Abstract: Described herein are back-gated transistors with fin-shaped gates, and IC devices including such transistors. The transistor includes a gate electrode formed over a support structure, where the gate electrode includes a metal fin that extends perpendicular to the support structure. A gate dielectric formed of a metal oxide film is deposited over the gate electrode and conforming to the fin shape, and a channel material formed of a high mobility oxide semiconductor film is deposited over the gate dielectric, the channel material also conforming to the fin shape. Source and drain contacts may be arranged so that the fin creates a channel with a larger channel width or a longer channel length.

Abstract: Embodiments herein describe techniques for a semiconductor device including a substrate, a first inter-level dielectric (ILD) layer above the substrate, and a second ILD layer above the first ILD layer. A first capacitor and a second capacitor are formed within the first ILD layer and the second ILD layer. A first top plate of the first capacitor and a second top plate of the second capacitor are formed at a boundary between the first ILD layer and the second ILD layer. The first capacitor and the second capacitor are separated by a dielectric area in the first ILD layer. The dielectric area includes a first dielectric area that is coplanar with the first top plate or the second top plate, and a second dielectric area above the first dielectric area and to separate the first top plate and the second top plate. Other embodiments may be described and/or claimed.

Abstract: A memory structure includes a spacer between a first side of a wordline conductor and a bitline conductor. A semiconductor material has horizontal portions extending from the bitline conductor along a top and bottom of the wordline conductor and has a contact portion extending along a second side of the wordline conductor between and connecting the horizontal portions. A high-? dielectric is between the semiconductor material and the wordline conductor. A capacitor has a first conductor, a second conductor, and an insulator between the first and second conductors, where the first conductor contacts the contact portion of the semiconductor material along the first side of the wordline conductor, and the second conductor connects to a ground terminal.

Abstract: Described herein are memory cells that include two transistors stacked above one another above a support structure where neither one of the transistors is coupled to a capacitor and where at least one of the two transistors is a thin-film transistor. In such 2T capacitorless memory cells, a first transistor may be referred to a write transistor, and a second transistor may be a read transistor. The first transistor may be a three-terminal device having two S/D terminals and a gate terminal, while the second transistor may be a four-terminal device having two S/D terminals and two gate terminals.

Abstract: Integrated circuit (IC) devices implementing bilayer memory stacking with compute logic circuits shared between bottom and top memory layers are disclosed. An example IC device includes a first IC structure that includes one or more memory layers but not necessarily compute logic circuits, the first IC structure being bonded with a second IC structure that includes at least one layer of compute logic circuits and further includes one or more memory layers stacked above the compute logic circuits. The first and second IC structures may be bonded so that the compute logic circuits of the second IC structure may be communicatively coupled to memory layers of both the first and second IC structures.

Abstract: IC devices implementing bilayer stacking with lines shared between bottom and top memory layers, and associated systems and methods, are disclosed. An example IC device includes a support structure, a front end of line (FEOL) layer and a back end of line (BEOL) layer. The BEOL layer includes a first memory cell in a first layer over the support structure, an electrically conductive line in a second layer, above the first layer, and a second memory cell in a third layer, above the second layer. The line could be one of a wordline, a bitline, or a plateline that is shared between the first and second memory cells. In particular, bilayer stacking line sharing is such that only one line is provided as a line to be shared between one or more of the memory cells of the first layer and one or more memory cells of the third layer.

Abstract: Disclosed herein are memory cells and memory arrays, as well as related methods and devices. For example, in some embodiments, a memory device may include: a support having a surface; and a three-dimensional array of memory cells on the surface of the support, wherein individual memory cells include a transistor and a capacitor, and a channel of the transistor in an individual memory cell is oriented parallel to the surface.

Abstract: Described herein are stacked memory devices that include some peripheral devices for controlling the memory in a separate layer from one or more memory arrays. The layers of the memory device are connected together using vias, which transfer power and data between the layers. In some examples, a portion of the peripheral devices are included in a memory layer, and another portion are included in a peripheral device layer. Multiple layers of memory arrays and/or peripheral devices may be included, e.g., one peripheral device layer may control multiple layers of memory arrays, or different layers of memory arrays may have dedicated peripheral device layers. Different types of memory arrays, such as DRAM or SRAM, may be included.

Abstract: Embodiments include a resistive random access memory (RRAM) storage cell, having a resistive switching material layer and a semiconductor layer between two electrodes, where the semiconductor layer serves as an OEL. In addition, the RRAM storage cell may be coupled with a transistor to form a RRAM memory cell. The RRAM memory cell may include a semiconductor layer as a channel for the transistor, and also shared with the storage cell as an OEL for the storage cell. A shared electrode may serve as a source electrode of the transistor and an electrode of the storage cell. In some embodiments, a dielectric layer may be shared between the transistor and the storage cell, where the dielectric layer is a resistive switching material layer of the storage cell.

Abstract: A device is disclosed. The device includes a plurality of capacitors, a transistor connected to each of the plurality of capacitors, and a first dielectric layer and a second dielectric layer on respective adjacent sides of adjacent capacitors of the plurality of capacitors. The first dielectric layer and the second dielectric layer include a top portion and a bottom portion, the top portion of the first dielectric layer and the top portion of the second dielectric layer extend from respective directions and meet at a top portion of a space between the adjacent capacitors, the bottom portion of the first dielectric layer and the bottom portion of the second dielectric layer extend from respective directions and meet at a bottom portion of a space between the adjacent capacitors.

