Patents by Inventor Shih-Wei Lin

Shih-Wei Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210294130
    Abstract: In some embodiments, the present disclosure relates to a modulator device that includes an input terminal configured to receive impingent light. A first waveguide has a first output region and a first input region that is coupled to the input terminal. A second waveguide is optically coupled to the first waveguide and has second input region and a second output region that is coupled to the input terminal. An output terminal coupled to the first output region of the first waveguide and the second output region of the second waveguide is configured to provide outgoing light that is modulated. A heater structure is configured to provide heat to the first waveguide to induce a temperature difference between the first and second waveguides. A gas-filled isolation structure is proximate to the heater structure and is configured to thermally isolate the second waveguide from the heat provided to the first waveguide.
    Type: Application
    Filed: March 17, 2020
    Publication date: September 23, 2021
    Inventors: Shih-Wei Lin, Ming Chyi Liu
  • Publication number: 20210271024
    Abstract: A semiconductor device is provided. The semiconductor device includes a waveguide over a substrate. The semiconductor device includes a first dielectric structure over the substrate, wherein a portion of the waveguide is in the first dielectric structure. The semiconductor device includes a second dielectric structure under the waveguide, wherein a first sidewall of the second dielectric structure is adjacent a first sidewall of the substrate.
    Type: Application
    Filed: February 27, 2020
    Publication date: September 2, 2021
    Inventors: Yi-Chen CHEN, Lee-Chuan TSENG, Shih-Wei LIN
  • Patent number: 11097941
    Abstract: A method includes forming a recess in a first substrate, bonding a micro-electro-mechanical systems (MEMS) substrate to the first substrate after forming the recess in the first substrate, forming an anti-stiction layer over the micro-electro-mechanical systems (MEMS) substrate, pattering the anti-stiction layer, etching the MEMS substrate to form a MEMS device, and bonding the MEMS device and the first substrate to a second substrate. The patterned anti-stiction layer is between the MEMS device and the second substrate.
    Type: Grant
    Filed: April 29, 2019
    Date of Patent: August 24, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Hsien Chang, Tzu-Heng Wu, Chun-Ren Cheng, Shih-Wei Lin, Jung-Kuo Tu
  • Publication number: 20210247633
    Abstract: A semiconductor device is provided. The semiconductor device includes a silicon nitride waveguide in a first dielectric layer over a substrate. The semiconductor device includes a semiconductor waveguide in a second dielectric layer over the first dielectric layer. The first dielectric layer including the silicon nitride waveguide is between the second dielectric layer including the semiconductor waveguide and the substrate.
    Type: Application
    Filed: February 11, 2020
    Publication date: August 12, 2021
    Inventors: Yi-Chen Chen, Ming Chyi Liu, Shih-Wei Lin
  • Patent number: 11058733
    Abstract: The present invention provides a Bifidobacterium lactis having active substances, a composition comprising the same, and a method of promoting longevity using the same by subjecting the composition to a subject, thereby increasing Cisd2 gene expression, reducing damage of mitochondria, delaying aging-related symptoms including nerve degeneration and sarcopenia, and so on.
    Type: Grant
    Filed: August 16, 2019
    Date of Patent: July 13, 2021
    Assignee: GRAPE KING BIO LTD
    Inventors: Chin-Chu Chen, Yen-Lien Chen, Shih-Wei Lin, Yen-Po Chen, Ci-Sian Wang, Yu-Hsin Hou, Yang-Tzu Shih, Ching-Wen Lin, Ya-Jyun Chen, Jia-Lin Jiang
  • Publication number: 20210135024
    Abstract: Various embodiments of the present disclosure are directed towards a semiconductor device. The semiconductor device includes a first doped region having a first doping type disposed in a semiconductor substrate. A second doped region having a second doping type different than the first doping type is disposed in the semiconductor substrate and laterally spaced from the first doped region. A waveguide structure is disposed in the semiconductor substrate and laterally between the first doped region and the second doped region. A photodetector is disposed at least partially in the semiconductor substrate and laterally between the first doped region and the second doped region. The waveguide structure is configured to guide one or more photons into the photodetector. The photodetector has an upper surface that continuously arcs between opposite sidewalls of the photodetector. The photodetector has a lower surface that continuously arcs between the opposite sidewalls of the photodetector.
