Patents by Inventor Marc A. Bergendahl

Marc A. Bergendahl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200081746
    Abstract: An example operation may include one or more of connecting, by a load leveler, to a blockchain network comprising a plurality of nodes and configured to store a common work item, computing, by the load leveler, loads across the plurality of the nodes that need to execute the common work item upon completion of current tasks, determining, by the load leveler, a network load impact based on execution of a common blockchain consensus checking process on the network nodes, executing, by the load leveler, a work assessment process based on the loads computed across the plurality of the nodes and on the determined network load impact of the blockchain network, and assigning, by the load leveler, new tasks to the nodes based on results of the execution of the work assessment process.
    Type: Application
    Filed: September 7, 2018
    Publication date: March 12, 2020
    Inventors: Jonathan Fry, Christopher J. Penny, Marc Bergendahl, Christopher J. Waskiewicz, Jean Wynne, James Demarest
  • Patent number: 10580773
    Abstract: A method of forming a power rail to semiconductor devices comprising removing a portion of the gate structure forming a gate cut trench separating a first active region of fin structures from a second active region of fin structures. A conformal etch stop layer is formed in the gate cut trench. A fill material is formed on the conformal etch stop layer filling at least a portion of the gate cut trench. The fill material has a composition that is etched selectively to the conformal etch stop layer. A power rail is formed in the gate cut trench. The conformal etch stop layer obstructs lateral etching during forming the power rail to substantially eliminate power rail to gate structure shorting.
    Type: Grant
    Filed: August 3, 2018
    Date of Patent: March 3, 2020
    Assignee: Tessera, Inc.
    Inventors: Marc A. Bergendahl, Andrew M. Greene, Rajasekhar Venigalla
  • Patent number: 10573745
    Abstract: Embodiments are directed to methods and resulting structures for a vertical field effect transistor (VFET) having a super long channel. A pair of semiconductor fins is formed on a substrate. A semiconductor pillar is formed between the semiconductor fins on the substrate. A region that extends under all of the semiconductor fins and under part of the semiconductor pillar is doped. A conductive gate is formed over a channel region of the semiconductor fins and the semiconductor pillar. A surface of the semiconductor pillar serves as an extended channel region when the gate is active.
    Type: Grant
    Filed: May 23, 2017
    Date of Patent: February 25, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Marc A. Bergendahl, Kangguo Cheng, Gauri Karve, Fee Li Lie, Eric R. Miller, John R. Sporre, Sean Teehan
  • Patent number: 10566414
    Abstract: A backend-of-the-line (BEOL) semiconductor capacitor made by method, apparatus, or computer program product, through an airgap metallization process, patterning a first electrode by removing a portion of inter-layer dielectric for a desired capacitor area, depositing a dielectric for a capacitor insulator, filling the desired capacitor area to form a second electrode, polishing and capping the second electrode, and interconnecting the first electrode and the second electrode.
    Type: Grant
    Filed: September 1, 2016
    Date of Patent: February 18, 2020
    Assignee: International Business Machines Corporation
    Inventors: Marc A. Bergendahl, James J. Demarest, Christopher J. Penny, Christopher Waskiewicz
  • Patent number: 10553581
    Abstract: A method of forming a semiconductor device that includes forming a trench adjacent to a gate structure to expose a contact surface of one of a source region and a drain region. A sacrificial spacer may be formed on a sidewall of the trench and on a sidewall of the gate structure. A metal contact may then be formed in the trench to at least one of the source region and the drain region. The metal contact has a base width that is less than an upper surface width of the metal contact. The sacrificial spacer may be removed, and a substantially conformal dielectric material layer can be formed on sidewalls of the metal contact and the gate structure. Portions of the conformally dielectric material layer contact one another at a pinch off region to form an air gap between the metal contact and the gate structure.
