Patents by Inventor Van H. Le

Van H. Le has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220238685
    Abstract: Embodiments herein describe techniques for a thin-film transistor (TFT) above a substrate. The transistor includes a gate electrode above the substrate, and a channel layer above the substrate, separated from the gate electrode by a gate dielectric layer. The transistor further includes a contact electrode above the channel layer and in contact with a contact area of the channel layer. The contact area has a thickness determined based on a Schottky barrier height of a Schottky barrier formed at an interface between the contact electrode and the contact area, a doping concentration of the contact area, and a contact resistance at the interface between the contact electrode and the contact area. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: April 19, 2022
    Publication date: July 28, 2022
    Inventors: Abhishek SHARMA, Cory WEBER, Van H. LE, Sean MA
  • Patent number: 11398560
    Abstract: Embodiments herein describe techniques for a transistor above the substrate. The transistor includes a first gate dielectric layer with a first gate dielectric material above a gate electrode, and a second dielectric layer with a second dielectric material above a portion of the first gate dielectric layer. A first portion of a channel layer overlaps with only the first gate dielectric layer, while a second portion of the channel layer overlaps with the first gate dielectric layer and the second dielectric layer. A first portion of a contact electrode overlaps with the first portion of the channel layer, and overlaps with only the first gate dielectric layer, while a second portion of the contact electrode overlaps with the second portion of the channel layer, and overlaps with the first gate dielectric layer and the second dielectric layer. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: September 26, 2018
    Date of Patent: July 26, 2022
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Van H. Le, Abhishek Sharma, Jack T. Kavalieros, Sean Ma, Seung Hoon Sung, Nazila Haratipour, Tahir Ghani, Justin Weber, Shriram Shivaraman
  • Patent number: 11393927
    Abstract: Embodiments herein describe techniques for a semiconductor device including a capacitor and a transistor above the capacitor. A contact electrode may be shared between the capacitor and the transistor. The capacitor includes a first plate above a substrate, and the shared contact electrode above the first plate and separated from the first plate by a capacitor dielectric layer, where the shared contact electrode acts as a second plate for the capacitor. The transistor includes a gate electrode above the substrate and above the capacitor; a channel layer separated from the gate electrode by a gate dielectric layer, and in contact with the shared contact electrode; and a source electrode above the channel layer, separated from the gate electrode by the gate dielectric layer, and in contact with the channel layer. The shared contact electrode acts as a drain electrode of the transistor. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: September 26, 2018
    Date of Patent: July 19, 2022
    Assignee: Intel Coropration
    Inventors: Travis W. Lajoie, Abhishek Sharma, Van H. Le, Chieh-Jen Ku, Pei-Hua Wang, Jack T. Kavalieros, Bernhard Sell, Tahir Ghani, Juan Alzate Vinasco
  • Patent number: 11387399
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a substrate and a quantum well stack disposed on the substrate. The quantum well stack may include a quantum well layer and a back gate, and the back gate may be disposed between the quantum well layer and the substrate.
    Type: Grant
    Filed: June 9, 2016
    Date of Patent: July 12, 2022
    Assignee: Intel Corporation
    Inventors: Jeanette M. Roberts, Ravi Pillarisetty, David J. Michalak, Zachary R. Yoscovits, James S. Clarke, Van H. Le
  • Patent number: 11387366
    Abstract: Embodiments herein describe techniques for a semiconductor device, which may include a substrate, a metallic encapsulation layer above the substrate, and a gate electrode above the substrate and next to the metallic encapsulation layer. A channel layer may be above the metallic encapsulation layer and the gate electrode, where the channel layer may include a source area and a drain area. In addition, a source electrode may be coupled to the source area, and a drain electrode may be coupled to the drain area. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: September 27, 2017
    Date of Patent: July 12, 2022
    Assignee: Intel Corporation
    Inventors: Abhishek A. Sharma, Van H. Le, Jack T. Kavalieros, Tahir Ghani, Gilbert Dewey, Shriram Shivaraman, Inanc Meric, Benjamin Chu-Kung
  • Publication number: 20220216347
    Abstract: Described herein are apparatuses, systems, and methods associated with metal-assisted transistors. A single crystal semiconductor material may be seeded from a metal. The single crystal semiconductor material may form a channel region, a source, region, and/or a drain region of the transistor. The metal may form the source contact or drain contact, and the source region, channel region, and drain region may be stacked vertically on the source contact or drain contact. Alternatively, a metal-assisted semiconductor growth process may be used to form a single crystal semiconductor material on a dielectric material adjacent to the metal. The portion of the semiconductor material on the dielectric material may be used to form the transistor. Other embodiments may be described and claimed.
