Abstract: In order to reduce the negative influence of reactive hydrogen on the lifetime of a reflective optical element, particularly inside an EUV lithography device, there is proposed for the extreme ultraviolet and soft X-ray wavelength region a reflective optical element (50) having a reflective surface (60) with a multilayer system (51) and in the case of which the reflective surface (60) has a protective layer system (59) with an uppermost layer (56) composed of silicon carbide or ruthenium, the protective layer system (59) having a thickness of between 5 nm and 25 nm.

Abstract: A coin comprising a metallic disc separated from a concentric annular metallic ring by a concentric intervening layer. The metallic disc has a first electrical conductivity and the annular metallic ring has a second electrical conductivity. This intervening layer comprises a transparent dielectric material that connects the metallic disc to the annular metallic ring. The intervening layer has a width to provide a separation of inductive signatures of the metallic disc and the annular metallic ring. The width is based on an electrical conductivity ratio of the first electrical conductivity to the second electrical conductivity and is further based on a geometry of the coin. In some embodiments, the intervening layer comprises a transparent polymer including additives, such as a UV stabilizer or a fluorescent component.

Abstract: A system and method for processing of dual-energy image data measurements are disclosed. The image data acquired on a computed tomograph is collected together to form a container before being sent to client devices for post-processing. The container contains a control object for the respective image dataset, which includes evaluation specifications and post-processing specifications for post-processing of the image data on the client device.

Abstract: A mirror, in particular for a microlithographic projection exposure apparatus, has an optically effective surface (10a), a mirror substrate (11) and a reflection layer stack (12) configured to reflect electromagnetic radiation that is incident on the optically effective surface. A metallic diffusion barrier layer (13) is arranged on that side of the reflection layer stack which faces toward the optically effective surface, and a stabilization layer (14) is arranged on the side of the diffusion barrier layer that faces toward the optically effective surface (10a). The stabilization layer reduces deformation of the diffusion barrier layer compared to an analogous structure without such a stabilization layer upon irradiation of the optically effective surface with electromagnetic radiation. The stabilization layer has a porosity, a relative density of which is no more than 80%, where the relative density is defined as the ratio between geometric density and true density.

Abstract: A mask (M) for EUV lithography includes: a substrate (7), a first surface region (A1) formed by a surface (8a) of a multilayer coating (8) embodied to reflect EUV radiation (27), said surface (8a) facing away from the substrate (7), and a second surface region (A2) formed by a surface (18a) of a further coating (18) embodied to reflect DUV radiation (28) and to suppress the reflection of EUV radiation (27), said surface (18a) facing away from the substrate (7). The further coating is a multilayer coating (18). Also disclosed are an EUV lithography apparatus that includes such a mask (M) and a method for determining a contrast proportion caused by DUV radiation when imaging a mask (M) onto a light-sensitive layer.

Abstract: A mirror (1) for the EUV wavelength range having a reflectivity of greater than 40% for at least one angle of incidence of between 0° and 25° includes a substrate (S) and a layer arrangement, wherein the layer arrangement has at least one non-metallic individual layer (B, H, M), and wherein the non-metallic individual layer (B, H, M) has a doping with impurity atoms of between 10 ppb and 10%, in particular between 100 ppb and 0.1%, providing the non-metallic individual layer (B, H, M) with a charge carrier density of greater than 6*1010 cm?3 and/or an electrical conductivity of greater than 1*10?3 S/m, in particular with a charge carrier density of greater than 6*1013 cm?3 and/or an electrical conductivity of greater than 1 S/m.

Abstract: A laminating body for laminating a foil onto a substrate includes a pressure area on which there is imprinted a structure which forms an embossing in the foil upon lamination of the foil onto the substrate.

Abstract: The present invention relates to a dishwashing device for an aircraft, comprising an inner chamber, which receives crockery to be cleaned and cleaning medium, and a door, which closes an opening in the inner chamber in a closed position, and a connecting apparatus for connecting the dishwashing device to a water disposal system of the aircraft, the door being secured in the closed position by means of at least one locking apparatus, wherein the locking apparatus is designed to release the door from the closed position by a releasing movement when a predetermined pressure gradient between the inner chamber and surroundings of the dishwashing device is exceeded.

Abstract: A method for producing a mirror element, in particular for a microlithographic projection exposure apparatus includes: providing a substrate (101, 102, 103, 104, 201, 202, 301, 302, 401, 402, 501, 502, 801, 901, 951, 961); and forming a layer stack (111, 112, 113, 114, 211, 212, 311, 312, 411, 412, 511, 512) on the substrate, wherein the layer stack is formed so that a setpoint curvature of the mirror element for a predetermined operating temperature is generated by a bending force exerted by the layer stack, wherein the substrate has a curvature deviating from the setpoint curvature of the mirror element prior to the formation of the layer stack, and wherein the bending force exerted by the layer stack is at least partly generated by virtue of a post-treatment for changing the layer tension of the layer stack.

Abstract: A computer system for image processing has a first working environment with a first program for image processing, as well as a second working environment, logically separated from the first working environment, with a second program for image processing. The first working environment is implemented on a first server. Furthermore, the first working environment is designed to receive a first command to execute the first program and a second command to execute the second program, and to send the second command to the second working environment. The second working environment is designed to send an image processed by the second program to the first working environment. The communication of a user with the first and second program thus occurs via a uniform platform in the form of the first working environment, and the integration of the second program for image processing into the workflow is facilitated.

