Patents by Inventor Tsung-Yu Yang

Tsung-Yu Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240088125
    Abstract: Devices and methods of manufacture for a deep trench layout area-saving semiconductor structure for use with bipolar-CMOS-DMOS (BCD) devices. A semiconductor device may comprise a first BCD device formed within a first perimeter of a first BCD layout area, and a deep trench isolation structure defining the first perimeter of the first BCD layout area, in which the deep trench isolation structure may comprise a first rounded corner that may define a first corner of the first BCD layout area. A semiconductor device may comprise, a substrate, BCD device formed on the substrate, and a deep trench isolation structure laterally surrounding the BCD device. The deep trench isolation structure, with respect to a top-down view, may comprise vertical portions, horizontal portions, a “T”-shaped intersection connecting at least one vertical portion and at least one horizontal portion, and a cross-shaped intersection connecting two vertical portions and two horizontal portions.
    Type: Application
    Filed: November 16, 2023
    Publication date: March 14, 2024
    Inventors: Tsung-Yu YANG, Po-Wei LIU
  • Publication number: 20240055361
    Abstract: A method for forming alignment keys of a semiconductor structure includes: forming an oxide pad layer and a passivation layer on a substrate; forming a patterned photoresist layer on the passivation layer, and using the patterned photoresist layer as a mask to remove part of the oxide pad layer and passivation layer and expose the substrate surface in the medium voltage and alignment mark regions; forming oxide portions on the exposed substrate surface, and the oxide portions extending into the first depth of the substrate; forming deep doped wells in the low voltage and medium voltage regions; thinning the oxide portions; forming high-voltage doped wells in the high voltage and alignment mark regions; performing an etching process on the high voltage and alignment mark regions to form a second trench, as an alignment key, having a second depth greater than the first depth in the alignment mark region.
    Type: Application
    Filed: September 26, 2022
    Publication date: February 15, 2024
    Inventors: TSUNG-YU YANG, Shin-Hung Li, Shan-shi Huang, Ruei Jhe Tsao, Che-Hua Chang, YUAN YU CHUNG
  • Patent number: 11894425
    Abstract: A method of forming a semiconductor arrangement includes forming a gate dielectric layer over a semiconductor layer. A gate electrode layer is formed over the gate dielectric layer. A first gate mask is formed over the gate electrode layer. The gate electrode layer is etched using the first gate mask as an etch template to form a first gate electrode. A first dopant is implanted into the semiconductor layer using the first gate mask and the first gate electrode as an implantation template to form a first doped region in the semiconductor layer.
    Type: Grant
    Filed: February 6, 2023
    Date of Patent: February 6, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Yun-Chi Wu, Tsung-Yu Yang, Cheng-Bo Shu, Chien Hung Liu
  • Publication number: 20240021601
    Abstract: Devices and methods of manufacture for a deep trench layout area-saving semiconductor structure for use with bipolar-CMOS-DMOS (BCD) devices. A semiconductor device may comprise a first BCD device formed within a first perimeter of a first BCD layout area, and a deep trench isolation structure defining the first perimeter of the first BCD layout area, in which the deep trench isolation structure may comprise a first rounded corner that may define a first corner of the first BCD layout area. A semiconductor device may comprise, a substrate, BCD device formed on the substrate, and a deep trench isolation structure laterally surrounding the BCD device. The deep trench isolation structure, with respect to a top-down view, may comprise vertical portions, horizontal portions, a “T”-shaped intersection connecting at least one vertical portion and at least one horizontal portion, and a cross-shaped intersection connecting two vertical portions and two horizontal portions.
    Type: Application
    Filed: July 25, 2023
    Publication date: January 18, 2024
    Inventors: Tsung-Yu YANG, Po-Wei LIU
  • Patent number: 11855071
    Abstract: Devices and methods of manufacture for a deep trench layout area-saving semiconductor structure for use with bipolar-CMOS-DMOS (BCD) devices. A semiconductor device may comprise a first BCD device formed within a first perimeter of a first BCD layout area, and a deep trench isolation structure defining the first perimeter of the first BCD layout area, in which the deep trench isolation structure may comprise a first rounded corner that may define a first corner of the first BCD layout area. A semiconductor device may comprise, a substrate, BCD device formed on the substrate, and a deep trench isolation structure laterally surrounding the BCD device. The deep trench isolation structure, with respect to a top-down view, may comprise vertical portions, horizontal portions, a “T”-shaped intersection connecting at least one vertical portion and at least one horizontal portion, and a cross-shaped intersection connecting two vertical portions and two horizontal portions.
