Patents by Inventor Sameer Pendharkar
Sameer Pendharkar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20120104497Abstract: An integrated circuit on an SOI substrate containing an extended drain MOS transistor with a through substrate diode in a drain (n-channel) or body region (p-channel) so that the drain or body region is coupled to the handle wafer through a p-n junction. An integrated circuit on an SOI substrate containing an extended drain MOS transistor with a through substrate diode in a drain (n-channel) or body region (p-channel) coupled to the handle wafer through a p-n junction, that is electrically isolated from the drain or body region. A process of forming an integrated circuit on an SOI substrate containing an extended drain MOS transistor with a through substrate diode in a drain (n-channel) or body region (p-channel).Type: ApplicationFiled: October 26, 2011Publication date: May 3, 2012Applicant: TEXAS INSTRUMENTS INCORPORATEDInventors: Marie Denison, Philip L. Hower, Sameer Pendharkar
-
Publication number: 20120100679Abstract: A process of forming an integrated circuit, including forming a dummy oxide layer for ion implanting low voltage transistors, replacing the dummy oxide in the low voltage transistor area with a thinner gate dielectric layer, and retaining the dummy oxide for a gate dielectric for a DEMOS or LDMOS transistor. A process of forming an integrated circuit, including forming a dummy oxide layer for ion implanting low voltage and intermediate voltage transistors, replacing the dummy oxide in the low voltage transistors with a thinner gate dielectric layer, replacing the dummy oxide in the intermediate voltage transistor with another gate dielectric layer, and retaining the dummy oxide for a gate dielectric for a DEMOS or LDMOS transistor.Type: ApplicationFiled: October 17, 2011Publication date: April 26, 2012Applicant: TEXAS INSTRUMENTS INCORPORATEDInventors: Seetharaman Sridhar, Sameer Pendharkar
-
Patent number: 8148228Abstract: A method for manufacturing a semiconductor device that comprises implanting a first dopant type in a well region of a substrate to form implanted sub-regions that are separated by non-implanted areas of the well region. The method also comprises forming an oxide layer over the well region, such that an oxide-converted first thickness of the implanted sub-regions is greater than an oxide-converted second thickness of the non-implanted areas. The method further comprises removing the oxide layer to form a topography feature on the well region. The topography feature comprises a surface pattern of higher and lower portions. The higher portions correspond to locations of the non-implanted areas and the lower portions correspond to the implanted sub-regions.Type: GrantFiled: April 5, 2007Date of Patent: April 3, 2012Assignee: Texas Instruments IncorporatedInventors: Sameer Pendharkar, Binghua Hu, Xinfen Celia Chen
-
Patent number: 8124482Abstract: An integrated circuit containing an MOS transistor with a trenched gate abutting an isolation dielectric layer over a drift region. The body well and source diffused region overlap the bottom surface of the gate trench. An integrated circuit containing an MOS transistor with a first trenched gate abutting an isolation dielectric layer over a drift region, and a second trenched gate located over a heavily doped buried layer. The buried layer is the same conductivity type as the drift region. A process of forming an integrated circuit containing an MOS transistor, which includes an isolation dielectric layer over a drift region of a drain of the transistor, and a gate formed in a gate trench which abuts the isolation dielectric layer. The gate trench is formed by removing substrate material adjacent to the isolation dielectric layer.Type: GrantFiled: January 14, 2011Date of Patent: February 28, 2012Assignee: Texas Instruments IncorporatedInventors: Marie Denison, Sameer Pendharkar, Binghua Hu, Taylor Rice Efland, Sridhar Seetharaman
-
Publication number: 20110309440Abstract: An integrated circuit containing an extended drain MOS transistor may be formed by forming a drift region implant mask with mask fingers abutting a channel region and extending to the source/channel active area, but not extending to a drain contact active area. Dopants implanted through the exposed fingers form lateral doping striations in the substrate under the mask fingers. An average doping density of the drift region under the gate is at least 25 percent less than an average doping density of the drift region at the drain contact active area. In one embodiment, the dopants diffuse laterally to form a continuous drift region. In another embodiment, substrate material between lateral doping striations remains an opposite conductivity type from the lateral doping striations.Type: ApplicationFiled: June 15, 2011Publication date: December 22, 2011Applicant: TEXAS INSTRUMENTS INCORPORATEDInventors: Pinghai Hao, Sameer Pendharkar, Binghua Hu, Qingfeng Wang
