Patents by Inventor Min Ying
Min Ying has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20210335861Abstract: The present disclosure relates to an image sensor having a photodiode surrounded by a back-side deep trench isolation (BDTI) structure, and an associated method of formation. In some embodiments, a plurality of pixel regions is disposed within an image sensing die and respectively comprises a photodiode configured to convert radiation into an electrical signal. The photodiode comprises a photodiode doping column with a first doping type surrounded by a photodiode doping layer with a second doping type that is different than the first doping type. A BDTI structure is disposed between adjacent pixel regions and extending from the back-side of the image sensing die to a position within the photodiode doping layer. The BDTI structure comprises a doped liner with the second doping type and a dielectric fill layer. The doped liner lines a sidewall surface of the dielectric fill layer.Type: ApplicationFiled: September 11, 2020Publication date: October 28, 2021Inventors: Yu-Hung Cheng, Chun-Tsung Kuo, Jiech-Fun Lu, Min-Ying Tsai, Chiao-Chun Hsu, Ching I Li
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Publication number: 20210298644Abstract: Disclosures of the present invention describe a system for recognizing abnormal activity of human body using wearable electronic device and mixed reality technology, comprising: a first wearable electronic device, a plurality of second wearable electronic devices, at least one camera, and a judgement module. This novel system is suitable for applying in any kinds of work environment, so as to monitor and determine whether a user (i.e., an operator or an employee) exhibits abnormal activities by referring a document of standard operating procedures (SOP), an operating manual and a document of safety operation standard (SOS), such that it is facilitated to reduce a happening rate of the user's mishandling, thereby achieving the enhancement of work efficiency and productivity.Type: ApplicationFiled: March 31, 2020Publication date: September 30, 2021Inventor: Min-Ying Lin
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Patent number: 11101307Abstract: An image sensor device is disclosed. The image sensor device includes: a substrate having a front surface and a back surface; a radiation-sensing region formed in the substrate; an opening extending from the back surface of the substrate into the substrate; a first metal oxide film including a first metal, the first metal oxide film being formed on an interior surface of the opening; and a second metal oxide film including a second metal, the second metal oxide film being formed over the first metal oxide film; wherein the electronegativity of the first metal is greater than the electronegativity of the second metal. An associated fabricating method is also disclosed.Type: GrantFiled: November 28, 2018Date of Patent: August 24, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chih-Yu Lai, Min-Ying Tsai, Yeur-Luen Tu, Hai-Dang Trinh, Cheng-Yuan Tsai
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Publication number: 20210229068Abstract: This invention relates to a dispersion comprising porous particles dispersed in a liquid phase, wherein the porous particles comprise a zeolite and the liquid phase is a size-excluded liquid. The invention also relates to a method of adsorbing a gas into a liquid, comprising at least the step of bringing the gas into contact with the dispersion. In addition, the invention relates to an assemblage of the dispersion, the zeolite comprising a cavity and a gas contained within the cavity.Type: ApplicationFiled: November 1, 2018Publication date: July 29, 2021Inventors: Stuart JAMES, Min Ying TSANG, John CAHIR
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Patent number: 11069733Abstract: In some embodiments, a method is provided. The method includes forming a plurality of trenches in a semiconductor substrate, where the trenches extend into the semiconductor substrate from a back-side of the semiconductor substrate. An epitaxial layer comprising a dopant is formed on lower surfaces of the trenches, sidewalls of the trenches, and the back-side of the semiconductor substrate, where the dopant has a first doping type. The dopant is driven into the semiconductor substrate to form a first doped region having the first doping type along the epitaxial layer, where the first doped region separates a second doped region having a second doping type opposite the first doping type from the sidewalls of the trenches and from the back-side of the semiconductor substrate. A dielectric layer is formed over the back-side of the semiconductor substrate, where the dielectric layer fill the trenches to form back-side deep trench isolation structures.Type: GrantFiled: March 11, 2020Date of Patent: July 20, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Hung Cheng, Shyh-Fann Ting, Yen-Ting Chiang, Yeur-Luen Tu, Min-Ying Tsai
