Patents by Inventor Tsung-Yu Yang
Tsung-Yu Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20210233819Abstract: A semiconductor structure can include a high voltage region, a first moat trench isolation structure electrically insulating the high voltage region from low voltage regions of the semiconductor structure, and a second moat trench isolation structure electrically insulating the high voltage region from the low voltage regions of the semiconductor structure. The first moat trench isolation structure can include dielectric sidewall spacers and a conductive fill material portion located between the dielectric sidewall spacers. The second moat trench isolation structure can include only at least one dielectric material, and can include a dielectric moat trench fill structure having a same material composition as the dielectric sidewall spacers and having a lateral thickness that is greater than a lateral thickness of the dielectric sidewall spacers and is less than twice the lateral thickness of the dielectric sidewall spacers.Type: ApplicationFiled: April 16, 2021Publication date: July 29, 2021Inventors: Hung-Ling SHIH, Tsung-Yu YANG, Yun-Chi WU, Po-Wei LIU
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Patent number: 11031303Abstract: A semiconductor structure can include a high voltage region, a first moat trench isolation structure electrically insulating the high voltage region from low voltage regions of the semiconductor structure, and a second moat trench isolation structure electrically insulating the high voltage region from the low voltage regions of the semiconductor structure. The first moat trench isolation structure can include dielectric sidewall spacers and a conductive fill material portion located between the dielectric sidewall spacers. The second moat trench isolation structure can include only at least one dielectric material, and can include a dielectric moat trench fill structure having a same material composition as the dielectric sidewall spacers and having a lateral thickness that is greater than a lateral thickness of the dielectric sidewall spacers and is less than twice the lateral thickness of the dielectric sidewall spacers.Type: GrantFiled: January 15, 2020Date of Patent: June 8, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDInventors: Hung-Ling Shih, Tsung-Yu Yang, Yun-Chi Wu, Po-Wei Liu
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Patent number: 11024637Abstract: A semiconductor device includes a semiconductor substrate and a pair of memory device structures. The semiconductor substrate includes a common source/drain region and a pair of individual source/drain regions, in which the common source/drain region is between the individual source/drain regions. The memory device structures each corresponds to one of the individual source/drain regions. Each memory device structure includes a trap storage structure, a control gate, a cap structure, and a word line. The trap storage structure is between the common source/drain region and the corresponding individual source/drain region. The control gate is over the trap storage structure. The cap structure is over the control gate, in which the cap structure comprises a nitride layer over the control gate and an oxide layer over the nitride layer. The word line is over the semiconductor substrate and laterally spaced from the control gate.Type: GrantFiled: February 11, 2019Date of Patent: June 1, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Tsung-Yu Yang, Chung-Jen Huang
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Publication number: 20210154789Abstract: A method for synchronous control of a gantry mechanism with online inertia matching is applicable to a machine tool equipped with a gantry mechanism. The gantry mechanism includes two rails, a crossbeam and a saddle, in which the saddle is disposed on the crossbeam, and the crossbeam is disposed by crossing the two rails. Each of the two rails is furnished with a driving apparatus for synchronously driving the crossbeam, and the driving apparatus includes a drive motor and a lead screw. This method includes the steps of: obtaining gantry-mechanism information; detecting position information of the saddle on the crossbeam; evaluating the position information and the gantry-mechanism information to derive load-inertia variety information; and, evaluating the load-inertia variety information to adjust torque-output information of the drive motor corresponding to the respective driving apparatus.Type: ApplicationFiled: December 19, 2019Publication date: May 27, 2021Inventors: MIN-RONG CHEN, SHIH-CHANG LIANG, TSUNG-YU YANG, JUN-HONG GUO, JIH-CHIEH LEE
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Publication number: 20210118772Abstract: A semiconductor arrangement includes a first dielectric feature passing through a semiconductive layer and a first dielectric layer over a substrate. The semiconductor arrangement includes a conductive feature passing through the semiconductive layer and the first dielectric layer and electrically coupled to the substrate. The conductive feature is adjacent the first dielectric feature and electrically isolated from the semiconductive layer by the first dielectric feature.Type: ApplicationFiled: October 18, 2019Publication date: April 22, 2021Inventors: Josh LIN, Chung-Jen HUANG, Yun-Chi WU, Tsung-Yu YANG