-
Publication number: 20110275210Abstract: An electronic device has a plurality of trenches formed in a semiconductor layer. A vertical drift region is located between and adjacent the trenches. An electrode is located within each trench, the electrode having a gate electrode section and a field plate section. A graded field plate dielectric having increased thickness at greater depth is located between the field plate section and the vertical drift region.Type: ApplicationFiled: July 21, 2011Publication date: November 10, 2011Applicant: TEXAS INSTRUMENTS INCORPORATEDInventors: Marie Denison, Sameer Pendharkar, Philip L. Hower, John Lin
-
Patent number: 7989853Abstract: A dual channel JFET which can be integrated in an IC without adding process steps is disclosed. Pinch-off voltage is determined by lateral width of a first, vertical, channel near the source contact. Maximum drain voltage is determined by drain to gate separation and length of a second, horizontal, channel under the gate. Pinch-off voltage and maximum drain potential are dependent on lateral dimensions of the drain and gate wells and may be independently optimized. A method of fabricating the dual channel JFET is also disclosed.Type: GrantFiled: August 7, 2009Date of Patent: August 2, 2011Assignee: Texas Instruments IncorporatedInventors: Pinghai Hao, Sameer Pendharkar, Philip L. Hower, Marie Denison
-
Patent number: 7943472Abstract: Cobalt silicide (CoSi2) Schottky diodes fabricated per the current art suffer from excess leakage currents in reverse bias. In this invention, an floating p-type region encircles each anode of a CoSi2 Schottky diode comprising of one or more CoSi2 anodes. The resulting p-n junction forms a depletion region under the Schottky junction that reduces leakage current through the Schottky diodes in reverse bias operation.Type: GrantFiled: January 31, 2008Date of Patent: May 17, 2011Assignee: Texas Instruments IncorporatedInventors: Sameer Pendharkar, Eugen Pompiliu Mindricelu
-
Publication number: 20110111569Abstract: An integrated circuit containing an MOS transistor with a trenched gate abutting an isolation dielectric layer over a drift region. The body well and source diffused region overlap the bottom surface of the gate trench. An integrated circuit containing an MOS transistor with a first trenched gate abutting an isolation dielectric layer over a drift region, and a second trenched gate located over a heavily doped buried layer. The buried layer is the same conductivity type as the drift region. A process of forming an integrated circuit containing an MOS transistor, which includes an isolation dielectric layer over a drift region of a drain of the transistor, and a gate formed in a gate trench which abuts the isolation dielectric layer. The gate trench is formed by removing substrate material adjacent to the isolation dielectric layer.Type: ApplicationFiled: January 14, 2011Publication date: May 12, 2011Applicant: TEXAS INSTRUMENTS INCORPORATEDInventors: Marie Denison, Sameer Pendharkar, Binghua Hu, Taylor Rice Efland, Sridhar Seetharaman
-
Publication number: 20110108914Abstract: An integrated circuit containing an MOS transistor with a trenched gate abutting an isolation dielectric layer over a drift region. The body well and source diffused region overlap the bottom surface of the gate trench. An integrated circuit containing an MOS transistor with a first trenched gate abutting an isolation dielectric layer over a drift region, and a second trenched gate located over a heavily doped buried layer. The buried layer is the same conductivity type as the drift region. A process of forming an integrated circuit containing an MOS transistor, which includes an isolation dielectric layer over a drift region of a drain of the transistor, and a gate formed in a gate trench which abuts the isolation dielectric layer. The gate trench is formed by removing substrate material adjacent to the isolation dielectric layer.Type: ApplicationFiled: January 14, 2011Publication date: May 12, 2011Applicant: TEXAS INSTRUMENTS INCORPORATEDInventors: Marie Denison, Sameer Pendharkar, Binghua Hu, Taylor Rice Efland, Sridhar Seetharaman
-