    Type: Grant
    Filed: December 7, 2016
    Date of Patent: February 4, 2020
    Assignee: International Business Machines Corporation
    Inventors: Marc A. Bergendahl, Kangguo Cheng, Fee Li Lie, Eric R. Miller, John R. Sporre, Sean Teehan
  • Patent number: 10553716
    Abstract: In an embodiment, this invention relates to a vertical field-effect transistor component including a bottom source-drain layer and a method of creating the same. The method of forming a bottom source-drain layer of a vertical field-effect transistor component can comprise forming an anchor structure on a substrate. A sacrificial layer can be deposited on a middle region of the substrate and a channel layer can be deposited on the sacrificial layer. A plurality of vertical fins can be formed on the substrate and the sacrificial layer can be removed such that the plurality of vertical fins in the middle region form a plurality of floating fins having a gap located between the plurality of floating fins and the substrate. The bottom source-drain layer can then be formed such that the bottom source-drain layer fills in the gap.
    Type: Grant
    Filed: February 28, 2019
    Date of Patent: February 4, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Marc A. Bergendahl, Kangguo Cheng, Fee Li Lie, Shogo Mochizuki, Junli Wang
  • Patent number: 10546813
    Abstract: A method of forming an electrical device that includes forming a first level including an array of metal lines, wherein an air gap is positioned between the adjacent metal lines. A second level is formed including at least one dielectric layer atop the first level. A plurality of trench structures is formed in the at least on dielectric layer. At least one of the plurality of trench structures opens the air gap. A conductive material is formed within the trenches. The conductive material deposited in the open air gap provides a vertical fuse.
    Type: Grant
    Filed: April 18, 2018
    Date of Patent: January 28, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Marc A. Bergendahl, James J. Demarest, Christopher J. Penny, Christopher J. Waskiewicz
  • Publication number: 20200026924
    Abstract: A computer-implemented method executed by a processor for reducing exposure of a plurality of objects to environmental conditions by employing a smart room tracking system is presented. The computer-implemented method includes counting a number of individuals within a space including the plurality of objects via one or more image capture devices and determining whether each individual makes direct eye contact with any of the plurality of objects by evaluating orientation, posture, and eye movement of each individual. The computer-implemented method further includes shielding, via an object viewing controller, an object of the plurality of objects from view when no direct eye contact is determined and making an object of the plurality of objects viewable, via the object viewing controller, when direct eye contact is determined.
    Type: Application
    Filed: September 17, 2019
    Publication date: January 23, 2020
    Inventors: Marc A. Bergendahl, Christopher J. Penny, James J. Demarest, Christopher Waskiewicz, Jean Wynne, Jonathan Fry
  • Patent number: 10528817
    Abstract: A computer-implemented method executed by a processor for reducing exposure of a plurality of objects to environmental conditions by employing a smart room tracking system is presented. The computer-implemented method includes counting a number of individuals within a space including the plurality of objects via one or more image capture devices and determining whether each individual makes direct eye contact with any of the plurality of objects by evaluating orientation, posture, and eye movement of each individual. The computer-implemented method further includes shielding, via an object viewing controller, an object of the plurality of objects from view when no direct eye contact is determined and making an object of the plurality of objects viewable, via the object viewing controller, when direct eye contact is determined.
    Type: Grant
    Filed: December 12, 2017
    Date of Patent: January 7, 2020
    Assignee: International Business Machines Corporation
    Inventors: Marc A. Bergendahl, Christopher J. Penny, James J. Demarest, Christopher Waskiewicz, Jean Wynne, Jonathan Fry
  • Publication number: 20200006137
    Abstract: According to embodiments of the present invention, a method of forming a self-aligned contact includes depositing an etch-stop liner on a surface of a gate cap and a contact region. A dielectric oxide layer is deposited onto the etch-stop layer. The dielectric oxide layer and the etch-stop liner are removed in a region above the contact region to form a removed region. A contact is deposited in the etched region.