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Publication number: 20210198752Abstract: The present disclosure provides a semiconductor structure, including a first semiconductor device having a first surface and a second surface, the second surface being opposite to the first surface, a semiconductor substrate over the first surface of the first semiconductor device, and a III-V etch stop layer in contact with the second surface of the first semiconductor device. The present disclosure also provides a manufacturing method of a semiconductor structure, including providing a temporary substrate having a first surface, forming a III-V etch stop layer over the first surface, forming a first semiconductor device over the etch stop layer, and removing the temporary substrate by an etching operation and exposing a surface of the III-V etch stop layer.Type: ApplicationFiled: February 19, 2021Publication date: July 1, 2021Inventors: Min-Ying TSAI, Yeur-Luen TU
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Publication number: 20210183921Abstract: In some embodiments, a method is provided. The method includes forming a plurality of trenches in a semiconductor substrate, where the trenches extend into the semiconductor substrate from a back-side of the semiconductor substrate. An epitaxial layer comprising a dopant is formed on lower surfaces of the trenches, sidewalls of the trenches, and the back-side of the semiconductor substrate, where the dopant has a first doping type. The dopant is driven into the semiconductor substrate to form a first doped region having the first doping type along the epitaxial layer, where the first doped region separates a second doped region having a second doping type opposite the first doping type from the sidewalls of the trenches and from the back-side of the semiconductor substrate. A dielectric layer is formed over the back-side of the semiconductor substrate, where the dielectric layer fill the trenches to form back-side deep trench isolation structures.Type: ApplicationFiled: March 1, 2021Publication date: June 17, 2021Inventors: Yu-Hung Cheng, Shyh-Fann Ting, Yen-Ting Chiang, Yeur-Luen Tu, Min-Ying Tsai
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Patent number: 10971534Abstract: In some embodiments, a method is provided. The method includes forming a plurality of trenches in a semiconductor substrate, where the trenches extend into the semiconductor substrate from a back-side of the semiconductor substrate. An epitaxial layer comprising a dopant is formed on lower surfaces of the trenches, sidewalls of the trenches, and the back-side of the semiconductor substrate, where the dopant has a first doping type. The dopant is driven into the semiconductor substrate to form a first doped region having the first doping type along the epitaxial layer, where the first doped region separates a second doped region having a second doping type opposite the first doping type from the sidewalls of the trenches and from the back-side of the semiconductor substrate. A dielectric layer is formed over the back-side of the semiconductor substrate, where the dielectric layer fill the trenches to form back-side deep trench isolation structures.Type: GrantFiled: March 11, 2020Date of Patent: April 6, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yu-Hung Cheng, Shyh-Fann Ting, Yen-Ting Chiang, Yeur-Luen Tu, Min-Ying Tsai
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Publication number: 20210089940Abstract: Disclosures of the present invention describe a machine failure analyzing system. In the machine failure analyzing system, a wearable electronic device is for a user to wear, and a controlling and processing device is provided with a machine history data base and a failure causes analyzing unit. When a specific machine is malfunctioning or in a failure status, the controlling and processing device utilizes a machine status data collecting unit to collect machine status data from the specific machine. Subsequently, based on the machine status data, the failure causes analyzing unit can find relative failure causes from the machine history data base, thereby generating at least one troubleshooting solution. As such, under instructions of the troubleshooting solution, a field engineer who wears the wearable electronic device can achieve the troubleshooting of the specific machine rapidly and precisely, without needing to spend time finding the failure causes.Type: ApplicationFiled: October 23, 2019Publication date: March 25, 2021Inventors: Min-Ying Lin, Po-Shih Chiang
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Publication number: 20210066378Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including a first through substrate via (TSV) disposed within a semiconductor substrate. The semiconductor substrate has a front-side surface and a back-side surface respectively on opposite sides of the semiconductor substrate. The semiconductor substrate comprises a first doped channel region extending from the front-side surface to the back-side surface. The first TSV is defined at least by the first doped channel region. A conductive contact overlies the back-side surface of the semiconductor substrate and comprises a first conductive layer overlying the first TSV. The first conductive layer comprises a conductive material. An upper conductive layer underlies the conductive contact. An upper surface of the upper conductive layer is aligned with the back-side surface of the semiconductor substrate. The upper conductive layer comprises a silicide of the conductive material.Type: ApplicationFiled: December 23, 2019Publication date: March 4, 2021Inventors: Min-Ying Tsai, Cheng-Ta Wu, Yeur-Luen Tu
