Patents by Inventor Tsung-Yu Yang

Tsung-Yu Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9997527
    Abstract: In a method for manufacturing a semiconductor device, a logic well and a high voltage well are respectively formed in second and third regions of a substrate. A first device structure and a second device structure are formed on a first region of the substrate, third and fourth device structures are respectively formed on the logic well and the high voltage well. A first word line Vt, a source side junction, and a second word line Vt are formed adjacent to the first device structure, between the first device structure and the second device structure, and adjacent to the second device structure. The fourth device structure is removed. A source line junction is formed in the source side junction. The third device structure is removed. First word line and second word lines are respectively formed on the first word line Vt and the second word line Vt.
    Type: Grant
    Filed: January 3, 2017
    Date of Patent: June 12, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Bo Shu, Tsung-Yu Yang, Chung-Jen Huang
  • Publication number: 20180151753
    Abstract: A semiconductor device includes a substrate, a trap storage structure, a control gate, a cap structure, a word line well, a source line, spacers, a gap oxide layer, a word line and a gate oxide layer. The trap storage structure includes a first oxide layer, a nitride layer and a second oxide layer stacked on the substrate. The control gate is directly on the trap storage structure. The cap structure is stacked on the control gate to form a stacked structure. The word line well and the source line are disposed in the substrate at opposite sides of the stacked structure. The spacers are on sidewalls of the stacked structure. The gap oxide layer is on a sidewall of one spacer. The word line is on the word line well and the gap oxide layer. The gate oxide layer is between the word line and the word line well.
    Type: Application
    Filed: December 14, 2016
    Publication date: May 31, 2018
    Inventors: Tsung-Yu Yang, Chung-Jen Huang
  • Publication number: 20180151754
    Abstract: A memory device and an operation method thereof are provided. The memory device includes a semiconductor substrate and an oxide-nitride-oxide (ONO) gate structure located on the semiconductor substrate. The ONO gate structure includes a bottom oxide layer, a top oxide layer and a nitride layer. The nitride layer is located between the bottom oxide layer and the top oxide layer. The bottom oxide layer is located closer to the semiconductor substrate than the top oxide layer. The bottom oxide layer has a first thickness, and the top oxide layer has a second thickness smaller the first thickness. The operation method includes an erasing operation and a programming operation. Electrons are attracted into the ONO gate structure through the bottom oxide layer in the programming operation. Electrons trapped in the ONO gate structure escape from the ONO gate structure through the top oxide layer.
    Type: Application
    Filed: January 31, 2017
    Publication date: May 31, 2018
    Inventors: Tsung-Yu Yang, Chung-Jen Huang
  • Publication number: 20180151585
    Abstract: In a method for manufacturing a semiconductor device, a logic well and a high voltage well are respectively formed in second and third regions of a substrate. A first device structure and a second device structure are formed on a first region of the substrate, third and fourth device structures are respectively formed on the logic well and the high voltage well. A first word line Vt, a source side junction, and a second word line Vt are formed adjacent to the first device structure, between the first device structure and the second device structure, and adjacent to the second device structure. The fourth device structure is removed. A source line junction is formed in the source side junction. The third device structure is removed. First word line and second word lines are respectively formed on the first word line Vt and the second word line Vt.
    Type: Application
    Filed: January 3, 2017
    Publication date: May 31, 2018
    Inventors: Cheng-Bo Shu, Tsung-Yu Yang, Chung-Jen Huang
  • Publication number: 20180151586
    Abstract: A storage device includes a semiconductor substrate, a control gate, a word line, a dielectric layer, a charge storage nitride layer, and a blocking layer. The semiconductor substrate has a source region and a drain region. The control gate and a word line are disposed over the semiconductor substrate and located between the source and drain regions. The dielectric layer is in contact with the semiconductor substrate and disposed between the semiconductor substrate, the control gate, and the word line. The charge storage nitride layer is disposed between the dielectric layer and the control gate. The blocking layer is disposed between the charge storage nitride layer and the control gate.
    Type: Application
    Filed: February 9, 2017
    Publication date: May 31, 2018
    Inventors: Yung-Chun Tu, Tsung-Yu Yang, Chung-Jen Huang
  • Publication number: 20180138317
    Abstract: A memory device includes a semiconductor substrate and a pair of control gate stacks on the cell region. Each of the control gate stacks includes a storage layer and a control gate on the storage layer. The memory device includes at least one high-? metal gate stack disposed on the substrate. The high-? metal gate stack has a metal gate and a top surface of the control gate is lower than a top surface of the metal gate. The storage layer includes two oxide layers and a nitride layer, and the nitride layer is interposed in between the two oxide layers.
