Abstract: One illustrative method disclosed herein includes, among other things, forming a first gate structure above a fin, forming epi semiconductor material on the fin, performing at least one first etching process through a patterned sacrificial layer of material to remove at least a gate cap layer and sacrificial gate materials of the first gate structure so as to define a first isolation cavity that exposes the fin while leaving the second gate structure intact, performing at least one second etching process through the first isolation cavity to remove at least a portion of a vertical height of the fin and thereby form a first isolation trench, removing the patterned sacrificial layer of material, and forming a layer of insulating material above the epi semiconductor material and in the first isolation trench and in the first isolation cavity.

Abstract: Methods, apparatus, and systems for fabricating and using a semiconductor device comprising a first conductive element; a second conductive element; and an e-fuse comprising a first region comprising a conductive oxide of a first metal; and a second region comprising a second metal, wherein an oxide of the second metal is resistive; wherein the e-fuse is electrically connected to both the first conductive element and the second conductive element.

Abstract: Transistor structures and methods of fabricating transistor structures are provided. The methods include: fabricating a transistor structure at least partially within a substrate, the fabricating including: providing a cavity within the substrate; and forming a first portion and a second portion of the transistor structure at least partially within the cavity, the first portion being disposed at least partially between the substrate and the second portion, where the first portion inhibits diffusion of material from the second portion into the substrate. In one embodiment, the transistor structure is a field-effect transistor structure, and the first portion and the second portion include one of a source region or a drain region of the field-effect transistor structure. In another embodiment, the transistor structure is a bipolar junction transistor structure.

Abstract: A semiconductor structure includes a dielectric layer, a silicidable metal layer and an undoped filler material layer are used to create an anti-efuse device. The anti-efuse device may be situated in a dielectric layer of an interconnect structure for a semiconductor device or may be planar. Where part of an interconnect structure, the anti-efuse device may be realized by causing a current to flow therethrough while applying local heating. Where planar, the filler material may be situated between extensions of metal pads and metal atoms caused to move from the extensions to the filler material layer using a current flow and local heating.

Abstract: Methods for forming an eDRAM with replacement metal gate technology and the resulting device are disclosed. Embodiments include forming first and second dummy electrodes on a substrate, each dummy electrode having spacers at opposite sides and being surrounded by an ILD; removing the first and second dummy electrodes, forming first and second cavities, respectively; forming a hardmask over the substrate, exposing the first cavity; forming a deep trench in the substrate through the first cavity; removing the hardmask; and forming a capacitor in the first cavity and deep trench and concurrently forming an access transistor in the second cavity.

Abstract: A method of adjusting work-function metal thickness includes providing a semiconductor structure having a substrate, the substrate including a first array of fins formed thereon. First spacers are formed having a first spacer thickness on sidewalls of fins of the first array. The thickness of the first spacers is adjusted to provide a second spacer thickness different from the first spacer thickness. First supports are formed between and adjacent the first spacers. The first spacers are removed to form first WF metal trenches defined by the fins of the first array and the first supports. A gate is formed extending laterally across the fins of the first array. First WF metal structures are disposed within the first WF metal trenches within the gate.

Abstract: Programmable devices and fabrication methods thereof are presented. The programmable devices include, for instance, a first electrode and a second electrode electrically connected by a link portion. The link portion includes one material of a metal material or a semiconductor material and the first and second electrodes includes the other material of the metal material or the semiconductor material. For example, the link portion facilitates programming the programmable device by applying a programming current between the first electrode and the second electrode to facilitate migration of the one material of the link portion towards at least one of the first or second electrodes. In one embodiment, the programming current is configured to heat the link portion to facilitate the migration of the one material of the link portion towards the at least one of the first or second electrodes.

Abstract: Programmable via devices and fabrication methods thereof are presented. The programmable via devices include, for instance, a first metal layer and a second metal layer electrically connected by a via link. The via link includes a semiconductor portion and a metal portion, where the via link facilitates programming of the programmable via device by applying a programming current through the via link to migrate materials between the semiconductor portion and the metal portion to facilitate a change of an electrical resistance of the via link. In one embodiment, the programming current facilitates formation of at least one gap region within the via link, the at least one gap region facilitating the change of the electrical resistance of the via link.

Abstract: A method of forming a FinFET fin with low-doped and a highly-doped active portions and/or a FinFET fin having tapered sidewalls for Vt tuning and multi-Vt schemes and the resulting device are provided. Embodiments include forming an Si fin, the Si fin having a top active portion and a bottom active portion; forming a hard mask on a top surface of the Si fin; forming an oxide layer on opposite sides of the Si fin; implanting a dopant into the Si fin; recessing the oxide layer to reveal the active top portion of the Si fin; etching the top active portion of the Si fin to form vertical sidewalls; forming a nitride spacer covering each vertical sidewall; recessing the recessed oxide layer to reveal the active bottom portion of the Si fin; and tapering the active bottom portion of the Si fin.

Abstract: A three-dimensional semiconductor device includes a semiconductor substrate, fin(s) coupled to the substrate and surrounded at a bottom portion thereof by isolation material, each fin including a source region, a drain region and a channel region therebetween, a first gate and spacers over a portion of each fin, and a second gate and spacers, the second gate encompassing a common end portion of each fin. The first gate and corresponding source and drain regions act as an access transistor, and the second gate and common end portion(s) of the fin(s) act as a storage capacitor, and a top surface of the second gate acts as a plate for the storage capacitor, when multiple cells are arranged in an array.

