Patents by Inventor Tsung-Yu Yang
Tsung-Yu Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10475877Abstract: A multi-terminal inductor and method for forming the multi-terminal inductor are provided. In some embodiments, an interconnect structure is arranged over a semiconductor substrate. A passivation layer is arranged over the interconnect structure. A first magnetic layer is arranged over the passivation layer, and a conductive wire laterally extends from a first input/output (I/O) bond structure at a first location to a second I/O bond structure at a second location. A third I/O bond structure branches off of the conductive wire at a third location between the first location and the second location. A connection between the third I/O bond structure and the first I/O bond structure has a first inductance. Alternatively, a connection between the first I/O bond structure and the second I/O bond structure has a second inductance different than the first inductance.Type: GrantFiled: August 21, 2018Date of Patent: November 12, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ching-Chung Hsu, Chung-Long Chang, Tsung-Yu Yang, Hung-Chi Li, Cheng-Chieh Hsieh, Che-Yung Lin, Grace Chang
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Publication number: 20190189624Abstract: A semiconductor device includes a semiconductor substrate and a pair of memory device structures. The semiconductor substrate includes a common source/drain region and a pair of individual source/drain regions, in which the common source/drain region is between the individual source/drain regions. The memory device structures each corresponds to one of the individual source/drain regions. Each memory device structure includes a trap storage structure, a control gate, a cap structure, and a word line. The trap storage structure is between the common source/drain region and the corresponding individual source/drain region. The control gate is over the trap storage structure. The cap structure is over the control gate, in which the cap structure comprises a nitride layer over the control gate and an oxide layer over the nitride layer. The word line is over the semiconductor substrate and laterally spaced from the control gate.Type: ApplicationFiled: February 11, 2019Publication date: June 20, 2019Inventors: Tsung-Yu Yang, Chung-Jen Huang
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Publication number: 20190164613Abstract: A memory unit includes a substrate and a floating gate memory cell. The floating gate memory cell includes an erase gate structure disposed on the substrate, floating gate structures select gates, a common source and drains. The common source is disposed in the substrate, and the erase gate structure is disposed on the common source. The floating gate structures protrude from recesses of the substrate at two opposite sides of the erase gate structure. A method for controlling the memory unit includes applying an erase gate programming voltage on the erase gate structure, applying a control gate programming voltage on the common source, applying a bit line programming voltage on the drains, and applying word line programming voltage on the select gates, in which the control gate programming voltage is greater than the erase gate programming voltage.Type: ApplicationFiled: October 26, 2018Publication date: May 30, 2019Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yu-Wen TSENG, Tsung-Yu YANG, Chung-Jen HUANG
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Publication number: 20190143470Abstract: A servo tuning device adapted to a multi-axis machine tool at least having two linear axes and a rotation axis used for a moving base and a working platform to move relatively along the two linear axes and the rotation axis. The servo tuning device includes a reflection component, a photoelectric sensor and a processor. The reflection component is configured to be disposed on one of the moving base and the working platform and has a reflection surface. The photoelectric sensor has a light-emitting element and a light-receiving element facing the reflection surface. The photoelectric sensor is configured to be disposed on the other one of the moving base and the working platform. The processor records information of relative movement between the photoelectric sensor and the reflection surface for calculating a loop gain value used for tuning a servo setting of the two linear axes or the rotation axis.Type: ApplicationFiled: December 21, 2017Publication date: May 16, 2019Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Wei-Sheng CHEN, Shih-Chang LIANG, Po-Hsun WU, Yu-Sheng ZENG, Tsung-Yu YANG
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Patent number: 10290722Abstract: A memory device includes a semiconductor substrate having a cell region and a peripheral region surrounding the cell region and a pair of control gate stacks on the cell region. Each of the control gate stacks includes a storage layer and a control gate on the storage layer. The memory device includes at least one high-? metal gate stack disposed on the substrate. The high-? metal gate stack has a metal gate and a high-? dielectric film wrapping around the metal gate, and a top surface of the control gate is lower than a top surface of the metal gate.Type: GrantFiled: October 31, 2016Date of Patent: May 14, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yu-Wen Tseng, Tsung-Yu Yang, Chung-Jen Huang