    Type: Grant
    Filed: September 21, 2021
    Date of Patent: December 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Tsung-Yu Yang, Po-Wei Liu
  • Patent number: 11854942
    Abstract: A semiconductor arrangement includes a first dielectric feature passing through a semiconductive layer and a first dielectric layer over a substrate. The semiconductor arrangement includes a conductive feature passing through the semiconductive layer and the first dielectric layer and electrically coupled to the substrate. The conductive feature is adjacent the first dielectric feature and electrically isolated from the semiconductive layer by the first dielectric feature.
    Type: Grant
    Filed: November 29, 2021
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Josh Lin, Chung-Jen Huang, Yun-Chi Wu, Tsung-Yu Yang
  • Patent number: 11810300
    Abstract: This application provides a method for detecting images of testing object using hyperspectral imaging. Firstly, obtaining a hyperspectral imaging information according to a reference image, hereby, obtaining corresponded hyperspectral image from an input image and obtaining corresponded feature values for operating Principal components analysis to simplify feature values. Then, obtaining feature images by Convolution kernel, and then positioning an image of an object under detected by a default box and a boundary box from the feature image. By Comparing with the esophageal cancer sample image, the image of the object under detected is classifying to an esophageal cancer image or a non-esophageal cancer image. Thus, detecting an input image from the image capturing device by the convolutional neural network to judge if the input image is the esophageal cancer image for helping the doctor to interpret the image of the object under detected.
    Type: Grant
    Filed: August 5, 2021
    Date of Patent: November 7, 2023
    Assignee: National Chung Cheng University
    Inventors: Hsiang-Chen Wang, Tsung-Yu Yang, Yu-Sheng Chi, Ting-Chun Men
  • Patent number: 11798836
    Abstract: A semiconductor isolation structure includes a silicon-on-insulator wafer, a first deep trench isolation structure and a second deep trench isolation structure. The silicon-on-insulator wafer includes a semiconductor substrate, a buried insulation layer disposed on the semiconductor substrate, and a semiconductor layer disposed on the buried insulation layer. The semiconductor layer has a functional region. The first deep trench isolation structure penetrates the semiconductor layer and the buried insulation layer, and surrounds the functional region. The second deep trench isolation structure penetrates semiconductor layer and the buried insulation layer, and surrounds the first deep trench isolation structure.
    Type: Grant
    Filed: June 17, 2021
    Date of Patent: October 24, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tsung-Yu Yang, Po-Wei Liu, Yun-Chi Wu, Yu-Wen Tseng, Chia-Ta Hsieh, Ping-Cheng Li, Tsung-Hua Yang, Yu-Chun Chang
  • Publication number: 20230335637
    Abstract: A high voltage semiconductor device includes a semiconductor substrate, an isolation structure, a gate oxide layer, and a gate structure. The semiconductor substrate includes a channel region, and at least a part of the isolation structure is disposed in the semiconductor substrate and surrounds the channel region. The gate oxide layer is disposed on the semiconductor substrate, and the gate oxide layer includes a first portion and a second portion. The second portion is disposed at two opposite sides of the first portion in a horizontal direction, and a thickness of the first portion is greater than a thickness of the second portion. The gate structure is disposed on the gate oxide layer and the isolation structure.
    Type: Application
    Filed: April 27, 2023
    Publication date: October 19, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Tsung-Yu Yang, Shin-Hung Li, Nien-Chung LI, Chang-Po Hsiung
  • Publication number: 20230335638
    Abstract: A high voltage semiconductor device includes a semiconductor substrate, an isolation structure, a gate oxide layer, and a gate structure. The semiconductor substrate includes a channel region, and at least a part of the isolation structure is disposed in the semiconductor substrate and surrounds the channel region. The gate oxide layer is disposed on the semiconductor substrate, and the gate oxide layer includes a first portion and a second portion. The second portion is disposed at two opposite sides of the first portion in a horizontal direction, and a thickness of the first portion is greater than a thickness of the second portion. The gate structure is disposed on the gate oxide layer and the isolation structure.
