Abstract: Processes for forming merged CA/CB constructs and the resulting devices are disclosed. Embodiments include providing a replacement metal gate (RMG) between first and second sidewall spacers surrounded by an insulator on a substrate, the RMG having a dielectric layer directly on the first and second sidewall spacers and having metal on the dielectric layer; providing an oxide layer over the insulator, the first and second sidewall spacers, and the RMG; forming a source/drain contact hole through the oxide layer and the insulator, adjacent to the first sidewall spacer; forming a gate contact hole through the oxide layer over the source/drain contact hole and extending to the metal of the RMG; enlarging the source/drain contact hole to the metal of the RMG; and filling the enlarged source/drain contact hole and gate contact hole with metal.

Abstract: Methods of fabricating transistors having raised active region(s) with at least partially angled upper surfaces are provided. The method includes, for instance: providing a gate structure disposed over a substrate, the gate structure including a conformal spacer layer; forming a raised active region adjoining a sidewall of the conformal spacer layer; providing a protective material over the raised active region; selectively etching-back the sidewall of the conformal spacer layer, exposing a side portion of the raised active region below the protective material; and etching the exposed side portion of the raised active region to partially undercut the protective material, wherein the etching facilitates defining, at least in part, an at least partially angled upper surface of the raised active region of the transistor.

Abstract: A method of forming a FinFET fin with low-doped and a highly-doped active portions and/or a FinFET fin having tapered sidewalls for Vt tuning and multi-Vt schemes and the resulting device are provided. Embodiments include forming an Si fin, the Si fin having a top active portion and a bottom active portion; forming a hard mask on a top surface of the Si fin; forming an oxide layer on opposite sides of the Si fin; implanting a dopant into the Si fin; recessing the oxide layer to reveal the active top portion of the Si fin; etching the top active portion of the Si fin to form vertical sidewalls; forming a nitride spacer covering each vertical sidewall; recessing the recessed oxide layer to reveal the active bottom portion of the Si fin; and tapering the active bottom portion of the Si fin.

Abstract: There is set forth herein a method of fabricating a contact interface formation. A layer of Ti metal can be deposited on a substrate and a layer of Ni metal can be deposited over the layer of Ti metal. An annealing process can be performed to form a contact interface formation having Ti in reacted form and Ni in reacted form.

Abstract: There is set forth herein in one embodiment a FinFET semiconductor device having a fin extending from a bulk silicon substrate, wherein there is formed wrapped around a portion of the fin a gate, and wherein proximate a channel area of the fin aligned to the gate there is formed a local buried oxide region aligned to the gate. In one embodiment, the local buried oxide region is formed below a channel area of the fin.

Abstract: A semiconductor device includes a fin defined on a substrate and a gate electrode structure formed above the fin. A channel region of the device is defined beneath the gate electrode structure and source/drain regions of the fin are defined adjacent the gate electrode structure. A dielectric layer is defined at least in the channel region. The dielectric layer includes oxygen and at least one of nitrogen, carbon or fluorine.

Abstract: At least one method, apparatus and system disclosed involves hard-coding data into an integrated circuit device. An integrated circuit device provided. Data for hard-wiring information into a portion of the integrated circuit device is received. A stress voltage signal is provided to a portion of a transistor of the integrated circuit device for causing a dielectric breakdown of the portion of the transistor for hard-wiring the data.

Abstract: Fin-type transistor fabrication methods and structures are provided having one or more nitrided conformal layers, to improve reliability of the semiconductor device. The method includes, for example, providing at least one material layer disposed, in part, conformally over a fin extending above a substrate, the material layer(s) including a gate dielectric layer; and performing a conformal nitridation process over an exposed surface of the material layer(s), the conformal nitridation process forming an exposed, conformal nitrided surface.

Abstract: A transistor, planar or non-planar (e.g., FinFET), includes T-shaped contacts to the source, drain and gate. The top portion of the T-shaped contact is wider than the bottom portion, the bottom portion complying with design rule limits. A conductor-material filled trench through a multi-layer etching stack above the transistor provides the top portions of the T-shaped contacts. Tapered spacers along inner sidewalls of the top contact portion prior to filling allow for etching a narrower bottom trench down to the gate, and to the source/drain for silicidation prior to filling.

Abstract: A method includes forming an ion implant layer in a fin defined on a semiconductor substrate. The semiconductor substrate is annealed to convert the ion implant layer to a dielectric layer. A gate electrode structure is formed above the fin in a channel region after forming the ion implant layer. The fin is recessed in a source/drain region. A semiconductor material is epitaxially grown in the source/drain region.

Abstract: Protecting non-planar output transistors from electrostatic discharge (ESD) events includes providing a non-planar semiconductor structure, the structure including a semiconductor substrate with a well of n-type or p-type. The provided non-planar structure further includes raised semiconductor structure(s) coupled to the substrate, non-planar transistor(s) of a type opposite the well, each transistor being situated on one of the raised structure(s), the non-planar transistor(s) each including a source, a drain and a gate, the non-planar structure further including parasitic bipolar junction transistor(s) (BJT(s)) on the raised structure(s), each BJT including a collector and an emitter situated on the raised structure and a base being the well, and a well contact for the base of the BJT.