Publication number: 20110076822Abstract: A semiconductor device 100 comprising source and drain regions 105, 107, and insulating region 115 and a plate structure 140. The source and drain regions are on or in a semiconductor substrate 110. The insulating region is on or in the semiconductor substrate and located between the source and drain regions. The insulating region has a thin layer 120 and a thick layer 122. The thick layer includes a plurality of insulating stripes 132 that are separated from each other and that extend across a length 135 between the source and the drain regions. The plate structure is located between the source and the drain regions, wherein the plate structure is located on the thin layer and portions of the thick layer, the plate structure having one or more conductive bands 143 that are directly over individual ones of the plurality of insulating stripes.Type: ApplicationFiled: December 7, 2010Publication date: March 31, 2011Applicant: TEXAS INSTRUMENTS INCORPORATEDInventors: Marie Denison, Seetharaman Sridhar, Sameer Pendharkar
-
Patent number: 7893499Abstract: An integrated circuit containing an MOS transistor with a trenched gate abutting an isolation dielectric layer over a drift region. The body well and source diffused region overlap the bottom surface of the gate trench. An integrated circuit containing an MOS transistor with a first trenched gate abutting an isolation dielectric layer over a drift region, and a second trenched gate located over a heavily doped buried layer. The buried layer is the same conductivity type as the drift region. A process of forming an integrated circuit containing an MOS transistor, which includes an isolation dielectric layer over a drift region of a drain of the transistor, and a gate formed in a gate trench which abuts the isolation dielectric layer. The gate trench is formed by removing substrate material adjacent to the isolation dielectric layer.Type: GrantFiled: April 3, 2009Date of Patent: February 22, 2011Assignee: Texas Instruments IncorporatedInventors: Marie Denison, Sameer Pendharkar, Binghua Hu, Taylor Rice Efland, Sridhar Seetharaman
-
Patent number: 7888196Abstract: A method of fabricating an integrated circuit (IC) including a first plurality of MOS transistors having a first gate dielectric having a first thickness in first regions, and a second plurality of MOS transistors having a second gate dielectric having a second thickness in second regions, wherein the first thickness<the second thickness. A substrate having a semiconducting surface is provided. A pad dielectric layer having a thickness?the second thickness is formed on the semiconductor surface including over the second regions, wherein the pad dielectric layer provides at least a portion of the second thickness for the second gate dielectric. A hard mask layer is formed on the semiconductor surface including over the second regions. A plurality of trench isolation regions are formed by etching through the pad dielectric layer and a portion of the semiconductor surface.Type: GrantFiled: December 29, 2008Date of Patent: February 15, 2011Assignee: Texas Instruments IncorporatedInventors: Seetharaman Sridhar, Sameer Pendharkar, Dan M. Mosher
-
Patent number: 7883973Abstract: A method is provided of forming a semiconductor device. A substrate is provided having a dielectric layer formed thereover. The dielectric layer covers a protected region of the substrate, and has a first opening exposing a first unprotected region of the substrate. A first dopant is implanted into the first unprotected region through the first opening in the dielectric layer, and into the protected region through the dielectric layer.Type: GrantFiled: December 16, 2008Date of Patent: February 8, 2011Assignee: Texas Instruments IncorporatedInventors: Seetharaman Sridar, Marie Denison, Sameer Pendharkar
-
Publication number: 20100314670Abstract: An integrated circuit on a (100) substrate containing an n-channel extended drain MOS transistor with drift region current flow oriented in the <100> direction with stressor RESURF trenches in the drift region. The stressor RESURF trenches have stressor elements with more than 100 MPa compressive stress. An integrated circuit on a (100) substrate containing an n-channel extended drain MOS transistor with drift region current flow oriented in the <110> direction with stressor RESURF trenches in the drift region. The stressor RESURF trenches have stressor elements with more than 100 MPa compressive stress. An integrated circuit on a (100) substrate containing a p-channel extended drain MOS transistor with drift region current flow oriented in a <110> direction with stressor RESURF trenches in the drift region. The stressor RESURF trenches have stressor elements with more than 100 MPa tensile stress.Type: ApplicationFiled: May 27, 2010Publication date: December 16, 2010Applicant: TEXAS INSTRUMENTS INCORPORATEDInventors: Marie Denison, Seetharaman Sridhar, Sameer Pendharkar, Umamaheswari Aghoram