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Publication number: 20210111182Abstract: Some embodiments relate to an integrated chip that includes a first source/drain region and a second source/drain region disposed in a substrate. A plane that is substantially perpendicular to an upper surface of the substrate traverses the first source/drain region and the second source/drain region. Agate electrode extends over a channel region in the substrate between the first source/drain region and the second source/drain region. The gate electrode is separated from the channel region by way of a charge trapping dielectric structure. The charge trapping dielectric structure includes a tunnel dielectric layer, a charge trapping dielectric layer over the tunnel dielectric layer, and a blocking dielectric layer over the charge trapping dielectric layer. The channel region has a channel width measured perpendicularly to the plane, and the tunnel dielectric layer has different thicknesses at different respective points along the channel width.Type: ApplicationFiled: December 23, 2020Publication date: April 15, 2021Inventors: Jui-Yu Pan, Cheng-Bo Shu, Chung-Jen Huang, Jing-Ru Lin, Tsung-Yu Yang, Yun-Chi Wu, Yueh-Chieh Chu
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Publication number: 20210066456Abstract: A method of forming a semiconductor arrangement includes forming a gate dielectric layer over a semiconductor layer. A gate electrode layer is formed over the gate dielectric layer. A first gate mask is formed over the gate electrode layer. The gate electrode layer is etched using the first gate mask as an etch template to form a first gate electrode. A first dopant is implanted into the semiconductor layer using the first gate mask and the first gate electrode as an implantation template to form a first doped region in the semiconductor layer.Type: ApplicationFiled: November 16, 2020Publication date: March 4, 2021Inventors: Yun-Chi WU, Tsung-Yu Yang, Cheng-Bo Shu, Chien Hung Liu
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Patent number: 10879257Abstract: The present disclosure relates to a method of forming an embedded flash memory cell that provides for improved performance by providing for a tunnel dielectric layer having a relatively uniform thickness, and an associated apparatus. The method is performed by forming a charge trapping dielectric structure over a logic region, a control gate region, and a select gate region within a substrate. A first charge trapping dielectric etching process is performed to form an opening in the charge trapping dielectric structure over the logic region, and a thermal gate dielectric layer is formed within the opening. A second charge trapping dielectric etching process is performed to remove the charge trapping dielectric structure over the select gate region. Gate electrodes are formed over the thermal gate dielectric layer and the charge trapping dielectric structure remaining after the second charge trapping dielectric etching process.Type: GrantFiled: September 27, 2018Date of Patent: December 29, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jui-Yu Pan, Cheng-Bo Shu, Chung-Jen Huang, Jing-Ru Lin, Tsung-Yu Yang, Yun-Chi Wu, Yueh-Chieh Chu
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Patent number: 10879342Abstract: A multi-terminal inductor and method for forming the multi-terminal inductor are provided. In some embodiments, an interconnect structure is arranged over a semiconductor substrate. A passivation layer is arranged over the interconnect structure. A first magnetic layer is arranged over the passivation layer, and a conductive wire laterally extends from a first input/output (I/O) bond structure at a first location to a second I/O bond structure at a second location. A third I/O bond structure branches off of the conductive wire at a third location between the first location and the second location. A connection between the third I/O bond structure and the first I/O bond structure has a first inductance. Alternatively, a connection between the first I/O bond structure and the second I/O bond structure has a second inductance different than the first inductance.Type: GrantFiled: May 21, 2020Date of Patent: December 29, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ching-Chung Hsu, Chung-Long Chang, Tsung-Yu Yang, Hung-Chi Li, Cheng-Chieh Hsieh, Che-Yung Lin, Grace Chang
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Patent number: 10879181Abstract: A storage device includes a semiconductor substrate, a control gate, a word line, a dielectric layer, a charge storage nitride layer, and a blocking layer. The semiconductor substrate has a source region and a drain region. The control gate and a word line are disposed over the semiconductor substrate and located between the source and drain regions. The dielectric layer is in contact with the semiconductor substrate and disposed between the semiconductor substrate, the control gate, and the word line. The charge storage nitride layer is disposed between the dielectric layer and the control gate. The blocking layer is disposed between the charge storage nitride layer and the control gate.Type: GrantFiled: February 9, 2017Date of Patent: December 29, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yung-Chun Tu, Tsung-Yu Yang, Chung-Jen Huang