    Type: Application
    Filed: June 24, 2020
    Publication date: May 6, 2021
    Inventors: Chen-Hao Chiang, Shih-Wei Lin, Eugene I-Chun Chen, Yi-Chen Chen
  • Publication number: 20210132462
    Abstract: Various embodiments of the present disclosure are directed towards a modulator device including a first waveguide and a heater structure. An input terminal is configured to receive impingent light. The first waveguide has a first output region and a first input region coupled to the input terminal. A second waveguide is optically coupled to the first waveguide. The second waveguide has a second output region and a second input region coupled to the input terminal. An output terminal is configured to provide outgoing light that is modulated based on the impingent light. The output terminal is coupled to the first output region and the second output region. The heater structure overlies the first waveguide. A bottom surface of the heater structure is aligned with a bottom surface of the first waveguide. The first waveguide is spaced laterally between sidewalls of the heater structure.
    Type: Application
    Filed: January 3, 2020
    Publication date: May 6, 2021
    Inventors: Shih-Wei Lin, Ming Chyi Liu
  • Publication number: 20200409238
    Abstract: In accordance with some embodiments, a method of forming an auto-focusing device is provided. The method includes forming a cantilever beam member. The cantilever beam member has a ring shape. The method further includes forming a piezoelectric member over the cantilever beam member. The method also includes forming a membrane over the cantilever beam member. The membrane has a first region and a second region. The first region has a planar surface, and the second region is located between the first region and an inner edge of the cantilever beam member and has a plurality of corrugation structures. In addition, the method includes applying a liquid optical medium over the membrane and sealing the liquid optical medium with a protection layer.
    Type: Application
    Filed: April 16, 2020
    Publication date: December 31, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ting-Jung CHEN, Shih-Wei LIN
  • Publication number: 20200369511
    Abstract: The present disclosure relates to a microphone. In some embodiments, the microphone may comprise a diaphragm, a backplate, and a sidewall stopper. The diaphragm has a venting hole disposed therethrough. The backplate is disposed over and spaced apart from the diaphragm. The sidewall stopper is disposed along a sidewall of the diaphragm exposing to the venting hole. Thus, the sidewall stopper is not limited by a distance between the movable part and the stable part of the microphone. Also, the sidewall stopper does not alternate the shape of movable part, and thus will less likely introduce crack to the movable part. In some embodiments, the sidewall stopper may be formed like a sidewall stopper by a self-alignment process, such that no extra mask is needed.
    Type: Application
    Filed: August 11, 2020
    Publication date: November 26, 2020
    Inventors: Shih-Wei Lin, Chang-Ming Wu, Ting-Jung Chen
  • Publication number: 20200369512
    Abstract: The present disclosure relates to a method of manufacturing a MEMS device. In some embodiments, a first interlayer dielectric layer is formed over a substrate, and a diaphragm is formed over the first interlayer dielectric layer. Then, a second interlayer dielectric layer is formed over the diaphragm. A first etch is performed to form an opening through the second interlayer dielectric layer and the diaphragm and reaching into an upper portion of the first interlayer dielectric layer. A second etch is performed to the first interlayer dielectric layer and the second interlayer dielectric layer to form recesses above and below the diaphragm and to respectively expose a portion of a top surface and a portion of a bottom surface of the diaphragm. A sidewall stopper is formed along a sidewall of the diaphragm into the recesses of the first interlayer dielectric layer and the second interlayer dielectric layer.