-
Patent number: 7847351Abstract: A semiconductor device comprising source and drain regions and insulating region and a plate structure. The source and drain regions are on or in a semiconductor substrate. The insulating region is on or in the semiconductor substrate and located between the source and drain regions. The insulating region has a thin layer and a thick layer. The thick layer includes a plurality of insulating stripes that are separated from each other and that extend across a length between the source and the drain regions. The plate structure is located between the source and the drain regions, wherein the plate structure is located on the thin layer and portions of the thick layer, the plate structure having one or more conductive bands that are directly over individual ones of the plurality of insulating stripes.Type: GrantFiled: April 11, 2008Date of Patent: December 7, 2010Assignee: Texas Instruments IncorporatedInventors: Marie Denison, Seetharaman Sridhar, Sameer Pendharkar
-
Publication number: 20100264486Abstract: An electronic device has a plurality of trenches formed in a semiconducting layer. A vertical drift region is located between and adjacent the trenches. An electrode is located within each trench, the electrode having a gate electrode section and a field plate section. A graded field plate dielectric is located between the field plate section and the vertical drift region.Type: ApplicationFiled: April 20, 2009Publication date: October 21, 2010Applicant: Texas Instruments IncorporatedInventors: Marie Denison, Sameer Pendharkar, Philip L. Hower, John Lin
-
Publication number: 20100252882Abstract: An integrated circuit containing an MOS transistor with a trenched gate abutting an isolation dielectric layer over a drift region. The body well and source diffused region overlap the bottom surface of the gate trench. An integrated circuit containing an MOS transistor with a first trenched gate abutting an isolation dielectric layer over a drift region, and a second trenched gate located over a heavily doped buried layer. The buried layer is the same conductivity type as the drift region. A process of forming an integrated circuit containing an MOS transistor, which includes an isolation dielectric layer over a drift region of a drain of the transistor, and a gate formed in a gate trench which abuts the isolation dielectric layer. The gate trench is formed by removing substrate material adjacent to the isolation dielectric layer.Type: ApplicationFiled: April 3, 2009Publication date: October 7, 2010Applicant: Texas Instruments IncorporatedInventors: Marie Denison, Sameer Pendharkar, Binghua Hu, Taylor Rice Efland, Sridhar Seetharaman
-
Publication number: 20100241413Abstract: A processor with a computer program product embodied thereon for modeling an LDMOS transistor having a drift region is provided. Characteristic behavior of a CMOS transistor with its body coupled to its source is generated, and characteristic behavior of a resistor is generated, where the resistor is coupled to the drain of the CMOS transistor. Then to account for impact ionization, an impact ionization current for electrons in the drift region an impact ionization current for holes in the drift region are calculated.Type: ApplicationFiled: March 18, 2009Publication date: September 23, 2010Applicant: Texas Instruments IncorporatedInventors: Yong Liu, Keith R. Green, Sameer Pendharkar
-
Patent number: 7772075Abstract: A LDMOS transistor having a channel region located between an outer boundary of an n-type region and an inner boundary of a p-body region. A width of the LDMOS channel region is less than 80% of a distance between an outer boundary of an n+-type region and the inner boundary of a p-body region. Also, a method for making a LDMOS transistor where the n-type dopants are implanted at an angle that is greater than an angle used to implant the p-type dopants. Furthermore, a VDMOS having first and second channel regions located between an inner boundary of a first and second p-body region and an outer boundary of an n-type region of the first and second p-body regions. The width of the first and second channel regions of the VDMOS is less than 80% of a distance between the inner boundary of the first and second p-body regions and an outer boundary of an n+-type region of the first and second p-body regions.Type: GrantFiled: July 27, 2009Date of Patent: August 10, 2010Assignee: Texas Instruments IncorporatedInventors: Sameer Pendharkar, Binghua Hu