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Patent number: 10269909Abstract: A memory device includes a substrate and a floating gate memory cell. The floating gate memory cell includes an erase gate structure disposed on the substrate, a first floating gate structure, a second floating gate structure, a first word line, a common source, a second word line, a first spacer and a second spacer. The first floating gate structure and the second floating gate structure are recessed in the substrate at two opposite sides of the erase gate structure. The first word line and the second word line are respectively adjacent to the first floating gate structure and the second floating gate structure. The common source is disposed in the substrate under the erase gate structure. The first word line and the second word line may be metal gates of high-k metal gate structures.Type: GrantFiled: March 28, 2018Date of Patent: April 23, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Tsung-Yu Yang, Chung-Jen Huang
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Patent number: 10269822Abstract: The present disclosure relates to a method of forming an embedded flash memory cell that provides for improved performance by providing for a tunnel dielectric layer having a relatively uniform thickness, and an associated apparatus. The method is performed by forming a charge trapping dielectric structure over a logic region, a control gate region, and a select gate region within a substrate. A first charge trapping dielectric etching process is performed to form an opening in the charge trapping dielectric structure over the logic region, and a thermal gate dielectric layer is formed within the opening. A second charge trapping dielectric etching process is performed to remove the charge trapping dielectric structure over the select gate region. Gate electrodes are formed over the thermal gate dielectric layer and the charge trapping dielectric structure remaining after the second charge trapping dielectric etching process.Type: GrantFiled: November 30, 2016Date of Patent: April 23, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jui-Yu Pan, Cheng-Bo Shu, Chung-Jen Huang, Jing-Ru Lin, Tsung-Yu Yang, Yun-Chi Wu, Yueh-Chieh Chu
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Patent number: 10204917Abstract: In a method for manufacturing a semiconductor device, a cell well, a logic well and a high voltage well are formed in a first, a second and a third regions of a substrate. A first and a second stacked structures are formed on the first and second regions. A first and a second word line wells are formed in the cell well. First spacers are formed on sidewalls of the first and second stacked structures. A first gate oxide layer is formed on the third region and the first and second word line wells. A portion of the first stacked structure is removed to form a first and a second device structures. A second gate oxide layer is formed to cover the first, second and third regions. A first and a second word lines are formed adjacent to the first and second device structures.Type: GrantFiled: January 31, 2017Date of Patent: February 12, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Tsung-Yu Yang, Chung-Jen Huang
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Publication number: 20190043878Abstract: The present disclosure relates to a method of forming an embedded flash memory cell that provides for improved performance by providing for a tunnel dielectric layer having a relatively uniform thickness, and an associated apparatus. The method is performed by forming a charge trapping dielectric structure over a logic region, a control gate region, and a select gate region within a substrate. A first charge trapping dielectric etching process is performed to form an opening in the charge trapping dielectric structure over the logic region, and a thermal gate dielectric layer is formed within the opening. A second charge trapping dielectric etching process is performed to remove the charge trapping dielectric structure over the select gate region. Gate electrodes are formed over the thermal gate dielectric layer and the charge trapping dielectric structure remaining after the second charge trapping dielectric etching process.Type: ApplicationFiled: September 27, 2018Publication date: February 7, 2019Inventors: Jui-Yu Pan, Cheng-Bo Shu, Chung-Jen Huang, Jing-Ru Lin, Tsung-Yu Yang, Yun-Chi Wu, Yueh-Chieh Chu
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Patent number: 10170488Abstract: A semiconductor device includes a substrate and a floating gate memory cell. The floating gate memory cell includes an erase gate structure disposed on the substrate, a first floating gate structure, a second floating gate structure, a first word line, a common source, a second word line, a first spacer and a second spacer. The first floating gate structure and the second floating gate structure are recessed in the substrate at two opposite sides of the erase gate structure. The first word line and the second word line are respectively adjacent to the first floating gate structure and the second floating gate structure. The common source is disposed in the substrate under the erase gate structure. The first spacer and the second spacer are respectively disposed between the first floating gate structure and the first word line and between the second floating gate structure and the second word line.Type: GrantFiled: January 9, 2018Date of Patent: January 1, 2019Assignee: TAIWAN SEMICONDUCTOR MANFACTURING CO., LTD.Inventors: Cheng-Bo Shu, Tsung-Yu Yang, Chung-Jen Huang
