Patents by Inventor Min-Hwa Chi

Min-Hwa Chi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9012986
    Abstract: A device includes a plurality of trenches and fins defined in a substantially un-doped layer of semiconducting material, a gate insulation layer positioned on the fins and on the bottom of the trenches, a gate electrode and a device isolation structure. One method disclosed herein involves identifying a top width of each of a plurality of fins and a depth of a plurality of trenches to be formed in a substantially un-doped layer of semiconducting material, wherein, during operation, the device is adapted to operate in at least three distinguishable conditions depending upon a voltage applied to the device, performing at least one process operation to define the trenches and fins in the layer of semiconducting material, forming a gate insulation layer on the fins and on a bottom of the trenches and forming a gate electrode above the gate insulation layer.
    Type: Grant
    Filed: May 21, 2014
    Date of Patent: April 21, 2015
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Min-hwa Chi, Werner Juengling
  • Patent number: 9006066
    Abstract: A semiconductor structure in fabrication includes a n-FinFET and p-FinFET. Stress inducing materials such as silicon and silicon germanium are epitaxially grown into naturally diamond-shaped structures atop the silicon fins of the n-FinFET and p-FinFET areas. The diamond structures act as the source, drain and channel between the source and drain. The diamond structures of the channel are selectively separated from the fin while retaining the fin connections of the diamond-shaped growth of the source and the drain. Further fabrication to complete the structure may then proceed.
    Type: Grant
    Filed: April 26, 2013
    Date of Patent: April 14, 2015
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Min-Hwa Chi, Hoong Shing Wong
  • Patent number: 9007803
    Abstract: Methods and apparatus are provided for an integrated circuit with a programmable electrical connection. The apparatus includes an inactive area with a memory line passing over the inactive area. The memory line includes a programmable layer. An interlayer dielectric is positioned over the memory line and the inactive area, and an extending member extends through the interlayer dielectric. The extending member is electrically connected to the programmable layer of the memory line at a point above the inactive area.
    Type: Grant
    Filed: July 9, 2013
    Date of Patent: April 14, 2015
    Assignee: GLOBALFOUNDRIES, Inc.
    Inventors: Yanxiang Liu, Min-hwa Chi
  • Publication number: 20150099336
    Abstract: Methods of manufacturing semiconductor integrated circuits having FinFET structures with epitaxially formed source and drain regions are disclosed. A method of fabricating an integrated circuit includes forming a plurality of silicon fin structures on a semiconductor substrate, epitaxially growing a silicon material on the fin structures, wherein a merged source/drain region is formed on the fin structures, and anisotropically etching at least one of the merged source drain regions to form an un-merged source/drain region.
    Type: Application
    Filed: December 15, 2014
    Publication date: April 9, 2015
    Inventors: Hoong Shing Wong, Min-hwa Chi
  • Patent number: 8975091
    Abstract: The present disclosure relates to a magnetic tunnel junction (MTJ) device and its fabricating method. Through forming MTJ through a damascene process, device damage due to the etching process and may be avoided. In some embodiments, a spacer is formed between a first portion and a second portion of the MTJ to prevent the tunnel insulating layer of the MTJ from being damaged in subsequent processes, greatly increasing product yield thereby. In other embodiments, signal quality may be improved and magnetic flux leakage may be reduced through the improved cup-shaped MTJ structure of this invention.
    Type: Grant
    Filed: September 9, 2014
    Date of Patent: March 10, 2015
    Assignee: Semiconductor Manufacturing International (Beijing) Corporation
    Inventors: Min-Hwa Chi, Mieno Fumitake
  • Publication number: 20150062996
    Abstract: An OTP anti-fuse memory array without additional selectors and a manufacturing method are provided. Embodiments include forming wells of a first polarity in a substrate, forming a bitline of the first polarity in each well, and forming plural metal gates across each bitline, wherein no source/drain regions are formed between the metal gates.
    Type: Application
    Filed: September 4, 2013
    Publication date: March 5, 2015
    Applicant: GLOBALFOUNDRIES Inc.
    Inventors: Yanxiang LIU, Min-hwa CHI, Anurag MITTAL
  • Publication number: 20150035018
    Abstract: Devices and methods for forming semiconductor devices with FinFETs are provided. One intermediate semiconductor device includes, for instance: a substrate with at least one fin with at least one channel; at least one gate over the channel; at least one hard-mask over the gate; and at least one spacer disposed over the gate and hard-mask. One method includes, for instance: obtaining an intermediate semiconductor device; forming at least one recess into the substrate, the recess including a bottom and at least one sidewall exposing a portion of the at least one fin; depositing a dielectric layer into the at least one recess; removing at least a portion of the dielectric layer to form a barrier dielectric layer; and performing selective epitaxial growth in the at least one recess over the barrier dielectric layer.
    Type: Application
    Filed: July 31, 2013
    Publication date: February 5, 2015
    Applicant: GLOBALFOUNDRIES Inc.