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Patent number: 10930547Abstract: The present disclosure provides a semiconductor structure, including a first semiconductor device having a first surface and a second surface, the second surface being opposite to the first surface, a semiconductor substrate over the first surface of the first semiconductor device, and a III-V etch stop layer in contact with the second surface of the first semiconductor device. The present disclosure also provides a manufacturing method of a semiconductor structure, including providing a temporary substrate having a first surface, forming a III-V etch stop layer over the first surface, forming a first semiconductor device over the III-V etch to stop layer, and removing the temporary substrate by an etching operation and exposing a surface of the III-V etch stop layer.Type: GrantFiled: July 26, 2018Date of Patent: February 23, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Min-Ying Tsai, Yeur-Luen Tu
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Patent number: 10923503Abstract: Various embodiments of the present application are directed towards a method for forming a semiconductor-on-insulator (SOI) substrate comprising a trap-rich layer with small grain sizes, as well as the resulting SOI substrate. In some embodiments, an amorphous silicon layer is deposited on a high-resistivity substrate. A rapid thermal anneal (RTA) is performed to crystallize the amorphous silicon layer into a trap-rich layer of polysilicon in which a majority of grains are equiaxed. An insulating layer is formed over the trap-rich layer. A device layer is formed over the insulating layer and comprises a semiconductor material. Equiaxed grains are smaller than other grains (e.g., columnar grains). Since a majority of grains in the trap-rich layer are equiaxed, the trap-rich layer has a high grain boundary area and a high density of carrier traps. The high density of carrier traps may, for example, reduce the effects of parasitic surface conduction (PSC).Type: GrantFiled: July 2, 2018Date of Patent: February 16, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yu-Hung Cheng, Cheng-Ta Wu, Yeur-Luen Tu, Min-Ying Tsai, Alex Usenko
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Patent number: 10867834Abstract: The present disclosure provides a semiconductor structure, including a first semiconductor device having a first surface and a second surface, the second surface being opposite to the first surface, a semiconductor substrate over the first surface of the first semiconductor device, and a III-V etch stop layer in contact with the second surface of the first semiconductor device. The present disclosure also provides a manufacturing method of a semiconductor structure, including providing a temporary substrate having a first surface, forming a III-V etch stop layer over the first surface, forming a first semiconductor device over the etch stop layer, and removing the temporary substrate by an etching operation and exposing a surface of the III-V etch stop layer.Type: GrantFiled: April 1, 2016Date of Patent: December 15, 2020Inventors: Min-Ying Tsai, Yeur-Luen Tu
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Publication number: 20200354007Abstract: The present invention discloses a novel electric double-wheel balance car, comprising a bottom plate, a first wheel, a second wheel, a first pedal group and a second pedal group. The first wheel is provided with a first motor shaft connected with a first motor. The second wheel is provided with a second motor shaft connected with a second motor. The present invention has the characteristics that the first motor shaft is fixedly connected with the first pedal group, and the second motor shaft is fixedly connected with the second pedal group. The present invention has the advantages that the integral structure is simpler; assembly is more convenient; the bottom plate shares human gravity and bears uniform stress; the integral structure is durable, simpler to control and easy for a beginner to use; and motion states are respectively independently controlled by left foot and right foot.Type: ApplicationFiled: July 25, 2019Publication date: November 12, 2020Inventors: Ye Hu, Min Ying
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Publication number: 20200330919Abstract: The invention relates to dispersions of porous solids in liquids selected from deep eutectic solvents, liquid oligomers, bulky liquids, liquid polymers, silicone oils, halogenated oils, paraffin oils or triglyceride oils, as well as to their methods of preparation. In embodiments of the invention, the porous solids are metal organic framework materials (MOFs), zeolites, covalent organic frameworks (COFs), porous inorganic materials, Mobil Compositions of Matter (MCMs) or a porous carbon. The invention also relates to the use of porous materials to form dispersions, and to assemblages of such dispersions with a gas or gases. The dispersions can exhibit high gas capacities and selectivities.Type: ApplicationFiled: May 11, 2018Publication date: October 22, 2020Applicant: The Queen's University of BelfastInventors: Stuart JAMES, Min Ying TSANG, John CAHIR, David ROONEY