Abstract: Semiconductor fuses with nanowire fuse links and fabrication methods thereof are presented. The methods include, for instance: fabricating a semiconductor fuse, the semiconductor fuse including at least one nanowire fuse link, and the fabricating including: forming at least one nanowire, the at least one nanowire including a semiconductor material; and reacting the at least one nanowire with a metal to form the at least one nanowire fuse link of the semiconductor fuse, the at least one nanowire fuse link including a semiconductor-metal alloy. In another aspect, a structure is presented. The structure includes: a semiconductor fuse, the semiconductor fuse including: at least one nanowire fuse link, the at least one nanowire fuse link including a semiconductor-metal alloy.

Abstract: A three-dimensional transistor includes a channel with a center portion (forked channel) or side portions (narrow channel) removed, or fins without shaping, after removal of the dummy gate and before a replacement metal gate is formed.

Abstract: Disclosed herein is a method of forming a CMOS integrated circuit product (comprised of first and second opposite type transistors) that includes forming a first spacer proximate both the first and second gate structures, forming an initial second spacer proximate the first spacer of the first transistor and a layer of second spacer material above the second transistor, and forming first raised epi semiconductor material source/drain regions for the first transistor. Thereafter, performing a first surface oxidation process so as to selectively form a hydrophilic material on exposed surfaces of the first raised epi semiconductor material and performing an etching process on both the transistors so as to remove the initial second spacer and the layer of second spacer material.

Abstract: Methods and structures for programmable device fabrication are provided. The methods for fabricating a programmable device include, for example forming at least one via opening in a layer of the programmable device and providing a catalyzing material over a lower surface of the at least one via opening; forming a plurality of nanowires or nanotubes in the at least one via opening using the catalyzing material as a catalyst for the forming of the plurality of nanowires or nanotubes; and providing a dielectric material in the at least one via opening so that the dielectric material surrounds the plurality of nanowires or nanotubes. The programmable device may, in subsequent or separate programming steps, have programming of the programmable device made permanent via thermal oxidation of the dielectric material and the plurality of nanowires or nanotubes, leaving a non-conducting material behind in the at least one via opening.

Abstract: A charge pump for an integrated circuit includes a substrate, first and second transistors and a capacitor. The first transistor includes first source and first drain regions disposed within the substrate and defining a first channel therebetween. The first source and first drain regions are implanted with one of an n-type and a p-type dopant. The second transistor includes second source and second drain regions disposed within the substrate and defining a second channel therebetween. The second source and second drain regions implanted with the same type dopant as the first source region. The capacitor includes a metal terminal and a substrate terminal with a dielectric therebetween. The substrate terminal is disposed within the substrate and implanted with the same type dopant as the first source region. The substrate terminal contacts the first drain region and second source region within the substrate to provide electrical continuity therebetween.

Abstract: A method of forming a FinFET fin with low-doped and a highly-doped active portions and/or a FinFET fin having tapered sidewalls for Vt tuning and multi-Vt schemes and the resulting device are provided. Embodiments include forming an Si fin, the Si fin having a top active portion and a bottom active portion; forming a hard mask on a top surface of the Si fin; forming an oxide layer on opposite sides of the Si fin; implanting a dopant into the Si fin; recessing the oxide layer to reveal the active top portion of the Si fin; etching the top active portion of the Si fin to form vertical sidewalls; forming a nitride spacer covering each vertical sidewall; recessing the recessed oxide layer to reveal the active bottom portion of the Si fin; and tapering the active bottom portion of the Si fin.

Abstract: The present invention provides a bipolar transistor, a method for forming the bipolar transistor, a method for turning on the bipolar transistor, and a band-gap reference circuit, virtual ground reference circuit and double band-gap reference circuit with the bipolar transistor. The bipolar transistor includes: a Silicon-On-Insulator wafer; a base area, an emitter area and a collector area; a base area gate dielectric layer on a top silicon layer and atop the base area; a base area control-gate on the base area gate dielectric layer; an emitter electrode connected to the emitter area via a first contact; a collector electrode connected to the collector area via a second contact; and a base area control-gate electrode connected to the base area control-gate via a third contact.

Abstract: There is set forth herein a method of fabricating a contact interface formation. A layer of Ti metal can be deposited on a substrate and a layer of Ni metal can be deposited over the layer of Ti metal. An annealing process can be performed to form a contact interface formation having Ti in reacted form and Ni in reacted form.

Abstract: Capacitor structures having first electrodes at least partially embedded within a second electrode, and fabrication methods are presented. The methods include, for instance: providing the first electrodes at least partially within an insulator layer, the first electrodes comprising exposed portions; covering exposed portions of the first electrodes with a dielectric material; and forming the second electrode at least partially around the dielectric covered portions of the first electrodes, the second electrode being physically separated from the first electrodes by the dielectric material. In one embodiment, a method further includes exposing further portions of the first electrodes; and providing a contact structure in electrical contact with the further exposed portions of the first electrodes.

Abstract: Methods and structures for programmable device fabrication are provided. The methods for fabricating a programmable device include, for example forming at least one via opening in a layer of the programmable device and providing a catalyzing material over a lower surface of the at least one via opening; forming a plurality of nanowires or nanotubes in the at least one via opening using the catalyzing material as a catalyst for the forming of the plurality of nanowires or nanotubes; and providing a dielectric material in the at least one via opening so that the dielectric material surrounds the plurality of nanowires or nanotubes. The programmable device may, in subsequent or separate programming steps, have programming of the programmable device made permanent via thermal oxidation of the dielectric material and the plurality of nanowires or nanotubes, leaving a non-conducting material behind in the at least one via opening.