    Inventors: Jin Ping LIU, Min-hwa CHI
  • Patent number: 8946029
    Abstract: Methods of manufacturing semiconductor integrated circuits having FinFET structures with epitaxially formed source and drain regions are disclosed. For example, a method of fabricating an integrated circuit includes forming a plurality of silicon fin structures on a semiconductor substrate, forming disposable spacers on vertical sidewalls of the fin structures, and depositing a silicon oxide material over the fins and over the disposable spacers. The method further includes anisotropically etching at least one of the fin structures and the disposable spacers on the sidewalls of the at least one fin structure, thereby leaving a void in the silicon oxide material, and etching the silicon oxide material and the disposable spacers from at least one other of the fin structures, while leaving the at least one other fin structure un-etched. Still further, the method includes epitaxially growing a silicon material in the void and on the un-etched fin structure.
    Type: Grant
    Filed: November 12, 2012
    Date of Patent: February 3, 2015
    Assignee: GLOBALFOUNDRIES, Inc.
    Inventors: Hoong Shing Wong, Min-hwa Chi
  • Publication number: 20150024557
    Abstract: There is set forth herein a semiconductor device fabricated on a bulk wafer having a local buried oxide region underneath a channel region of a MOSFET. In one embodiment the local buried oxide region can be self-aligned to a gate, and a source/drain region can be formed in a bulk substrate. A local buried oxide region can be formed in a semiconductor device by implantation of oxygen into a bulk region of the semiconductor device followed by annealing.
    Type: Application
    Filed: July 17, 2013
    Publication date: January 22, 2015
    Inventors: Yanxiang LIU, Min-hwa CHI
  • Publication number: 20150016174
    Abstract: Methods and apparatus are provided for an integrated circuit with a programmable electrical connection. The apparatus includes an inactive area with a memory line passing over the inactive area. The memory line includes a programmable layer. An interlayer dielectric is positioned over the memory line and the inactive area, and an extending member extends through the interlayer dielectric. The extending member is electrically connected to the programmable layer of the memory line at a point above the inactive area.
    Type: Application
    Filed: July 9, 2013
    Publication date: January 15, 2015
    Inventors: Yanxiang Liu, Min-hwa Chi
  • Publication number: 20150011086
    Abstract: A semiconductor device is prepared by an annealing process to interconnect at least two components of the device by a conductor line surrounded by an insulator material. The annealing process results in formation of residual stresses within the conductor line and the insulator material. One or multiple notches are designed in the layout on a selective portion of the mask for patterning conductor line. The existence of the notch or notches on the selective portion generates extra stress components within the conductor line than would exist without the existence of the notch. The position of the notch is selected so that the extra stress components substantially counteract the residual stresses, thereby causing a net reduction in the residual stresses. The reduction in the residual stresses results in a corresponding mechanical stress migration and therefore improvement in the reliability of the device.
    Type: Application
    Filed: September 15, 2014
    Publication date: January 8, 2015
    Inventors: Min-Hwa CHI, Tai-Chun HUANG, Chih-Hsiang YAO
  • Publication number: 20150001594
    Abstract: Methods for forming stacking faults in sources, or sources and drains, of TFETs to improve tunneling efficiency and the resulting devices are disclosed. Embodiments may include designating areas within a substrate that will subsequently correspond to a source region and a drain region, selectively forming a stacking fault within the substrate corresponding to the source region, and forming a tunneling field-effect transistor incorporating the source region and the drain region.
    Type: Application
    Filed: June 28, 2013
    Publication date: January 1, 2015
    Inventors: Yanxiang LIU, Min-hwa CHI
  • Publication number: 20140377884
    Abstract: The present disclosure relates to a magnetic tunnel junction (MTJ) device and its fabricating method. Through forming MTJ through a damascene process, device damage due to the etching process and may be avoided. In some embodiments, a spacer is formed between a first portion and a second portion of the MTJ to prevent the tunnel insulating layer of the MTJ from being damaged in subsequent processes, greatly increasing product yield thereby. In other embodiments, signal quality may be improved and magnetic flux leakage may be reduced through the improved cup-shaped MTJ structure of this invention.
    Type: Application
    Filed: September 9, 2014
    Publication date: December 25, 2014
    Inventors: Min-Hwa CHI, Mieno FUMITAKE
  • Patent number: 8906768
    Abstract: For the formation of a stressor on one or more of a source and drain defined on a fin of FINFET semiconductor structure, a method can be employed including performing selective epitaxial growth (SEG) on one or more of the source and drain defined on the fin, separating the fin from a bulk silicon substrate at one or more of the source and drain, and further performing SEG on one or more of the source and drain to form a wrap around epitaxial growth stressor that stresses a channel connecting the source and drain. The formed stressor can be formed so that the epitaxial growth material defining a wrap around configuration connects to the bulk substrate. The formed stressor can increase mobility in a channel connecting the defined source and drain.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: December 9, 2014
    Assignee: GLOBALFOUNDRIES, Inc.
