Abstract: An air conditioning system includes at least a magnetic disc disposed in parallel along a rotary shaft thereof, permanent magnets installed within rotational radii of the respective magnetic discs, and applying magnetic fields to the magnetic disc rotating within a predetermined section, a heat exchanger for heating installed on a side of the permanent magnets, and having at least a heat radiation fin, and a heat exchanger for cooling installed on a side opposite the permanent magnets, and having at least a heat absorption fin.

Abstract: A charge trap-type non-volatile memory device, and related method, includes forming over a substrate a tunnel insulating layer, a charge trapping layer, a dielectric layer, and a conductive layer for a gate electrode; forming a gate electrode by selectively etching the conductive layer for the gate electrode; forming a spacer including a first spacer and a second spacer on a sidewall of the gate electrode, the second spacer being formed of material different from that of the first spacer; and etching the dielectric layer and the charge trapping layer by using the spacer as an etching barrier, thereby preventing an attack to the gate electrode when etching the charge trapping layer and thus enhancing reliability and stability of transistors. In addition, in one or more embodiments, a sidewall of the charge trapping layer pattern is formed vertically, thereby preventing formation of a tail and an attack to the substrate.

Abstract: A fin mask for forming saddle type fins in each of active regions formed in an island shape having a certain size with a major axis and a minor axis includes a first fin mask of a line type, and a second fin mask of an island type, wherein the first fin mask and the second fin mask in combination expose saddle type fin regions and cover ends of the neighboring active regions along the major axis.

Abstract: A semiconductor device includes a plurality of trench patterns formed over a substrate; gate insulation layers formed over sidewalls of the trench patterns; gate electrodes formed over the trench patterns; line patterns coupling the gate electrodes; and source and drain regions formed in upper and lower portions of the substrate adjacent to the sidewalls of the trench patterns.

Abstract: A method for fabricating a fin transistor includes patterning a first pad layer provided over a substrate using an isolation mask, etching the substrate using the isolation mask and the first pad layer to form trenches, filling the trenches with an insulating material to form isolation structures, etching the isolation structures within the trenches using a gas having a high selectivity ratio of the insulating material to the first pad layer to form fin structures, forming a gate insulating layer over the fin structures, and forming a conductive layer over the gate insulating layer.

Abstract: A method for fabricating a semiconductor device with a dual gate structure is provided. The method includes: forming a gate oxide layer over a substrate; forming a gate conductive layer over the gate oxide layer; forming an amorphous carbon layer over the gate conductive layer; forming a photosensitive pattern over the amorphous carbon layer; etching the amorphous carbon layer using the photosensitive pattern as an etch mask to form a patterned amorphous carbon layer; performing an ion implantation process using the patterned amorphous carbon layer as an ion implantation barrier to implant an impurity onto the gate conductive layer; removing the patterned amorphous carbon layer; and patterning the gate conductive layer to form a gate structure.

Abstract: A semiconductor device comprises a substrate defining a recessed active region and a fin active region connected to the recessed active region and extending above the recessed active region. The fin active region includes first, second, third, fourth, and fifth sides. The first and second sides are proximate the recessed active region. The fifth side is an upper side of the fin active region. The third side is provided between the first side and the fifth side. The fourth side is provided between the second side and the fifth side. A gate insulation layer is formed over the first, second, third, fourth, and fifth sides of the fin active region. A gate electrode layer is formed over the gate insulation layer to substantially surround the first, second, third, fourth, and fifth sides of the fin active region. The first, third, and fifth sides have substantially different slopes. The third and fourth sides are curved surfaces.

Abstract: Disclosed is a method for fabricating a semiconductor device by using an amorphous carbon layer as a sacrificial hard mask. The method includes the steps of: forming an amorphous carbon layer on an etch target layer; forming a photoresist pattern on the amorphous carbon layer; etching the amorphous carbon layer by using the photoresist pattern to form a sacrificial hard mask; and etching the etch target layer by using the sacrificial hard mask to form a predetermined pattern.

Abstract: The present invention relates to a method for fabricating a semiconductor device using tungsten as a sacrificial hard mask material. The method includes the steps of: forming a layer on an etch target layer; forming a photoresist pattern on the layer; etching the layer by using the photoresist pattern as an etch mask along with use of a plasma containing CHF3 gas to form a sacrificial hard mask; and etching the etch target layer by using at least the sacrificial hard mask as an etch mask, thereby obtaining a predetermined pattern.

Abstract: The present invention provides a semiconductor device having a silicide thin film and method of forming the same. A semiconductor device comprises a gate insulation layer formed on an active region of a semiconductor substrate. A gate electrode is formed on the gate insulation layer. An impurity region is formed in the active region adjacent the gate electrode. A silicide thin film such as a cobalt silicide thin film is formed to a thickness of less than approximately 200 ? in the impurity region.