    Type: Application
    Filed: March 22, 2022
    Publication date: July 7, 2022
    Inventors: Van H. LE, Ashish AGRAWAL, Seung Hoon SUNG, Abhishek A. SHARMA, Ravi PILLARISETTY
  • Patent number: 11380797
    Abstract: Thin film core-shell fin and nanowire transistors are described. In an example, an integrated circuit structure includes a fin on an insulator layer above a substrate. The fin has a top and sidewalls. The fin is composed of a first semiconducting oxide material. A second semiconducting oxide material is on the top and sidewalls of the fin. A gate electrode is over a first portion of the second semiconducting oxide material on the top and sidewalls of the fin. A first conductive contact is adjacent the first side of the gate electrode, the first conductive contact over a second portion of the second semiconducting oxide material on the top and sidewalls of the fin. A second conductive contact is adjacent the second side of the gate electrode, the second conductive contact over a third portion of the second semiconducting oxide material on the top and sidewalls of the fin.
    Type: Grant
    Filed: June 20, 2017
    Date of Patent: July 5, 2022
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Van H. Le, Abhishek A. Sharma, Shriram Shivaraman, Ravi Pillarisetty, Tahir Ghani, Jack T. Kavalieros
  • Publication number: 20220208991
    Abstract: Thin film transistor structures and processes are disclosed that include stacked nanowire bodies to mitigate undesirable short channel effects, which can occur as gate lengths scale down to sub-100 nanometer (nm) dimensions, and to reduce external contact resistance. In an example embodiment, the disclosed structures employ a gate-all-around architecture, in which the gate stack (including a high-k dielectric layer) wraps around each of the stacked channel region nanowires (or nanoribbons) to provide improved electrostatic control. The resulting increased gate surface contact area also provides improved conduction. Additionally, these thin film structures can be stacked with relatively small spacing (e.g., 1 to 20 nm) between nanowire bodies to increase integrated circuit transistor density. In some embodiments, the nanowire body may have a thickness in the range of 1 to 20 nm and a length in the range of 5 to 100 nm.
    Type: Application
    Filed: March 15, 2022
    Publication date: June 30, 2022
    Inventors: Seung Hoon SUNG, Abhishek A. SHARMA, Van H. LE, Gilbert DEWEY, Jack T. KAVALIEROS, Tahir GHANI
  • Publication number: 20220199801
    Abstract: Embodiments disclosed herein include a semiconductor devices with back end of line (BEOL) transistor devices. In an embodiment, a semiconductor device comprises a semiconductor substrate and a BEOL stack over the semiconductor substrate. In an embodiment, a field effect transistor (FET) is embedded in the BEOL stack. In an embodiment, the FET comprises a channel, a gate dielectric over the channel, where the gate dielectric is single crystalline, a gate electrode over the gate dielectric, and a source electrode and a drain electrode passing through the gate dielectric to contact the channel.
    Type: Application
    Filed: December 23, 2020
    Publication date: June 23, 2022
    Inventors: Prashant MAJHI, Abhishek A. SHARMA, Charles C. KUO, Brian S. DOYLE, Urusa ALAAN, Van H. LE, Elijah V. KARPOV, Kaan OGUZ, Arnab SEN GUPTA
  • Publication number: 20220199760
    Abstract: An integrated circuit (IC) structure having a plurality of backend double-walled capacitors (DWCs) are described. In an example, a first interconnect layer is disposed over a substrate and a second interconnect layer is disposed over the first interconnect layer. In the example, a plurality of DWCs are disposed in the first interconnect layer or the second interconnect layer to provide capacitance to assist the first interconnect layer and the second interconnect layer in providing electrical signal routing and power distribution to one or more devices in the IC structure. In examples, the IC structure includes a logic IC or a coupling substrate.