    Type: Application
    Filed: November 17, 2016
    Publication date: May 17, 2018
    Inventors: Jing-Ru Lin, Cheng-Bo Shu, Tsung-Yu Yang, Chung-Jen Huang
  • Publication number: 20180122818
    Abstract: A memory device includes a semiconductor substrate having a cell region and a peripheral region surrounding the cell region and a pair of control gate stacks on the cell region. Each of the control gate stacks includes a storage layer and a control gate on the storage layer. The memory device includes at least one high-? metal gate stack disposed on the substrate. The high-? metal gate stack has a metal gate and a high-? dielectric film wrapping around the metal gate, and a top surface of the control gate is lower than a top surface of the metal gate.
    Type: Application
    Filed: October 31, 2016
    Publication date: May 3, 2018
    Inventors: Yu-Wen Tseng, Tsung-Yu Yang, Chung-Jen Huang
  • Patent number: 9799755
    Abstract: A method for manufacturing a memory device includes forming trenches in a substrate to define an active region, filling an insulation material in the trenches, treating at least one portion of the insulation material, removing an upper portion of the insulation material from the trenches, so as to expose upper portions of side surfaces of the active region and to convert remaining portions of the insulation material in the trenches to shallow trench isolation (STI) disposed on opposite sides of the active region, forming a lower oxide layer, a middle charge trapping layer, and an upper oxide layer which cover the exposed upper portions of the side surfaces of the active region, an upper surface of the active region between the side surfaces of the active region, and the STI, and forming a gate layer on the upper oxide layer.
    Type: Grant
    Filed: September 14, 2016
    Date of Patent: October 24, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tsung-Yu Yang, Cheng-Bo Shu, Chung-Jen Huang, Jing-Ru Lin, Jui-Yu Pan, Yun-Chi Wu, Yueh-Chieh Chu
  • Publication number: 20170278953
    Abstract: A method for manufacturing a memory device includes forming trenches in a substrate to define an active region, filling an insulation material in the trenches, treating at least one portion of the insulation material, removing an upper portion of the insulation material from the trenches, so as to expose upper portions of side surfaces of the active region and to convert remaining portions of the insulation material in the trenches to shallow trench isolation (STI) disposed on opposite sides of the active region, forming a lower oxide layer, a middle charge trapping layer, and an upper oxide layer which cover the exposed upper portions of the side surfaces of the active region, an upper surface of the active region between the side surfaces of the active region, and the STI, and forming a gate layer on the upper oxide layer.
    Type: Application
    Filed: September 14, 2016
    Publication date: September 28, 2017
    Inventors: Tsung-Yu YANG, Cheng-Bo SHU, Chung-Jen HUANG, Jing-Ru LIN, Jui-Yu PAN, Yun-Chi WU, Yueh-Chieh CHU
  • Publication number: 20170186762
    Abstract: The present disclosure relates to a method of forming an embedded flash memory cell that provides for improved performance by providing for a tunnel dielectric layer having a relatively uniform thickness, and an associated apparatus. The method is performed by forming a charge trapping dielectric structure over a logic region, a control gate region, and a select gate region within a substrate. A first charge trapping dielectric etching process is performed to form an opening in the charge trapping dielectric structure over the logic region, and a thermal gate dielectric layer is formed within the opening. A second charge trapping dielectric etching process is performed to remove the charge trapping dielectric structure over the select gate region. Gate electrodes are formed over the thermal gate dielectric layer and the charge trapping dielectric structure remaining after the second charge trapping dielectric etching process.
    Type: Application
    Filed: November 30, 2016
    Publication date: June 29, 2017
    Inventors: Jui-Yu Pan, Cheng-Bo Shu, Chung-Jen Huang, Jing-Ru Lin, Tsung-Yu Yang, Yun-Chi Wu, Yueh-Chieh Chu
  • Patent number: 9589831
    Abstract: A method for forming a radio frequency area of an integrated circuit are provided. The method includes forming a buried oxide layer over a substrate, and an interface layer is formed between the substrate and the buried oxide layer. The method also includes etching through the buried oxide layer and the interface layer to form a deep trench, and a bottom surface of the deep trench is level with a bottom surface of the interface layer. The method further includes forming an implant region directly below the deep trench and forming an interlayer dielectric layer in the deep trench.