Abstract: A semiconductor structure with wide-bottom and/or wide-top gates includes a semiconductor substrate, a source region(s), a drain region(s) associated with the source region(s), and a gate(s) associated with the source region(s) and the drain region(s) having a top portion and a bottom portion. One of the top portion and the bottom portion of the gate(s) is wider than the other of the top portion and bottom portion. The wide-bottom gate is created using a dummy wide-bottom gate etched from a layer of dummy gate material, creating spacers for the dummy gate, removing the dummy gate material and filling the opening created with conductive material. For the wide-top gate, first and second spacers are included, and instead of removing all the dummy gate material, only a portion is removed, exposing the first spacers. The exposed portion of the first spacers may either be completely or partially removed (e.g., tapered), in order to increase the area of the top portion of the gate to be filled.

Abstract: A method includes forming an ion implant layer in a fin defined on a semiconductor substrate. The semiconductor substrate is annealed to convert the ion implant layer to a dielectric layer. A gate electrode structure is formed above the fin in a channel region after forming the ion implant layer. The fin is recessed in a source/drain region. A semiconductor material is epitaxially grown in the source/drain region.

Abstract: There is set forth herein in one embodiment a FinFET semiconductor device having a fin extending from a bulk silicon substrate, wherein there is formed wrapped around a portion of the fin a gate, and wherein proximate a channel area of the fin aligned to the gate there is formed a local buried oxide region aligned to the gate. In one embodiment, the local buried oxide region is formed below a channel area of the fin.

Abstract: Embodiments of the present invention provide an improved shallow trench isolation structure and method of fabrication. The shallow trench isolation cavity includes an upper region having a sigma cavity shape, and a lower region having a substantially rectangular cross-section. The lower region is filled with a first material having good gap fill properties. The sigma cavity is filled with a second material having good stress-inducing properties. In some embodiments, source/drain stressor cavities may be eliminated, with the stress provided by the shallow trench isolation structure. In other embodiments, the stress from the shallow trench isolation structure may be used to complement or counteract stress from a source/drain stressor region of an adjacent transistor. This enables precise tuning of channel stress to achieve a desired carrier mobility for a transistor.

Abstract: Devices and methods for forming semiconductor devices with FinFETs are provided. One intermediate semiconductor device includes, for instance: a substrate with at least one fin with at least one channel; at least one gate over the channel; at least one hard-mask over the gate; and at least one spacer disposed over the gate and hard-mask. One method includes, for instance: obtaining an intermediate semiconductor device; forming at least one recess into the substrate, the recess including a bottom and at least one sidewall exposing a portion of the at least one fin; depositing a dielectric layer into the at least one recess; removing at least a portion of the dielectric layer to form a barrier dielectric layer; and performing selective epitaxial growth in the at least one recess over the barrier dielectric layer.

Abstract: A semiconductor device is prepared by an annealing process to interconnect at least two components of the device by a conductor line surrounded by an insulator material. The annealing process results in formation of residual stresses within the conductor line and the insulator material. One or multiple notches are designed in the layout on a selective portion of the mask for patterning conductor line. The existence of the notch or notches on the selective portion generates extra stress components within the conductor line than would exist without the existence of the notch. The position of the notch is selected so that the extra stress components substantially counteract the residual stresses, thereby causing a net reduction in the residual stresses. The reduction in the residual stresses results in a corresponding mechanical stress migration and therefore improvement in the reliability of the device.

Abstract: A transistor, planar or non-planar (e.g., FinFET), includes T-shaped contacts to the source, drain and gate. The top portion of the T-shaped contact is wider than the bottom portion, the bottom portion complying with design rule limits. A conductor-material filled trench through a multi-layer etching stack above the transistor provides the top portions of the T-shaped contacts. Tapered spacers along inner sidewalls of the top contact portion prior to filling allow for etching a narrower bottom trench down to the gate, and to the source/drain for silicidation prior to filling.

Abstract: A method of fabricating a raised fin structure including a raised contact structure is provided. The method may include: providing a base fin structure; providing at least one ancillary fin structure, the at least one ancillary fin structure contacting the base fin structure at a side of the base fin structure; growing a material over the base fin structure to form the raised fin structure; and, growing the material over the at least one ancillary fin structure, wherein the at least one ancillary fin structure contacting the base fin structure increases a volume of material grown over the base fin structure near the contact between the base fin structure and the at least one ancillary fin structure to form the raised contact structure.

Abstract: Methods of fabricating field effect transistors having a source region and a drain region separated by a channel region are provided which include: using a single mask step in forming a first portion(s) and a second portion(s) of at least one of the source region or the drain region, the first portion(s) including a first material selected and configured to facilitate the first portion(s) stressing the channel region, and the second portion(s) including a second material selected and configured to facilitate the second portion(s) having a lower electrical resistance than the first portion(s). One embodiment includes: providing the first material with a crystal lattice structure; and forming the second material by disposing another material interstitially with respect to the crystal lattice structure. Another embodiment includes forming the first portion and the second portion within at least one of a source cavity or a drain cavity of the semiconductor substrate.