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Patent number: 10840333Abstract: A method of forming a semiconductor arrangement includes forming a gate dielectric layer over a semiconductor layer. A gate electrode layer is formed over the gate dielectric layer. A first gate mask is formed over the gate electrode layer. The gate electrode layer is etched using the first gate mask as an etch template to form a first gate electrode. A first dopant is implanted into the semiconductor layer using the first gate mask and the first gate electrode as an implantation template to form a first doped region in the semiconductor layer.Type: GrantFiled: April 1, 2019Date of Patent: November 17, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDInventors: Yun-Chi Wu, Tsung-Yu Yang, Cheng-Bo Shu, Chien Hung Liu
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Publication number: 20200350018Abstract: A memory unit includes a substrate and a floating gate memory cell. The floating gate memory cell includes an erase gate structure disposed on the substrate, floating gate structures select gates, a common source and drains. The common source is disposed in the substrate, and the erase gate structure is disposed on the common source. The floating gate structures protrude from recesses of the substrate at two opposite sides of the erase gate structure. A method for controlling the memory unit includes applying an erase gate programming voltage on the erase gate structure, applying a control gate programming voltage on the common source, applying a bit line programming voltage on the drains, and applying word line programming voltage on the select gates, in which the control gate programming voltage is greater than the erase gate programming voltage.Type: ApplicationFiled: July 20, 2020Publication date: November 5, 2020Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yu-Wen TSENG, Tsung-Yu YANG, Chung-Jen HUANG
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Publication number: 20200326185Abstract: A contour accuracy measuring system and a contour accuracy measuring method are provided. The contour accuracy measuring system captures location coordinate data of shafts of a machine tool. The location coordinate data are calculated to obtain a first true round trajectory on an inclined plane as reference information. The contour accuracy measuring system then adjusts parameters of the locations of the shafts based on the location coordinate data of the shafts of the reference information to generate a second true round trajectory on the inclined plane, so as to get to know whether the locations of the shafts after the parameters are adjusted comply with a standard. Therefore, the overall measurement process can be speeded up by automatically measuring the parameters and automatically testing an operating status.Type: ApplicationFiled: July 31, 2019Publication date: October 15, 2020Inventors: Yu-Sheng Tseng, Po-Hsun Wu, Tsung-Yu Yang, Chien-Yi Lee
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Publication number: 20200286981Abstract: A multi-terminal inductor and method for forming the multi-terminal inductor are provided. In some embodiments, an interconnect structure is arranged over a semiconductor substrate. A passivation layer is arranged over the interconnect structure. A first magnetic layer is arranged over the passivation layer, and a conductive wire laterally extends from a first input/output (I/O) bond structure at a first location to a second I/O bond structure at a second location. A third I/O bond structure branches off of the conductive wire at a third location between the first location and the second location. A connection between the third I/O bond structure and the first I/O bond structure has a first inductance. Alternatively, a connection between the first I/O bond structure and the second I/O bond structure has a second inductance different than the first inductance.Type: ApplicationFiled: May 21, 2020Publication date: September 10, 2020Inventors: Ching-Chung Hsu, Chung-Long Chang, Tsung-Yu Yang, Hung-Chi Li, Cheng-Chieh Hsieh, Che-Yung Lin, Grace Chang
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Patent number: 10720214Abstract: A memory unit includes a substrate and a floating gate memory cell. The floating gate memory cell includes an erase gate structure disposed on the substrate, floating gate structures select gates, a common source and drains. The common source is disposed in the substrate, and the erase gate structure is disposed on the common source. The floating gate structures protrude from recesses of the substrate at two opposite sides of the erase gate structure. A method for controlling the memory unit includes applying an erase gate programming voltage on the erase gate structure, applying a control gate programming voltage on the common source, applying a bit line programming voltage on the drains, and applying word line programming voltage on the select gates, in which the control gate programming voltage is greater than the erase gate programming voltage.Type: GrantFiled: October 26, 2018Date of Patent: July 21, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yu-Wen Tseng, Tsung-Yu Yang, Chung-Jen Huang