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Publication number: 20200212082Abstract: In some embodiments, a method is provided. The method includes forming a plurality of trenches in a semiconductor substrate, where the trenches extend into the semiconductor substrate from a back-side of the semiconductor substrate. An epitaxial layer comprising a dopant is formed on lower surfaces of the trenches, sidewalls of the trenches, and the back-side of the semiconductor substrate, where the dopant has a first doping type. The dopant is driven into the semiconductor substrate to form a first doped region having the first doping type along the epitaxial layer, where the first doped region separates a second doped region having a second doping type opposite the first doping type from the sidewalls of the trenches and from the back-side of the semiconductor substrate. A dielectric layer is formed over the back-side of the semiconductor substrate, where the dielectric layer fill the trenches to form back-side deep trench isolation structures.Type: ApplicationFiled: March 11, 2020Publication date: July 2, 2020Inventors: Yu-Hung Cheng, Shyh-Fann Ting, Yen-Ting Chiang, Yeur-Luen Tu, Min-Ying Tsai
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Publication number: 20200212083Abstract: In some embodiments, a method is provided. The method includes forming a plurality of trenches in a semiconductor substrate, where the trenches extend into the semiconductor substrate from a back-side of the semiconductor substrate. An epitaxial layer comprising a dopant is formed on lower surfaces of the trenches, sidewalls of the trenches, and the back-side of the semiconductor substrate, where the dopant has a first doping type. The dopant is driven into the semiconductor substrate to form a first doped region having the first doping type along the epitaxial layer, where the first doped region separates a second doped region having a second doping type opposite the first doping type from the sidewalls of the trenches and from the back-side of the semiconductor substrate. A dielectric layer is formed over the back-side of the semiconductor substrate, where the dielectric layer fill the trenches to form back-side deep trench isolation structures.Type: ApplicationFiled: March 11, 2020Publication date: July 2, 2020Inventors: Yu-Hung Cheng, Shyh-Fann Ting, Yen-Ting Chiang, Yeur-Luen Tu, Min-Ying Tsai
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Patent number: 10658410Abstract: In some embodiments, a method is provided. The method includes forming a plurality of trenches in a semiconductor substrate, where the trenches extend into the semiconductor substrate from a back-side of the semiconductor substrate. An epitaxial layer comprising a dopant is formed on lower surfaces of the trenches, sidewalls of the trenches, and the back-side of the semiconductor substrate, where the dopant has a first doping type. The dopant is driven into the semiconductor substrate to form a first doped region having the first doping type along the epitaxial layer, where the first doped region separates a second doped region having a second doping type opposite the first doping type from the sidewalls of the trenches and from the back-side of the semiconductor substrate. A dielectric layer is formed over the back-side of the semiconductor substrate, where the dielectric layer fill the trenches to form back-side deep trench isolation structures.Type: GrantFiled: August 27, 2018Date of Patent: May 19, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yu-Hung Cheng, Shyh-Fann Ting, Yen-Ting Chiang, Yeur-Luen Tu, Min-Ying Tsai
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Publication number: 20200098618Abstract: Various embodiments of the present application are directed to a method for forming a semiconductor-on-insulator (SOI) substrate without bond interface voids and/or without delamination between layers. In some embodiments, a first high ? bonding structure is formed over a handle substrate. A device layer is formed over a sacrificial substrate. Outer most sidewalls of the device layer are between outer most sidewalls of the sacrificial substrate. A second high ? bonding structure is formed over the device layer. The first high ? bonding structure is bonded to the second high ? bonding structure, such that the device layer is between the sacrificial substrate and the handle substrate. A first removal process is performed to remove the sacrificial substrate. The first removal process comprises performing a first etch into the sacrificial substrate until the device layer is reached.Type: ApplicationFiled: December 20, 2018Publication date: March 26, 2020Inventors: Min-Ying Tsai, Yeur-Luen Tu
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Publication number: 20200066768Abstract: In some embodiments, a method is provided. The method includes forming a plurality of trenches in a semiconductor substrate, where the trenches extend into the semiconductor substrate from a back-side of the semiconductor substrate. An epitaxial layer comprising a dopant is formed on lower surfaces of the trenches, sidewalls of the trenches, and the back-side of the semiconductor substrate, where the dopant has a first doping type. The dopant is driven into the semiconductor substrate to form a first doped region having the first doping type along the epitaxial layer, where the first doped region separates a second doped region having a second doping type opposite the first doping type from the sidewalls of the trenches and from the back-side of the semiconductor substrate. A dielectric layer is formed over the back-side of the semiconductor substrate, where the dielectric layer fill the trenches to form back-side deep trench isolation structures.Type: ApplicationFiled: August 27, 2018Publication date: February 27, 2020Inventors: Yu-Hung Cheng, Shyh-Fann Ting, Yen-Ting Chiang, Yeur-Luen Tu, Min-Ying Tsai