    Type: Application
    Filed: August 11, 2020
    Publication date: November 26, 2020
    Inventors: Shih-Wei Lin, Chang-Ming Wu, Ting-Jung Chen
  • Patent number: 10766763
    Abstract: The present disclosure relates to a microphone. In some embodiments, the microphone may comprise a substrate, a diaphragm, a backplate, and a sidewall stopper. The substrate has an opening disposed through the substrate. The diaphragm is disposed over the substrate and facing the opening of the substrate. The diaphragm has a venting hole overlying the opening of the substrate. A backplate is disposed over and spaced apart from the diaphragm. A sidewall stopper is disposed along a sidewall of the venting hole of the diaphragm and thus is not limited by a distance between the movable part and the stable part. Also, the sidewall stopper does not alternate the shape of movable part, and thus will less likely introduce crack to the movable part. In some embodiments, the sidewall stopper may be formed like a sidewall stopper by a self-alignment process, such that no extra mask is needed.
    Type: Grant
    Filed: April 24, 2019
    Date of Patent: September 8, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shih-Wei Lin, Chang-Ming Wu, Ting-Jung Chen
  • Publication number: 20200155623
    Abstract: The present invention provides a Lactobacillus fermentum GKF3, a composition comprising the strain and their use, in which the aforementioned Lactobacillus fermentum GKF3, deposited with accession numbers of BCRC 910824 and CGMCC 15203, can increase the levels of dopamine or/and serotonin in brain tissues, thereby improving the symptoms of the psychataxia such as decreased focus.
    Type: Application
    Filed: November 6, 2019
    Publication date: May 21, 2020
    Inventors: Chin-Chu CHEN, Yen-Lien CHEN, Shih-Wei LIN, Szu-Yin WU, Yen-Po CHEN, Yu-Hsin HOU, Ci-Sian WANG, Yang-Tzu SHIH, Jia-Lin JIANG
  • Publication number: 20200102209
    Abstract: The present disclosure relates to a microphone. In some embodiments, the microphone may comprise a substrate, a diaphragm, a backplate, and a sidewall stopper. The substrate has an opening disposed through the substrate. The diaphragm is disposed over the substrate and facing the opening of the substrate. The diaphragm has a venting hole overlying the opening of the substrate. A backplate is disposed over and spaced apart from the diaphragm. A sidewall stopper is disposed along a sidewall of the venting hole of the diaphragm and thus is not limited by a distance between the movable part and the stable part. Also, the sidewall stopper does not alternate the shape of movable part, and thus will less likely introduce crack to the movable part. In some embodiments, the sidewall stopper may be formed like a sidewall stopper by a self-alignment process, such that no extra mask is needed.
    Type: Application
    Filed: April 24, 2019
    Publication date: April 2, 2020
    Inventors: Shih-Wei Lin, Chang-Ming Wu, Ting-Jung Chen
  • Publication number: 20200054692
    Abstract: The present invention provides a Bifidobacterium lactis having active substances, a composition comprising the same, and a method of promoting longevity using the same by subjecting the composition to a subject, thereby increasing Cisd2 gene expression, reducing damage of mitochondria, delaying aging-related symptoms including nerve degeneration and sarcopenia, and so on.
    Type: Application
    Filed: August 16, 2019
    Publication date: February 20, 2020
    Inventors: Chin-Chu CHEN, Yen-Lien Chen, Shih-Wei LIN, Yen-Po CHEN, Ci-Sian WANG, Yu-Hsin HOU, Yang-TZU SHIH, Ching-Wen LIN, Ya-Jyun CHEN, Jia-Lin JIANG
  • Publication number: 20200025712
    Abstract: The present disclosure provides a biological field effect transistor (BioFET) and a method of fabricating a BioFET device. The method includes forming a BioFET using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process. The BioFET device includes a plurality of micro wells having a sensing gate bottom and a number of stacked well portions. A bottom surface area of a well portion is different from a top surface area of a well portion directly below. The micro wells are formed by multiple etching operations through different materials, including a sacrificial plug, to expose the sensing gate without plasma induced damage.