    Type: Grant
    Filed: December 16, 2015
    Date of Patent: March 7, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Yu Cheng, Keng-Yu Chen, Wei-Kung Tsai, Kuan-Chi Tsai, Tsung-Yu Yang, Chung-Long Chang, Chun-Hung Chen, Chih-Ping Chao
  • Patent number: 9362381
    Abstract: The present invention discloses an insulated gate bipolar transistor (IGBT) and a manufacturing method thereof. The IGBT includes: a gallium nitride (GaN) substrate, a first GaN layer with a first conductive type, a second GaN layer with a first conductive type, a third GaN layer with a second conductive type or an intrinsic conductive type, and a gate formed on the GaN substrate. The first GaN layer is formed on the GaN substrate and has a side wall vertical to the GaN substrate. The second GaN layer is formed on the GaN substrate and is separated from the first GaN layer by the gate. The third GaN layer is formed on the first GaN layer and is separated from the GaN substrate by the first GaN layer. The gate has a side plate adjacent to the side wall in a lateral direction to control a channel.
    Type: Grant
    Filed: December 16, 2015
    Date of Patent: June 7, 2016
    Assignee: RICHTEK TECHNOLOGY CORPORATION
    Inventors: Chih-Fang Huang, Tsung-Yi Huang, Chien-Wei Chiu, Tsung-Yu Yang, Ting-Fu Chang, Tsung-Chieh Hsiao, Ya-Hsien Liu, Po-Chin Peng
  • Publication number: 20160149077
    Abstract: The disclosure provides a light-emitting diode and a method for manufacturing the same. The light-emitting diode comprises a N-type metal electrode, a N-type semiconductor layer contacted with the N-type metal electrode, a P-type semiconductor layer, a light-emitting layer interposed between the N-type semiconductor layer and the P-type semiconductor layer, a low-contact-resistance material layer positioned on the P-type semiconductor layer, a transparent conductive layer covered the low-contact-resistance material layer and the P-type semiconductor layer, and a P-type metal electrode positioned on the transparent conductive layer.
    Type: Application
    Filed: January 29, 2016
    Publication date: May 26, 2016
    Inventors: Chia-Lin HSIAO, Nai-Wei HSU, Te-Chung WANG, Tsung-Yu YANG
  • Patent number: 9343352
    Abstract: An embodiment radio frequency area of an integrated circuit is disclosed. The radio frequency area includes a substrate having an implant region. The substrate has a first resistance. A buried oxide layer is disposed over the substrate and an interface layer is disposed between the substrate and the buried oxide layer. The interface layer has a second resistance lower than the first resistance. A silicon layer is disposed over the buried oxide layer and an interlevel dielectric is disposed in a deep trench. The deep trench extends through the silicon layer, the buried oxide layer, and the interface layer over the implant region. The deep trench may also extend through a polysilicon layer disposed over the silicon layer.
    Type: Grant
    Filed: January 23, 2015
    Date of Patent: May 17, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Yu Cheng, Wei-Kung Tsai, Kuan-Chi Tsai, Tsung-Yu Yang, Chung-Long Chang, Chun-Hong Chen, Chih-Ping Chao, Chen-Yao Tang, Yu Hung Chen
  • Publication number: 20160111519
    Abstract: The present invention discloses an insulated gate bipolar transistor (IGBT) and a manufacturing method thereof. The IGBT includes: a gallium nitride (GaN) substrate, a first GaN layer with a first conductive type, a second GaN layer with a first conductive type, a third GaN layer with a second conductive type or an intrinsic conductive type, and a gate formed on the GaN substrate. The first GaN layer is formed on the GaN substrate and has a side wall vertical to the GaN substrate. The second GaN layer is formed on the GaN substrate and is separated from the first GaN layer by the gate. The third GaN layer is formed on the first GaN layer and is separated from the GaN substrate by the first GaN layer. The gate has a side plate adjacent to the side wall in a lateral direction to control a channel.
    Type: Application
    Filed: December 16, 2015
    Publication date: April 21, 2016
    Applicant: RICHTEK TECHNOLOGY CORPORATION
    Inventors: Chih-Fang Huang, Tsung-Yi Huang, Chien-Wei Chiu, Tsung-Yu Yang, Ting-Fu Chang, Tsung-Chieh Hsiao, Ya-Hsien Liu, Po-Chin Peng
  • Publication number: 20160099169
    Abstract: The methods for forming a radio frequency area of an integrated circuit are provided. The method includes forming a buried oxide layer over a substrate, and an interface layer is formed between the substrate and the buried oxide layer. The method also includes etching through the buried oxide layer and the interface layer to form a deep trench, and a bottom surface of the deep trench is level with a bottom surface of the interface layer. The method further includes forming an implant region directly below the deep trench and forming an interlayer dielectric layer in the deep trench.