Abstract: A laminating body for laminating a foil onto a substrate includes a pressure area on which there is imprinted a structure which forms an embossing in the foil upon lamination of the foil onto the substrate.

Abstract: A mirror, in particular for a microlithographic projection exposure apparatus, has an optically effective surface (10a), a mirror substrate (11) and a reflection layer stack (12) configured to reflect electromagnetic radiation that is incident on the optically effective surface. A metallic diffusion barrier layer (13) is arranged on that side of the reflection layer stack which faces toward the optically effective surface, and a stabilization layer (14) is arranged on the side of the diffusion barrier layer that faces toward the optically effective surface (10a). The stabilization layer reduces deformation of the diffusion barrier layer compared to an analogous structure without such a stabilization layer upon irradiation of the optically effective surface with electromagnetic radiation. The stabilization layer has a porosity, a relative density of which is no more than 80%, where the relative density is defined as the ratio between geometric density and true density.

Abstract: In various embodiments, a memory device includes at least one memory cell and at least one virtual supply line coupled to the at least one memory cell. The memory device is designed in such a way that a voltage potential present on the virtual supply line is altered after an active access to the memory cell by virtue of a charge stored within the memory device during the active access being re-stored in such a way that a state of the memory cell with a reduced leakage current consumption is achieved.

Abstract: An arrangement for and a method of characterizing the polarization properties of an optical system, in particular an optical system of a microlithographic projection exposure apparatus. The arrangement includes at least one polarization state generator (130, 230, 330) which sets a defined polarization state of radiation incident on the optical system, and a polarization state detector (140, 240, 340) adapted to measure the exit polarization state of radiation issuing from the optical system, wherein the optical system is designed for a working wavelength of less than 15 nm, and wherein the polarization state generator and/or the polarization state detector are so designed that their polarization-optical action on an incident light beam is substantially constant over an angle spectrum of the light beam of at least 10°.

Abstract: A computer system for image processing has a first working environment with a first program for image processing, as well as a second working environment, logically separated from the first working environment, with a second program for image processing. The first working environment is implemented on a first server. Furthermore, the first working environment is designed to receive a first command to execute the first program and a second command to execute the second program, and to send the second command to the second working environment. The second working environment is designed to send an image processed by the second program to the first working environment . The communication of a user with the first and second program thus occurs via a uniform platform in the form of the first working environment, and the integration of the second program for image processing into the workflow is facilitated.

Abstract: A portable data carrier (2) and a method for its production, including an apparatus (4) for storing and processing data, an antenna (6) for transmitting energy and information which is connected to the apparatus (4), as well as a plastic surrounding the apparatus (4) and the antenna (6), where the plastic of the portable data carrier is transparent or partially transparent and the antenna (6) has at least one security feature.

Abstract: A mirror (1) for the EUV wavelength range having a reflectivity of greater than 40% for at least one angle of incidence of between 0° and 25° includes a substrate (S) and a layer arrangement, wherein the layer arrangement has at least one non-metallic individual layer (B, H, M), and wherein the non-metallic individual layer (B, H, M) has a doping with impurity atoms of between 10 ppb and 10%, in particular between 100 ppb and 0.1%, providing the non-metallic individual layer (B, H, M) with a charge carrier density of greater than 6*1010 cm?3 and/or an electrical conductivity of greater than 1*10?3 S/m, in particular with a charge carrier density of greater than 6*1013 cm?3 and/or an electrical conductivity of greater than 1 S/m.

Abstract: An optical element (21) with a substrate (30) and a reflective coating (31). The coating (31) has, in particular for the reflection of EUV radiation, a plurality of layer pairs having alternate layers (33a, 33b) composed of a high refractive index material and a low refractive index material At least one active layer (34) composed of a magnetostrictive material is formed within the reflective coating (31). Also disclosed is an optical element (21) having a substrate (30) and a reflective coating (31). The optical element (21) has at least one first active layer with a material having positive magnetostriction and at least one second active layer with a material having negative magnetostriction. The layer thicknesses and the layer materials of the active layers are such that mechanical stress changes or changes in length of the active layers that are produced by a magnetic field mutually compensate for one another.

Abstract: In various embodiments, a memory device includes at least one memory cell and at least one virtual supply line coupled to the at least one memory cell. The memory device is designed in such a way that a voltage potential present on the virtual supply line is altered after an active access to the memory cell by virtue of a charge stored within the memory device during the active access being re-stored in such a way that a state of the memory cell with a reduced leakage current consumption is achieved.

Abstract: A device for monitoring a distribution point in telecommunication networks, comprises a control unit, a battery, a communications unit, and at least one sensor. The communications unit is enabled to dispatch and receive symbol sequences via a mobile phoning network. The control unit and the communications unit are programmed to be, in a normal state, in a sleep mode. The control unit is further programmed to autonomously initiate, for an event detected by the at least one sensor, an alert of the communications unit, wherein the communications unit then proactively dispatches an alarm message via the mobile phoning network. The device is further programmed so that the communications unit is alerted at predetermined times, dispatches a status report and remains active for a predetermined time period to the purpose of receiving a programming message transmitted to the device via the mobile phoning network.