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Publication number: 20180354095Abstract: A grinding tool includes a substrate and a plurality of abrasive particles. The substrate has a first and a second surface and a plurality of holes, each of the holes extending through the substrate and respectively having a first and a second opening on the first and second surface, the second opening being larger than the first opening. The abrasive particles are respectively disposed in the holes and attached to the substrate via a plurality of adhesive portions, each of the abrasive particles having a tip protruding outward from the first surface and a remaining part covered with one of the adhesive portions inside the corresponding hole, wherein the first openings of the holes are smaller than the abrasive particles, and the abrasive particles are respectively retained in the holes. Moreover, embodiments described herein include a method of fabricating a grinding tool.Type: ApplicationFiled: June 8, 2018Publication date: December 13, 2018Applicant: Kinik CompanyInventors: Jui-Lin CHOU, I-Tsao LIAO, Tsung-Yu YANG
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Patent number: 10128259Abstract: A method for manufacturing embedded memory using high-?-metal-gate (HKMG) technology is provided. A gate stack is formed on a semiconductor substrate. The gate stack comprises a charge storage film and a control gate overlying the charge storage film. The control gate includes a first material. A gate layer is formed of the first material, and is formed covering the semiconductor substrate and the gate stack. The gate layer is recessed to below a top surface of the gate stack, and subsequently patterned to form a select gate bordering the control gate and to form a logic gate spaced from the select and control gates. An ILD layer is formed between the control, select, and logic gates, and with a top surface that is even with top surfaces of the control, select, and logic gates. The control, select, or logic gate is replaced with a new gate of a second material.Type: GrantFiled: July 17, 2017Date of Patent: November 13, 2018Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tsung-Yu Yang, Chung-Jen Huang, Yun-Chi Wu
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Publication number: 20180288891Abstract: A hinge and an electronic device using the same are disclosed. The hinge includes a fixing member, a shaft member, and a spring member. The fixing member includes a pivoting portion and a fixing portion. The pivoting portion and the fixing portion are respectively fixed to opposite ends of the fixing member. The shaft member is pivotably connected to the pivoting portion. The spring member includes a spring body, a first end, and a second end. The spring body is between the first end and the second end. The first end is fixed to the shaft member. The second end is fixed to the fixing portion. When the shaft member rotates, the shaft member drives the spring body to twist via the first end.Type: ApplicationFiled: March 31, 2017Publication date: October 4, 2018Inventors: Ting-Hsien WANG, Ya-Chen TSENG, Po-Hua CHU, Wei-Ting KUO, Chun-Chi SU, Tsung-Yu YANG
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Patent number: 10090327Abstract: Embodiments for forming a semiconductor device structure are provided. The semiconductor device structure includes a substrate and a buried oxide layer formed over the substrate. An interface layer is formed between the substrate and the buried oxide layer. The semiconductor device structure also includes a silicon layer formed over the buried oxide layer; and a polysilicon layer formed over the substrate and in a deep trench. The polysilicon layer extends through the silicon layer, the buried oxide layer and the interface layer.Type: GrantFiled: January 17, 2014Date of Patent: October 2, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTDInventors: Kuo-Yu Cheng, Keng-Yu Chen, Wei-Kung Tsai, Kuan-Chi Tsai, Tsung-Yu Yang, Chung-Long Chang, Chun-Hung Chen, Chih-Ping Chao
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Publication number: 20180166451Abstract: In a method for manufacturing a semiconductor device, a cell well, a logic well and a high voltage well are formed in a first, a second and a third regions of a substrate. A first and a second stacked structures are formed on the first and second regions. A first and a second word line wells are formed in the cell well. First spacers are formed on sidewalls of the first and second stacked structures. A first gate oxide layer is formed on the third region and the first and second word line wells. A portion of the first stacked structure is removed to form a first and a second device structures. A second gate oxide layer is formed to cover the first, second and third regions. A first and a second word lines are formed adjacent to the first and second device structures.Type: ApplicationFiled: January 31, 2017Publication date: June 14, 2018Inventors: Tsung-Yu Yang, Chung-Jen Huang