    Type: Application
    Filed: April 27, 2023
    Publication date: October 19, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Tsung-Yu Yang, Shin-Hung Li, Nien-Chung Li, Chang-Po Hsiung
  • Patent number: 11774392
    Abstract: A chip crack detection structure, including a substrate, a first chip crack detection ring, a second chip crack detection ring, and a seal ring, is provided. The first chip crack detection ring includes multiple first conductive layers stacked over the substrate and electrically connected to each other. A bottom surface of a lowermost conductive layer among the first conductive layers is not in contact with any plug. The second chip crack detection ring surrounds the first chip crack detection ring. The second chip crack detection ring includes multiple second conductive layers stacked over the substrate and electrically connected to each other. A bottom surface of a lowermost conductive layer among the second conductive layers is not in contact with any plug. The seal ring surrounds the second chip crack detection ring. The seal ring includes multiple third conductive layers stacked over the substrate and electrically connected to each other.
    Type: Grant
    Filed: March 23, 2022
    Date of Patent: October 3, 2023
    Assignee: United Microelectronics Corp.
    Inventors: Tsong-Lin Shen, Tsung-Yu Yang
  • Publication number: 20230296944
    Abstract: An electronic device including a panel is provided. The panel includes a first substrate, a second substrate opposite to the first substrate, a medium layer disposed between the first substrate and the second substrate, a sealant disposed between the first substrate and the second substrate and surrounding the medium layer, a plurality of first electrodes disposed between the first substrate and the medium layer, and a plurality of connecting lines disposed between the second substrate and the first electrodes. The sealant includes a plurality of conductive particles. The first electrodes are electrically connected to the connection lines through the conductive particles. There is a first space S1 between two adjacent connecting lines of the connecting lines. One of the conductive particles has a width of W. The first space S1 and the width W conform to the following formula: 3<S1/W<20.
    Type: Application
    Filed: February 15, 2023
    Publication date: September 21, 2023
    Inventors: Tsung-Yu YANG, Ming-Huang CHEN, Shu-Fen LI, Chuan-Chi CHIEN, I-An YAO, Jui-Chu LAI
  • Publication number: 20230280298
    Abstract: A chip crack detection structure, including a substrate, a first chip crack detection ring, a second chip crack detection ring, and a seal ring, is provided. The first chip crack detection ring includes multiple first conductive layers stacked over the substrate and electrically connected to each other. A bottom surface of a lowermost conductive layer among the first conductive layers is not in contact with any plug. The second chip crack detection ring surrounds the first chip crack detection ring. The second chip crack detection ring includes multiple second conductive layers stacked over the substrate and electrically connected to each other. A bottom surface of a lowermost conductive layer among the second conductive layers is not in contact with any plug. The seal ring surrounds the second chip crack detection ring. The seal ring includes multiple third conductive layers stacked over the substrate and electrically connected to each other.
    Type: Application
    Filed: March 23, 2022
    Publication date: September 7, 2023
    Applicant: United Microelectronics Corp.
    Inventors: Tsong-Lin Shen, Tsung-Yu Yang
  • Publication number: 20230275131
    Abstract: A method for eliminating divot formation includes forming an isolation layer; forming a conduction layer which has an upper inclined boundary with the isolation layer such that the conduction layer has a portion located above a portion of the isolation layer at the upper inclined boundary; etching back the isolation layer; and etching back the conduction layer after etching back the isolation layer such that a top surface of the etched conduction layer is located at a level lower than a top surface of the etched isolation layer.
    Type: Application
    Filed: May 3, 2023
    Publication date: August 31, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Wen TSENG, Po-Wei LIU, Hung-Ling SHIH, Tsung-Yu YANG, Tsung-Hua YANG, Yu-Chun CHANG
  • Publication number: 20230197843
    Abstract: A semiconductor device includes a semiconductor substrate, a gate structure, a first drift region, a first source/drain region, and a gate oxide layer. The gate structure and the gate oxide layer are disposed on the semiconductor substrate. The first drift region is disposed in the semiconductor substrate. The first source/drain region is disposed in the first drift region. At least a part of a first portion of the gate oxide layer is disposed between the gate structure and the semiconductor substrate in a vertical direction. A second portion of the gate oxide layer is disposed between the first portion and the first source/drain region in a horizontal direction. The second portion includes a bottom extending downwards and a first concave top surface located above the bottom. A part of the first drift region is located under the first portion and the second portion of the gate oxide layer.