    Inventors: Hoong Shing Wong, Min-hwa Chi
  • Publication number: 20140354347
    Abstract: The present invention provides a bipolar transistor, a method for forming the bipolar transistor, a method for turning on the bipolar transistor, and a band-gap reference circuit, virtual ground reference circuit and double band-gap reference circuit with the bipolar transistor. The bipolar transistor includes: a Silicon-On-Insulator wafer; a base area, an emitter area and a collector area; a base area gate dielectric layer on a top silicon layer and atop the base area; a base area control-gate on the base area gate dielectric layer; an emitter electrode connected to the emitter area via a first contact; a collector electrode connected to the collector area via a second contact; and a base area control-gate electrode connected to the base area control-gate via a third contact.
    Type: Application
    Filed: August 19, 2014
    Publication date: December 4, 2014
    Inventors: MIN-HWA CHI, LIHYING CHING, DEYUAN XIAO
  • Publication number: 20140319624
    Abstract: A method of forming a FinFET device involves performing an epitaxial growth process to form a layer of semiconducting material on a semiconducting substrate, wherein a first portion of the layer of semiconducting material will become a fin structure for the FinFET device and wherein a plurality of second portions of the layer of semiconducting material will become source/drain structures of the FinFET device, forming a gate insulation layer around at least a portion of the fin structure and forming a gate electrode above the gate insulation layer.
    Type: Application
    Filed: July 10, 2014
    Publication date: October 30, 2014
    Inventors: Min-hwa Chi, Nam Sung Kim
  • Publication number: 20140319615
    Abstract: A semiconductor structure in fabrication includes a n-FinFET and p-FinFET. Stress inducing materials such as silicon and silicon germanium are epitaxially grown into naturally diamond-shaped structures atop the silicon fins of the n-FinFET and p-FinFET areas. The diamond structures act as the source, drain and channel between the source and drain. The diamond structures of the channel are selectively separated from the fin while retaining the fin connections of the diamond-shaped growth of the source and the drain. Further fabrication to complete the structure may then proceed.
    Type: Application
    Filed: April 26, 2013
    Publication date: October 30, 2014
    Applicant: GLOBAL FOUNDRIES, Inc.
    Inventors: Min-Hwa CHI, Hoong Shing WONG
  • Publication number: 20140264489
    Abstract: For the formation of a stressor on one or more of a source and drain defined on a fin of FINFET semiconductor structure, a method can be employed including performing selective epitaxial growth (SEG) on one or more of the source and drain defined on the fin, separating the fin from a bulk silicon substrate at one or more of the source and drain, and further performing SEG on one or more of the source and drain to form a wrap around epitaxial growth stressor that stresses a channel connecting the source and drain. The formed stressor can be formed so that the epitaxial growth material defining a wrap around configuration connects to the bulk substrate. The formed stressor can increase mobility in a channel connecting the defined source and drain.
    Type: Application
    Filed: March 15, 2013
    Publication date: September 18, 2014
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Hoong Shing WONG, Min-hwa CHI
  • Patent number: 8836141
    Abstract: A semiconductor device is prepared by an annealing process to interconnect at least two components of the device by a conductor line surrounded by an insulator material. The annealing process results in formation of residual stresses within the conductor line and the insulator material. A notch is designed in the layout on a selective portion of the mask for patterning conductor line. The existence of a shape of notch on the selective portion generates extra stress components within the conductor line than if without the existence of the notch. The position of the notch is selected so that the extra stress components substantially counteract the residual stresses, thereby causing a net reduction in the residual stresses. The reduction in the residual stresses results in a corresponding mechanical stress migration and therefore improvement in the reliability of the device.
    Type: Grant
    Filed: April 24, 2013
    Date of Patent: September 16, 2014
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Min-Hwa Chi, Tai-Chun Huang, Chih-Hsiang Yao
  • Publication number: 20140252480
    Abstract: A device includes a plurality of trenches and fins defined in a substantially un-doped layer of semiconducting material, a gate insulation layer positioned on the fins and on the bottom of the trenches, a gate electrode and a device isolation structure. One method disclosed herein involves identifying a top width of each of a plurality of fins and a depth of a plurality of trenches to be formed in a substantially un-doped layer of semiconducting material, wherein, during operation, the device is adapted to operate in at least three distinguishable conditions depending upon a voltage applied to the device, performing at least one process operation to define the trenches and fins in the layer of semiconducting material, forming a gate insulation layer on the fins and on a bottom of the trenches and forming a gate electrode above the gate insulation layer.
    Type: Application
    Filed: May 21, 2014
    Publication date: September 11, 2014
    Applicant: GLOBALFOUNDRIES Inc.
    Inventors: Min-hwa Chi, Werner Juengling