Abstract: An electronic device whose power consumption can be reduced appropriately depending on the condition of use by a user is provided. The electronic device having a power saving mode includes a processor and a plurality of memories configured to be able to become a stopped state individually, and available to the processor. The processor causes a predetermined number of memories among the plurality of memories to become the stopped state, based on a processing load of the processor, to thereby make a shift to the power saving mode. In the power saving mode, the processor has a standby state of restricting the operation of a part of the electronic device and an active state of normally controlling the operation of the electronic device, and maintains the stopped state of the predetermined number of memories regardless of whether the processor is in the standby state or the active state.

Abstract: In order to alleviate constraints on the structural design of an optical module internally provided with a lens array, a lens holding structure of the present invention includes, with respect to a lens array including a plurality of lenses each having a convex surface, optical axes of the lenses being disposed in parallel to each other, the lenses being arranged in such a manner that an apex of the convex surface of each lens is included in a predetermined plane perpendicular to the optical axes of the lenses, one surface which is brought into close contact with the convex surfaces of the lenses; and another surface which fixes a side surface of the lens array.

Abstract: A plasma processing method of the present disclosure includes attaching a Si-containing material or a N-containing material to an electrostatic chuck that is provided in a processing container and attached with a reaction product containing C and F, in a state where a workpiece is not mounted on the electrostatic chuck; adsorbing the workpiece by the electrostatic chuck attached with the Si-containing material or the N-containing material when the workpiece is carried into the processing container; processing the workpiece with plasma; and separating the workpiece processed with plasma from the electrostatic chuck attached with the Si-containing material or the N-containing material.

Abstract: An electronic device whose power consumption can be reduced appropriately depending on the condition of use by a user is provided. The electronic device having a power saving mode includes a processor and a plurality of memories configured to be able to become a stopped state individually, and available to the processor. The processor causes a predetermined number of memories among the plurality of memories to become the stopped state, based on a processing load of the processor, to thereby make a shift to the power saving mode. In the power saving mode, the processor has a standby state of restricting the operation of a part of the electronic device and an active state of normally controlling the operation of the electronic device, and maintains the stopped state of the predetermined number of memories regardless of whether the processor is in the standby state or the active state.

Abstract: A head-up display device projects a display light on a windshield of a vehicle to form a virtual image thereon. The device includes a casing, an indicator which is attached to the casing to emit the display light into the casing, a light guide path through which the display light emitted from the indicator is guided, and a wiring board which is provided with a driving circuit for driving the indicator. The casing includes a guide rail formed along an irradiation direction of the display light from the indicator to support both lateral portions of the wiring board on the guide rail, and the wiring board is attached in a containing space of the casing formed between the light guide path and an inner surface of the casing by guiding and sliding the wiring board along the irradiation direction of the display light with the guide rail.

Abstract: An charging device includes: capacitors connected in series; a charging unit that charges the capacitors; bypass units, each respectively connects in parallel to each capacitors, wherein each bypass unit causes, when a charged voltage of any capacitor has reached a set voltage, a charging current to bypass the capacitor whose charged voltage has reached the set voltage; and a control unit that controls the charging unit to charge the capacitors in such a manner that, when a charging voltage of the any capacitor has reached the set voltage, the control unit causes the charging unit to reduce the charging current, and if a predetermined period has elapsed since the charging voltage has reached the set voltage, and if a charging voltage of any of the other capacitors has not reached the set voltage after the predetermined period, the control unit causes the charging unit to increase the charging current.

Abstract: An charging device includes: capacitors connected in series; a charging unit that charges the capacitors; bypass units, each respectively connects in parallel to each capacitors, wherein each bypass unit causes, when a charged voltage of any capacitor has reached a set voltage, a charging current to bypass the capacitor whose charged voltage has reached the set voltage; and a control unit that controls the charging unit to charge the capacitors in such a manner that, when a charging voltage of the any capacitor has reached the set voltage, the control unit causes the charging unit to reduce the charging current, and if a predetermined period has elapsed since the charging voltage has reached the set voltage, and if a charging voltage of any of the other capacitors has not reached the set voltage after the predetermined period, the control unit causes the charging unit to increase the charging current.

Abstract: A de-chuck control method is provided for de-chucking a workpiece from an electrostatic chuck that electrostatically attracts the workpiece. The de-chuck control method includes a discharge step of introducing an inert gas into a chamber after a plasma process and performing a discharge process; a high pressure step of introducing a gas having a lower ionization energy than helium gas after the discharge step, and maintaining a pressure within the chamber to a higher pressure than a pressure during the plasma process or a pressure during the discharge step; and a de-chuck step of de-chucking the workpiece from the electrostatic chuck with a support pin while the higher pressure is maintained by the high pressure step or after the higher pressure is maintained by the high pressure step.

Abstract: A plasma processing method of the present disclosure includes attaching a Si-containing material or a N-containing material to an electrostatic chuck that is provided in a processing container and attached with a reaction product containing C and F, in a state where a workpiece is not mounted on the electrostatic chuck; adsorbing the workpiece by the electrostatic chuck attached with the Si-containing material or the N-containing material when the workpiece is carried into the processing container; processing the workpiece with plasma; and separating the workpiece processed with plasma from the electrostatic chuck attached with the Si-containing material or the N-containing material.

Abstract: A headup display device includes a driving mirror configured to reflect a display light irradiated from an indicator to guide the reflected display light to a windshield of a vehicle. The driving mirror includes a base plate fixed to a bottom surface of a casing, a pair of opposite support plates which are upright on the base plate, a holder pivotally supported by the opposite support plates, a reflective mirror held by the holder, a driving motor configured to pivot the holder to change an angle of the reflective mirror, and a positioning projection provided on the support plate and protruding in a mounting direction of the base plate to the bottom surface of the casing. A holding recessed portion is formed on the casing to allow an insertion of the positioning projection therein and hold the positioning projection at a predetermined position.

Abstract: A head-up display device includes an indicator configured to emit a display light, a lower casing to which the indicator is mounted, an upper casing which is mounted to an upper portion of the lower casing, a pair of support portions which are provided on the lower casing and extend toward the upper casing, guide grooves which are formed on the support portions at opposite sides thereof, and a reflective mirror which is inserted and mounted to the lower casing toward a bottom surface of the lower casing while both lateral edges of the reflective mirror are engaged with the guide grooves, to reflect the display light emitted from the indicator and guide the reflected display light to a windshield of a vehicle.

Abstract: A head-up display device projects a display light on a windshield of a vehicle to form a virtual image thereon. The device includes a casing, an indicator which is attached to the casing to emit the display light into the casing, a light guide path through which the display light emitted from the indicator is guided, and a wiring board which is provided with a driving circuit for driving the indicator. The casing includes a guide rail formed along an irradiation direction of the display light from the indicator to support both lateral portions of the wiring board on the guide rail, and the wiring board is attached in a containing space of the casing formed between the light guide path and an inner surface of the casing by guiding and sliding the wiring board along the irradiation direction of the display light with the guide rail.

Abstract: A head-up display device includes an indicator configured to emit a display light, a lower casing to which the indicator is mounted, an upper casing which is mounted to an upper portion of the lower casing, a pair of support portions which are provided on the lower casing and extend toward the upper casing, guide grooves which are formed on the support portions at opposite sides thereof, and a reflective mirror which is inserted and mounted to the lower casing toward a bottom surface of the lower casing while both lateral edges of the reflective mirror are engaged with the guide grooves, to reflect the display light emitted from the indicator and guide the reflected display light to a windshield of a vehicle.