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Patent number: 9997527Abstract: In a method for manufacturing a semiconductor device, a logic well and a high voltage well are respectively formed in second and third regions of a substrate. A first device structure and a second device structure are formed on a first region of the substrate, third and fourth device structures are respectively formed on the logic well and the high voltage well. A first word line Vt, a source side junction, and a second word line Vt are formed adjacent to the first device structure, between the first device structure and the second device structure, and adjacent to the second device structure. The fourth device structure is removed. A source line junction is formed in the source side junction. The third device structure is removed. First word line and second word lines are respectively formed on the first word line Vt and the second word line Vt.Type: GrantFiled: January 3, 2017Date of Patent: June 12, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Cheng-Bo Shu, Tsung-Yu Yang, Chung-Jen Huang
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Publication number: 20180151754Abstract: A memory device and an operation method thereof are provided. The memory device includes a semiconductor substrate and an oxide-nitride-oxide (ONO) gate structure located on the semiconductor substrate. The ONO gate structure includes a bottom oxide layer, a top oxide layer and a nitride layer. The nitride layer is located between the bottom oxide layer and the top oxide layer. The bottom oxide layer is located closer to the semiconductor substrate than the top oxide layer. The bottom oxide layer has a first thickness, and the top oxide layer has a second thickness smaller the first thickness. The operation method includes an erasing operation and a programming operation. Electrons are attracted into the ONO gate structure through the bottom oxide layer in the programming operation. Electrons trapped in the ONO gate structure escape from the ONO gate structure through the top oxide layer.Type: ApplicationFiled: January 31, 2017Publication date: May 31, 2018Inventors: Tsung-Yu Yang, Chung-Jen Huang
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Publication number: 20180151753Abstract: A semiconductor device includes a substrate, a trap storage structure, a control gate, a cap structure, a word line well, a source line, spacers, a gap oxide layer, a word line and a gate oxide layer. The trap storage structure includes a first oxide layer, a nitride layer and a second oxide layer stacked on the substrate. The control gate is directly on the trap storage structure. The cap structure is stacked on the control gate to form a stacked structure. The word line well and the source line are disposed in the substrate at opposite sides of the stacked structure. The spacers are on sidewalls of the stacked structure. The gap oxide layer is on a sidewall of one spacer. The word line is on the word line well and the gap oxide layer. The gate oxide layer is between the word line and the word line well.Type: ApplicationFiled: December 14, 2016Publication date: May 31, 2018Inventors: Tsung-Yu Yang, Chung-Jen Huang
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Publication number: 20180151585Abstract: In a method for manufacturing a semiconductor device, a logic well and a high voltage well are respectively formed in second and third regions of a substrate. A first device structure and a second device structure are formed on a first region of the substrate, third and fourth device structures are respectively formed on the logic well and the high voltage well. A first word line Vt, a source side junction, and a second word line Vt are formed adjacent to the first device structure, between the first device structure and the second device structure, and adjacent to the second device structure. The fourth device structure is removed. A source line junction is formed in the source side junction. The third device structure is removed. First word line and second word lines are respectively formed on the first word line Vt and the second word line Vt.Type: ApplicationFiled: January 3, 2017Publication date: May 31, 2018Inventors: Cheng-Bo Shu, Tsung-Yu Yang, Chung-Jen Huang
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Publication number: 20180151586Abstract: A storage device includes a semiconductor substrate, a control gate, a word line, a dielectric layer, a charge storage nitride layer, and a blocking layer. The semiconductor substrate has a source region and a drain region. The control gate and a word line are disposed over the semiconductor substrate and located between the source and drain regions. The dielectric layer is in contact with the semiconductor substrate and disposed between the semiconductor substrate, the control gate, and the word line. The charge storage nitride layer is disposed between the dielectric layer and the control gate. The blocking layer is disposed between the charge storage nitride layer and the control gate.Type: ApplicationFiled: February 9, 2017Publication date: May 31, 2018Inventors: Yung-Chun Tu, Tsung-Yu Yang, Chung-Jen Huang