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Patent number: 10672860Abstract: A multi-terminal inductor and method for forming the multi-terminal inductor are provided. In some embodiments, an interconnect structure is arranged over a semiconductor substrate. A passivation layer is arranged over the interconnect structure. A first magnetic layer is arranged over the passivation layer, and a conductive wire laterally extends from a first input/output (I/O) bond structure at a first location to a second I/O bond structure at a second location. A third I/O bond structure branches off of the conductive wire at a third location between the first location and the second location. A connection between the third I/O bond structure and the first I/O bond structure has a first inductance. Alternatively, a connection between the first I/O bond structure and the second I/O bond structure has a second inductance different than the first inductance.Type: GrantFiled: September 30, 2019Date of Patent: June 2, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ching-Chung Hsu, Chung-Long Chang, Tsung-Yu Yang, Hung-Chi Li, Cheng-Chieh Hsieh, Che-Yung Lin, Grace Chang
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Patent number: 10665726Abstract: A memory device and an operation method thereof are provided. The memory device includes a semiconductor substrate and an oxide-nitride-oxide (ONO) gate structure located on the semiconductor substrate. The ONO gate structure includes a bottom oxide layer, a top oxide layer and a nitride layer. The nitride layer is located between the bottom oxide layer and the top oxide layer. The bottom oxide layer is located closer to the semiconductor substrate than the top oxide layer. The bottom oxide layer has a first thickness, and the top oxide layer has a second thickness smaller the first thickness. The operation method includes an erasing operation and a programming operation. Electrons are attracted into the ONO gate structure through the bottom oxide layer in the programming operation. Electrons trapped in the ONO gate structure escape from the ONO gate structure through the top oxide layer.Type: GrantFiled: January 31, 2017Date of Patent: May 26, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Tsung-Yu Yang, Chung-Jen Huang
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Publication number: 20200135857Abstract: A method of forming a semiconductor arrangement includes forming a gate dielectric layer over a semiconductor layer. A gate electrode layer is formed over the gate dielectric layer. A first gate mask is formed over the gate electrode layer. The gate electrode layer is etched using the first gate mask as an etch template to form a first gate electrode. A first dopant is implanted into the semiconductor layer using the first gate mask and the first gate electrode as an implantation template to form a first doped region in the semiconductor layer.Type: ApplicationFiled: April 1, 2019Publication date: April 30, 2020Inventors: Yun-Chi WU, Tsung-Yu YANG, Cheng-Bo SHU, Chien Hung LIU
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Publication number: 20200066831Abstract: A multi-terminal inductor and method for forming the multi-terminal inductor are provided. In some embodiments, an interconnect structure is arranged over a semiconductor substrate. A passivation layer is arranged over the interconnect structure. A first magnetic layer is arranged over the passivation layer, and a conductive wire laterally extends from a first input/output (I/O) bond structure at a first location to a second I/O bond structure at a second location. A third I/O bond structure branches off of the conductive wire at a third location between the first location and the second location. A connection between the third I/O bond structure and the first I/O bond structure has a first inductance. Alternatively, a connection between the first I/O bond structure and the second I/O bond structure has a second inductance different than the first inductance.Type: ApplicationFiled: September 30, 2019Publication date: February 27, 2020Inventors: Ching-Chung Hsu, Chung-Long Chang, Tsung-Yu Yang, Hung-Chi Li, Cheng-Chieh Hsieh, Che-Yung Lin, Grace Chang
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Patent number: 10505015Abstract: A memory device includes a semiconductor substrate and a pair of control gate stacks on the cell region. Each of the control gate stacks includes a storage layer and a control gate on the storage layer. The memory device includes at least one high-? metal gate stack disposed on the substrate. The high-? metal gate stack has a metal gate and a top surface of the control gate is lower than a top surface of the metal gate. The storage layer includes two oxide layers and a nitride layer, and the nitride layer is interposed in between the two oxide layers.Type: GrantFiled: November 17, 2016Date of Patent: December 10, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jing-Ru Lin, Cheng-Bo Shu, Tsung-Yu Yang, Chung-Jen Huang