    Type: Application
    Filed: September 20, 2019
    Publication date: January 23, 2020
    Inventors: Yi-Hsien Chang, Chun-Ren Cheng, Shih-Wei Lin, Yi-Shao Liu
  • Patent number: 10502706
    Abstract: The present disclosure provides a biological field effect transistor (BioFET) and a method of fabricating a BioFET device. The method includes forming a BioFET using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process. The BioFET device includes a plurality of micro wells having a sensing gate bottom and a number of stacked well portions. A bottom surface area of a well portion is different from a top surface area of a well portion directly below. The micro wells are formed by multiple etching operations through different materials, including a sacrificial plug, to expose the sensing gate without plasma induced damage.
    Type: Grant
    Filed: July 27, 2015
    Date of Patent: December 10, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Hsien Chang, Chun-Ren Cheng, Shih-Wei Lin, Yi-Shao Liu
  • Publication number: 20190256347
    Abstract: A method includes forming a recess in a first substrate, bonding a micro-electro-mechanical systems (MEMS) substrate to the first substrate after forming the recess in the first substrate, forming an anti-stiction layer over the micro-electro-mechanical systems (MEMS) substrate, pattering the anti-stiction layer, etching the MEMS substrate to form a MEMS device, and bonding the MEMS device and the first substrate to a second substrate. The patterned anti-stiction layer is between the MEMS device and the second substrate.
    Type: Application
    Filed: April 29, 2019
    Publication date: August 22, 2019
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Hsien CHANG, Tzu-Heng WU, Chun-Ren CHENG, Shih-Wei LIN, Jung-Kuo TU
  • Patent number: 10354972
    Abstract: Hybrid bonding systems and methods for semiconductor wafers are disclosed. In one embodiment, a hybrid bonding system for semiconductor wafers includes a chamber and a plurality of sub-chambers disposed within the chamber. A robotics handler is disposed within the chamber that is adapted to move a plurality of semiconductor wafers within the chamber between the plurality of sub-chambers. The plurality of sub-chambers includes a first sub-chamber adapted to remove a protection layer from the plurality of semiconductor wafers, and a second sub-chamber adapted to activate top surfaces of the plurality of semiconductor wafers prior to hybrid bonding the plurality of semiconductor wafers together. The plurality of sub-chambers also includes a third sub-chamber adapted to align the plurality of semiconductor wafers and hybrid bond the plurality of semiconductor wafers together.
    Type: Grant
    Filed: October 15, 2018
    Date of Patent: July 16, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Ping-Yin Liu, Shih-Wei Lin, Xin-Hua Huang, Lan-Lin Chao, Chia-Shiung Tsai
  • Patent number: 10283700
    Abstract: A semiconductor memory structure is provided. The semiconductor memory structure includes a bottom electrode formed over a substrate and a magnetic tunneling junction (MTJ) cell formed over the bottom electrode. The semiconductor memory structure also includes a top electrode formed over the MTJ cell; and a first sidewall spacer layer formed on a top surface of the MTJ cell and an outer sidewall surface of the top electrode.
    Type: Grant
    Filed: June 20, 2017
    Date of Patent: May 7, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Wei Lin, Yuan-Tai Tseng, Shih-Chang Liu
  • Patent number: 10273140
    Abstract: A substrate structure for a micro electro mechanical system (MEMS) device, a semiconductor structure and a method for fabricating the same are provided. In various embodiments, the substrate structure for the MEMS device includes a substrate, the MEMS device, and an anti-stiction layer. The MEMS device is over the substrate. The anti-stiction layer is on a surface of the MEMS device, and includes amorphous carbon, polytetrafluoroethene, hafnium oxide, tantalum oxide, zirconium oxide, or a combination thereof.
    Type: Grant
    Filed: January 16, 2015
    Date of Patent: April 30, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Hsien Chang, Tzu-Heng Wu, Chun-Ren Cheng, Shih-Wei Lin, Jung-Kuo Tu