    Type: Application
    Filed: June 27, 2018
    Publication date: January 2, 2020
    Inventors: Michael P. Belyansky, Marc Bergendahl, Victor W. C. Chan, JEFFREY C. SHEARER
  • Publication number: 20190371822
    Abstract: Sub-fin removal techniques for SOI like isolation in finFET devices are provided. In one aspect, a method for forming a finFET device includes: etching partial fins in a substrate, wherein the partial fins include top portions of fins of the finFET device; forming a bi-layer spacer on the top portions of the fins; complete etching of the fins in the substrate to form bottom portions of the fins of the finFET device; depositing an insulator between the fins; recessing the insulator enough to expose a region of the fins not covered by the bi-layer spacer; removing the exposed region of the fins to create a gap between the top and bottom portions of the fins; filling the gap with additional insulator. A method for forming a finFET device is also provided where placement of the fin spacer occurs after (rather than before) insulator deposition. A finFET device is also provided.
    Type: Application
    Filed: August 15, 2019
    Publication date: December 5, 2019
    Inventors: Marc A. Bergendahl, Kangguo Cheng, Gauri Karve, Fee Li Lie, Eric R. Miller, John R. Sporre, Sean Teehan
  • Publication number: 20190363873
    Abstract: A blockchain may be used as a stochastic timer. The posting of a blockchain solution for verification may be a trigger that determines an event schedule. Because the only entity that knows when the solution will be posted is the solving entity, the solving entity may be rewarded with the ability to potentially exploit this knowledge. However, because the solving of a blockchain is a competitive process, there is a risk that if the solving entity retains the solution for greater exploitation, then another entity will post the solution and therefore gain the benefit. A blockchain stochastic timer can thus provide the necessary incentive for entities to invest computational resources into blockchain solutions.
    Type: Application
    Filed: May 23, 2018
    Publication date: November 28, 2019
    Inventors: Jonathan Fry, Christopher J. Penny, James Demarest, Marc Bergendahl, Jean Wynne, Christopher J. Waskiewicz
  • Patent number: 10475878
    Abstract: A backend-of-the-line (BEOL) semiconductor capacitor made by method, apparatus, or computer program product, through an airgap metallization process, patterning a first electrode by removing a portion of inter-layer dielectric for a desired capacitor area, depositing a dielectric for a capacitor insulator, filling the desired capacitor area to form a second electrode, polishing and capping the second electrode, and interconnecting the first electrode and the second electrode.
    Type: Grant
    Filed: December 28, 2017
    Date of Patent: November 12, 2019
    Assignee: International Business Machines Corporation
    Inventors: Marc A. Bergendahl, James J. Demarest, Christopher J. Penny, Christopher Waskiewicz
  • Publication number: 20190341490
    Abstract: Embodiments are directed to methods and resulting structures for a vertical field effect transistor (VFET) having a super long channel. A pair of semiconductor fins is formed on a substrate. A semiconductor pillar is formed between the semiconductor fins on the substrate. A region that extends under all of the semiconductor fins and under part of the semiconductor pillar is doped. A conductive gate is formed over a channel region of the semiconductor fins and the semiconductor pillar. A surface of the semiconductor pillar serves as an extended channel region when the gate is active.
    Type: Application
    Filed: July 19, 2019
    Publication date: November 7, 2019
    Inventors: Marc A. Bergendahl, Kangguo Cheng, Gauri Karve, Fee Li Lie, Eric R. Miller, John R. Sporre, Sean Teehan
  • Patent number: 10453793
    Abstract: A method of forming an electrical device that includes forming a first level including an array of metal lines, wherein an air gap is positioned between the adjacent metal lines. A second level is formed including at least one dielectric layer atop the first level. A plurality of trench structures is formed in the at least on dielectric layer. At least one of the plurality of trench structures opens the air gap. A conductive material is formed within the trenches. The conductive material deposited in the open air gap provides a vertical fuse.
    Type: Grant
    Filed: August 2, 2018
    Date of Patent: October 22, 2019
    Assignee: International Business Machines Corporation
    Inventors: Marc A. Bergendahl, James J. Demarest, Christopher J. Penny, Christopher J. Waskiewicz
  • Patent number: 10438972
    Abstract: Sub-fin removal techniques for SOI like isolation in finFET devices are provided. In one aspect, a method for forming a finFET device includes: etching partial fins in a substrate, wherein the partial fins include top portions of fins of the finFET device; forming a bi-layer spacer on the top portions of the fins; complete etching of the fins in the substrate to form bottom portions of the fins of the finFET device; depositing an insulator between the fins; recessing the insulator enough to expose a region of the fins not covered by the bi-layer spacer; removing the exposed region of the fins to create a gap between the top and bottom portions of the fins; filling the gap with additional insulator. A method for forming a finFET device is also provided where placement of the fin spacer occurs after (rather than before) insulator deposition. A finFET device is also provided.