    Type: Application
    Filed: January 18, 2022
    Publication date: June 22, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Tsung-Yu Yang, Shin-Hung Li, Ruei-Jhe Tsao, Che-Hua Chang
  • Patent number: 11682726
    Abstract: A high voltage semiconductor device includes a semiconductor substrate, an isolation structure, a gate oxide layer, and a gate structure. The semiconductor substrate includes a channel region, and at least a part of the isolation structure is disposed in the semiconductor substrate and surrounds the channel region. The gate oxide layer is disposed on the semiconductor substrate, and the gate oxide layer includes a first portion and a second portion. The second portion is disposed at two opposite sides of the first portion in a horizontal direction, and a thickness of the first portion is greater than a thickness of the second portion. The gate structure is disposed on the gate oxide layer and the isolation structure.
    Type: Grant
    Filed: January 27, 2021
    Date of Patent: June 20, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Tsung-Yu Yang, Shin-Hung Li, Nien-Chung Li, Chang-Po Hsiung
  • Publication number: 20230187499
    Abstract: A method of forming a semiconductor arrangement includes forming a gate dielectric layer over a semiconductor layer. A gate electrode layer is formed over the gate dielectric layer. A first gate mask is formed over the gate electrode layer. The gate electrode layer is etched using the first gate mask as an etch template to form a first gate electrode. A first dopant is implanted into the semiconductor layer using the first gate mask and the first gate electrode as an implantation template to form a first doped region in the semiconductor layer.
    Type: Application
    Filed: February 6, 2023
    Publication date: June 15, 2023
    Inventors: Yun-Chi WU, Tsung-Yu YANG, Cheng-Bo SHU, Chien Hung LIU
  • Publication number: 20230187547
    Abstract: A semiconductor device includes a semiconductor substrate, a trench, and a gate structure. The trench is disposed in the semiconductor substrate. The gate structure is disposed on the semiconductor substrate. The gate structure includes a gate electrode, a first gate oxide layer, and a second gate oxide layer. A first portion of the gate electrode is disposed in the trench, and a second portion of the gate electrode is disposed outside the trench. The first gate oxide layer is disposed between the gate electrode and the semiconductor substrate. At least a portion of the first gate oxide layer is disposed in the trench. The second gate oxide layer is disposed between the second portion of the gate electrode and the semiconductor substrate in a vertical direction. A thickness of the second gate oxide layer is greater than a thickness of the first gate oxide layer.
    Type: Application
    Filed: January 6, 2022
    Publication date: June 15, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Che-Hua Chang, Shin-Hung Li, Tsung-Yu Yang, Ruei-Jhe Tsao
  • Patent number: 11670689
    Abstract: A method for eliminating divot formation includes forming an isolation layer; forming a conduction layer which has an upper inclined boundary with the isolation layer such that the conduction layer has a portion located above a portion of the isolation layer at the upper inclined boundary; etching back the isolation layer; and etching back the conduction layer after etching back the isolation layer such that a top surface of the etched conduction layer is located at a level lower than a top surface of the etched isolation layer.
    Type: Grant
    Filed: September 10, 2021
    Date of Patent: June 6, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Wen Tseng, Po-Wei Liu, Hung-Ling Shih, Tsung-Yu Yang, Tsung-Hua Yang, Yu-Chun Chang
  • Publication number: 20230109273
    Abstract: Some embodiments relate to an integrated chip that includes a first source/drain region and a second source/drain region disposed in a substrate. A plane that is substantially perpendicular to an upper surface of the substrate traverses the first source/drain region and the second source/drain region. Agate electrode extends over a channel region in the substrate between the first source/drain region and the second source/drain region. The gate electrode is separated from the channel region by way of a charge trapping dielectric structure. The charge trapping dielectric structure includes a tunnel dielectric layer, a charge trapping dielectric layer over the tunnel dielectric layer, and a blocking dielectric layer over the charge trapping dielectric layer. The channel region has a channel width measured perpendicularly to the plane, and the tunnel dielectric layer has different thicknesses at different respective points along the channel width.
    Type: Application
    Filed: December 12, 2022
    Publication date: April 6, 2023
    Inventors: Jui-Yu Pan, Cheng-Bo Shu, Chung-Jen Huang, Jing-Ru Lin, Tsung-Yu Yang, Yun-Chi Wu, Yueh-Chieh Chu