    Type: Application
    Filed: December 16, 2015
    Publication date: April 7, 2016
    Inventors: Kuo-Yu CHENG, Keng-Yu CHEN, Wei-Kung TSAI, Kuan-Chi TSAI, Tsung-Yu YANG, Chung-Long CHANG, Chun-Hung CHEN, Chih-Ping CHAO
  • Patent number: 9287461
    Abstract: The disclosure provides a light-emitting diode and a method for manufacturing the same. The light-emitting diode comprises a N-type metal electrode, a N-type semiconductor layer contacted with the N-type metal electrode, a P-type semiconductor layer, a light-emitting layer interposed between the N-type semiconductor layer and the P-type semiconductor layer, a low-contact-resistance material layer positioned on the P-type semiconductor layer, a transparent conductive layer covered the low-contact-resistance material layer and the P-type semiconductor layer, and a P-type metal electrode positioned on the transparent conductive layer.
    Type: Grant
    Filed: October 15, 2013
    Date of Patent: March 15, 2016
    Assignee: LEXTAR ELECTRONICS CORPORATION
    Inventors: Chia-Lin Hsiao, Nai-Wei Hsu, Te-Chung Wang, Tsung-Yu Yang
  • Patent number: 9269591
    Abstract: The present disclosure relates to a silicon-on-insulator (SOI) substrate having a trap-rich layer, with crystal defects, which is disposed within a handle wafer, and an associated method of formation. In some embodiments, the SOI substrate has a handle wafer. A trap-rich layer, having a plurality of crystal defects that act to trap carriers, is disposed within the handle wafer at a position abutting a top surface of the handle wafer. An insulating layer is disposed onto the handle wafer. The insulating layer has a first side abutting the top surface of the handle wafer and an opposing second side abutting a thin layer of active silicon. By forming the trap-rich layer within the handle wafer, fabrication costs associated with depositing a trap-rich material (e.g., polysilicon) onto a handle wafer are reduced and thermal instability issues are prevented.
    Type: Grant
    Filed: March 24, 2014
    Date of Patent: February 23, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Alex Kalnitsky, Chung-Long Chang, Yung-Chih Tsai, Tsung-Yu Yang, Keng-Yu Chen, Yong-En Syu
  • Patent number: 9252219
    Abstract: The present invention discloses an insulated gate bipolar transistor (IGBT) and a manufacturing method thereof. The IGBT includes: a gallium nitride (GaN) substrate, a first GaN layer with a first conductive type, a second GaN layer with a first conductive type, a third GaN layer with a second conductive type or an intrinsic conductive type, and a gate formed on the GaN substrate. The first GaN layer is formed on the GaN substrate and has a side wall vertical to the GaN substrate. The second GaN layer is formed on the GaN substrate and is separated from the first GaN layer by the gate. The third GaN layer is formed on the first GaN layer and is separated from the GaN substrate by the first GaN layer. The gate has a side plate adjacent to the side wall in a lateral direction to control a channel.
    Type: Grant
    Filed: August 20, 2014
    Date of Patent: February 2, 2016
    Assignee: RICHTEK TECHNOLOGY CORPORATION
    Inventors: Chih-Fang Huang, Tsung-Yi Huang, Chien-Wei Chiu, Tsung-Yu Yang, Ting-Fu Chang, Tsung-Chieh Hsiao, Ya-Hsien Liu, Po-Chin Peng
  • Patent number: 9230988
    Abstract: Embodiments of mechanisms of forming a radio frequency area of an integrated circuit are provided. The radio frequency area of an integrated circuit structure includes a substrate, a buried oxide layer formed over the substrate, and an interface layer formed between the substrate and the buried oxide layer. The radio frequency area of an integrated circuit structure also includes a silicon layer formed over the buried oxide layer and an interlayer dielectric layer formed in a deep trench. The radio frequency area of an integrated circuit structure further includes the interlayer dielectric layer extending through the silicon layer, the buried oxide layer and the interface layer. The radio frequency area of an integrated circuit structure includes an implant region formed below the interlayer dielectric layer in the deep trench and a polysilicon layer formed below the implant region.
    Type: Grant
    Filed: October 31, 2013
    Date of Patent: January 5, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Yu Cheng, Keng-Yu Chen, Wei-Kung Tsai, Kuan-Chi Tsai, Tsung-Yu Yang, Chung-Long Chang, Chun-Hung Chen, Chih-Ping Chao