    Type: Grant
    Filed: September 12, 2016
    Date of Patent: October 8, 2019
    Assignee: International Business Machines Corporation
    Inventors: Marc A. Bergendahl, Kangguo Cheng, Gauri Karve, Fee Li Lie, Eric R. Miller, John R. Sporre, Sean Teehan
  • Patent number: 10424663
    Abstract: Embodiments are directed to methods and resulting structures for a vertical field effect transistor (VFET) having a super long channel. A pair of semiconductor fins is formed on a substrate. A semiconductor pillar is formed between the semiconductor fins on the substrate. A region that extends under all of the semiconductor fins and under part of the semiconductor pillar is doped. A conductive gate is formed over a channel region of the semiconductor fins and the semiconductor pillar. A surface of the semiconductor pillar serves as an extended channel region when the gate is active.
    Type: Grant
    Filed: November 15, 2017
    Date of Patent: September 24, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Marc A. Bergendahl, Kangguo Cheng, Gauri Karve, Fee Li Lie, Eric R. Miller, John R. Sporre, Sean Teehan
  • Patent number: 10396181
    Abstract: A semiconductor device comprises a nanowire arranged over a substrate, a gate stack arranged around the nanowire, a spacer arranged along a sidewall of the gate stack, a cavity defined by a distal end of the nanowire and the spacer, and a source/drain region partially disposed in the cavity and in contact with the distal end of the nanowire.
    Type: Grant
    Filed: July 27, 2018
    Date of Patent: August 27, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Marc A. Bergendahl, Kangguo Cheng, Fee Li Lie, Eric R. Miller, Jeffrey C. Shearer, John R. Sporre, Sean Teehan
  • Patent number: 10388525
    Abstract: Multi-angled deposition and masking techniques are provided to enable custom trimming and selective removal of spacers that are used for patterning features at sub-lithographic dimensions. For example, a method includes forming a sacrificial mandrel on a substrate, and forming first and second spacers on opposing sidewalls of the sacrificial mandrel. The first and second spacers are formed with an initial thickness Ts. A first angle deposition process is performed to deposit a material (e.g., insulating material or metallic material) at a first deposition angle A1 to form a first trim mask layer on an upper portion of the first spacer and the sacrificial mandrel while preventing the material from being deposited on the second spacer. A spacer etch process is performed to trim the first spacer to a first thickness T1, which is less than Ts, using the first trim mask layer as an etch mask.
    Type: Grant
    Filed: November 13, 2017
    Date of Patent: August 20, 2019
    Assignee: International Business Machines Corporation
    Inventors: Marc A. Bergendahl, Sean D. Burns, Lawrence A. Clevenger, Christopher J. Penny, Michael Rizzolo
  • Patent number: 10361079
    Abstract: Multi-angled deposition and masking techniques are provided to enable custom trimming and selective removal of spacers that are used for patterning features at sub-lithographic dimensions. For example, a method includes forming a sacrificial mandrel on a substrate, and forming first and second spacers on opposing sidewalls of the sacrificial mandrel. The first and second spacers are formed with an initial thickness TS. A first angle deposition process is performed to deposit a material (e.g., insulating material or metallic material) at a first deposition angle A1 to form a first trim mask layer on an upper portion of the first spacer and the sacrificial mandrel while preventing the material from being deposited on the second spacer. A spacer etch process is performed to trim the first spacer to a first thickness T1, which is less than TS, using the first trim mask layer as an etch mask.
    Type: Grant
    Filed: November 13, 2017
    Date of Patent: July 23, 2019
    Assignee: International Business Machines Corporation
    Inventors: Marc A. Bergendahl, Sean D. Burns, Lawrence A. Clevenger, Christopher J. Penny, Michael Rizzolo