Abstract: A method for fabricating a fin transistor includes patterning a first pad layer provided over a substrate using an isolation mask, etching the substrate using the isolation mask and the first pad layer to form trenches, filling the trenches with an insulating material to form isolation structures, etching the isolation structures within the trenches using a gas having a high selectivity ratio of the insulating material to the first pad layer to form fin structures, forming a gate insulating layer over the fin structures, and forming a conductive layer over the gate insulating layer.

Abstract: A fin mask for forming saddle type fins in each of active regions formed in an island shape having a certain size with a major axis and a minor axis includes a first fin mask of a line type, and a second fin mask of an island type, wherein the first fin mask and the second fin mask in combination expose saddle type fin regions and cover ends of the neighboring active regions along the major axis.

Abstract: The present invention provides a semiconductor device having a silicide thin film and method of forming the same. A semiconductor device comprises a gate insulation layer formed on an active region of a semiconductor substrate. A gate electrode is formed on the gate insulation layer. An impurity region is formed in the active region adjacent the gate electrode. A silicide thin film such as a cobalt silicide thin film is formed to a thickness of less than approximately 200 ? in the impurity region.

Abstract: The present invention provides a semiconductor device having a silicide thin film and method of forming the same. A semiconductor device comprises a gate insulation layer formed on an active region of a semiconductor substrate. A gate electrode is formed on the gate insulation layer. An impurity region is formed in the active region adjacent the gate electrode. A silicide thin film such as a cobalt silicide thin film is formed to a thickness of less than approximately 200 ? in the impurity region.

Abstract: A semiconductor device includes an active region, a bulb recess with a certain depth formed in a channel-forming region of the active region, a device isolation structure encompassing the active region, wherein the device isolation structure has a line-shaped opening such that a surface of the device isolation structure is lower than the bottom of the bulb recess and a portion of the active region is protruded more than the device isolation structure in the shape of a saddle fin, a gate insulating layer formed over the device isolation structure exposed by the opening and the active region including the bulb recess, and a gate electrode formed over the gate insulating layer, the gate electrode filled in the bulb recess and covering the device isolation structure exposed by the opening.

Abstract: An aspect of the present invention features a printed circuit board. The board can comprise a core layer in which an inner via hole (IVH) is formed, a first plating layer that closes one entrance of the inner via hole, leaving a remaining space in the inner via hole unfilled; and a second plating layer that closes the other entrance of the inner via hole, filling the remaining space. Also, the present invention provides a printed circuit board and a manufacturing method thereof that do not require filling an inner via hole with an insulating ink, and forming a conductive layer on the insulating ink. Therefore, the present invention can increase productive capacity and reduce manufacturing cost by simplifying the manufacturing process and reducing the lead time.

Abstract: A gate electrode of a semiconductor device according to the present invention includes a substrate, a bulb type recess with an upper recess and a bottom recess, the bottom recess formed in a round shape and having a larger width than the upper recess, a gate insulation layer formed over the substrate and in the bulb type recess, and a polysilicon electrode in the bulb type recess, wherein the polysilicon electrode is formed using two different methods including a growth method

Abstract: A method for fabricating a saddle type fin transistor includes: preparing a substrate where a device isolation structure is already formed; forming a hard mask pattern over the substrate, the hard mask pattern including a coating layer obtained through a coating method; and performing an etching process using the hard mask pattern as an etch mask to form a saddle type fin. The hard mask pattern may be formed in a stack structure including an amorphous carbon layer and the coating layer.

Abstract: A method for fabricating a semiconductor device with a dual gate structure is provided. The method includes: forming a gate oxide layer over a substrate; forming a gate conductive layer over the gate oxide layer; forming an amorphous carbon layer over the gate conductive layer; forming a photosensitive pattern over the amorphous carbon layer; etching the amorphous carbon layer using the photosensitive pattern as an etch mask to form a patterned amorphous carbon layer; performing an ion implantation process using the patterned amorphous carbon layer as an ion implantation barrier to implant an impurity onto the gate conductive layer; removing the patterned amorphous carbon layer; and patterning the gate conductive layer to form a gate structure.

Abstract: A semiconductor device comprises a substrate defining a recessed active region; a fin active region connected to the recessed active region and extending above the recessed active region. The fin active region includes first, second, third, fourth, and fifth sides, the first and second sides being proximate the recessed active region, the fifth side being an upper side of the fin active region, the third side being provided between the first side and the fifth side, the fourth side being provided between the second side and the fifth side. A gate insulation layer is formed over the first, second, third, fourth, and fifth sides of the fin active region. A gate electrode layer is formed over the gate insulation layer to substantially surround the first, second, third, fourth, and fifth sides of the fin active region.