Abstract: Techniques and mechanisms for operating transistors that are in a stacked configuration. In an embodiment, an integrated circuit (IC) device includes transistors arranged along a line of direction which is orthogonal to a surface of a semiconductor substrate. A first epitaxial structure and a second epitaxial structure are coupled, respectively, to a first channel structure of a first transistor and a second channel structure of a second transistor. The first epitaxial structure and the second epitaxial structure are at different respective levels relative to the surface of the semiconductor substrate. A dielectric material is disposed between the first epitaxial structure and the second epitaxial structure to facilitate electrical insulation of the channels from each other. In another embodiment, the stacked transistors are coupled to provide a complementary metal-oxide-semiconductor (CMOS) inverter circuit.

Abstract: Integrated circuit (IC) assemblies with stacked compute logic and memory dies, and associated systems and methods, are disclosed. One example IC assembly includes a compute logic die and a stack of memory dies provided above and coupled to the compute logic die, where one or more of the memory dies closest to the compute logic die include memory cells with transistors that are thin-film transistors (TFTs), while one or more of the memory dies further away from the compute logic die include memory cells with non-TFT transistors. Another example IC assembly includes a similar stack of compute logic die and memory dies where one or more of the memory dies closest to the compute logic die include static random-access memory (SRAM) cells, while one or more of the memory dies further away from the compute logic die include memory cells of other memory types.

Abstract: Memory cells with non-planar memory materials that include FE or AFE materials are described. An example memory cell includes a transistor provided over a support structure, where a memory material is integrated with a transistor gate. The channel material and the memory material are non-planar in that each includes a horizontal portion substantially parallel to the support structure, and a first and a second sidewall portions, each of which is substantially perpendicular to the support structure, where the horizontal portion of the memory material is between the horizontal portion of the channel material and a gate electrode material of the transistor gate, the first sidewall of the memory material is between the first sidewall of the channel material and the gate electrode material, and the second sidewall of the memory material is between the second sidewall of the channel material and the gate electrode material.

Abstract: A transistor is described. The transistor includes a substrate, a first semiconductor structure above the substrate, a second semiconductor structure above the substrate, a source contact that includes a first metal structure that contacts a plurality of surfaces of the first semiconductor structure and a drain contact that includes a second metal structure that contacts a plurality of surfaces of the second semiconductor structure. The transistor also includes a gate below a back side of the substrate.

Abstract: Embodiments of the present disclosure provide power to backend memory of an IC device from the back side of the device. An example IC device with back-side power delivery for backend memory includes a frontend layer with a plurality of frontend components such as frontend transistors, a backend layer (that may include a plurality of layers) with backend memory (e.g., with one or more eDRAM arrays), and a back-side power delivery structure with a plurality of back-side interconnects electrically coupled to the backend memory, where the frontend layer is between the back-side power delivery structure and the backend layer.

Abstract: Disclosed herein are memory cells and memory arrays, as well as related methods and devices. For example, in some embodiments, a memory device may include: a support having a surface; and a three-dimensional array of memory cells on the surface of the support, wherein individual memory cells include a transistor and a capacitor, and a channel of the transistor in an individual memory cell is oriented parallel to the surface.

Abstract: Disclosed herein are transistor electrode-channel arrangements, and related methods and devices. For example, in some embodiments, a transistor electrode-channel arrangement may include a channel material, source/drain electrodes provided over the channel material, and a sealant at least partially enclosing one or more of the source/drain electrodes, wherein the sealant includes one or more metallic conductive materials.

Abstract: An example IC device includes a frontend layer and a backend layer with a metallization stack. The metallization stack includes a backend memory layer with a plurality of memory cells with backend transistors, and a layer with a plurality of conductive interconnects (e.g., a plurality of conductive lines) and air gaps between adjacent ones of the plurality of interconnects. Providing air gaps in upper metal layers of metallization stacks of IC devices may advantageously reduce parasitic effects in the IC devices because such effects are typically proportional to the dielectric constant of a surrounding medium. In turn, reduction in the parasitic effects may lead to improvements in performance of, or requirements placed on, the backend memory.

Abstract: Microelectronic assemblies fabricated using hybrid manufacturing with modified via-last process are disclosed. The fabrication approach is based on using hybrid manufacturing to bond first and second IC structures originally provided on different dies but filling at least portions of vias that are supposed to couple across a bonding interface between the first and second IC structures with electrically conductive materials after the IC structures have been bonded. A resulting microelectronic assembly that includes the first and second IC structures bonded together may have vias extending through all of the first IC structure and into the second IC structure, thus providing electrical coupling between one or more components of the first IC structure and those of the second IC structure, where an electrically conductive material in the individual vias is continuous through the first IC structure and at least a portion of the second IC structure.

Abstract: Described herein are three-dimensional transistors with a recessed gate, and IC devices including such three-dimensional transistors with recessed gates. The transistor includes a channel material having a recess. The channel material is formed over a support structure, and source/drain regions are formed in or on the channel material, e.g., one either side of the recess. A gate stack extends through the recess. The distance between the gate stack and the support structure is smaller than the distance between one of the source/drain regions and the support structure. This arrangement increases the channel length relative to prior art transistors, reducing leakage.