    Type: Application
    Filed: December 21, 2020
    Publication date: June 23, 2022
    Inventors: Abhishek A. SHARMA, Noriyuki SATO, Sudarat LEE, Scott B. CLENDENNING, Sudipto NASKAR, Manish CHANDHOK, Hui Jae YOO, Van H. LE
  • Publication number: 20220199807
    Abstract: Thin film transistors fabricated using a spacer as a fin are described. In an example, a method of forming a fin transistor structure includes patterning a plurality of backbone pillars on a semiconductor substrate. The method may then include conformally depositing a spacer layer over the plurality of backbone pillars and the semiconductor substrate. A spacer etch of the spacer layer is then performed to leave a sidewall of the spacer layer on a backbone pillar to form a fin of the fin transistor structure.
    Type: Application
    Filed: December 21, 2020
    Publication date: June 23, 2022
    Inventors: Noriyuki SATO, Sarah ATANASOV, Abhishek A. Sharma, Bernhard SELL, Chieh-Jen KU, Elliot N. TAN, Hui Jae YOO, Travis W. LAJOIE, Van H. LE, Pei-Hua WANG, Jason PECK, Tobias BROWN-HEFT
  • Publication number: 20220199609
    Abstract: Embodiments disclosed herein include semiconductor devices with electrostatic discharge (ESD) protection of the transistor devices. In an embodiment, a semiconductor device comprises a semiconductor substrate, where a transistor device is provided on the semiconductor substrate. In an embodiment, the semiconductor device further comprises a stack of routing layers over the semiconductor substrate, and a diode in the stack of routing layers. In an embodiment, the diode is configured to provide electrostatic discharge (ESD) protection to the transistor device.
    Type: Application
    Filed: December 23, 2020
    Publication date: June 23, 2022
    Inventors: Urusa ALAAN, Abhishek A. SHARMA, Charles C. KUO, Benjamin ORR, Nicholas THOMSON, Ayan KAR, Arnab SEN GUPTA, Kaan OGUZ, Brian S. DOYLE, Prashant MAJHI, Van H. LE, Elijah V. KARPOV
  • Publication number: 20220199628
    Abstract: An integrated circuit (IC) structure in a memory device is described. In an example, the IC structure includes a memory cell including a bitline (BL) extending along a first direction and a channel extending along a second direction above and diagonal to the BL. In the example, a wordline (WL) extends in a third direction perpendicular to the first direction of the BL and intersects with the channel to control a current in the channel along a gated channel length. In some examples, the channel is electrically coupled on a first side to a storage capacitor via a storage node contact (SNC) and on a second side to the BL via a bit line contact (BLC) located on an underside or backside of the channel.
    Type: Application
    Filed: December 21, 2020
    Publication date: June 23, 2022
    Inventors: Noriyuki SATO, Sarah ATANASOV, Abhishek A. SHARMA, Bernhard SELL, Chieh-Jen KU, Arnab SEN GUPTA, Matthew V. METZ, Elliot N. TAN, Hui Jae YOO, Travis W. LAJOIE, Van H. LE, Pei-Hua WANG
  • Publication number: 20220199839
    Abstract: Embodiments disclosed herein include semiconductor devices with Schottky diodes in a back end of line stack. In an embodiment, a semiconductor device comprises a semiconductor layer, where transistor devices are provided in the semiconductor layer, and a back end stack over the semiconductor layer. In an embodiment, a diode is in the back end stack. In an embodiment, the diode comprises a first electrode, a semiconductor region over the first electrode, and a second electrode over the semiconductor region. In an embodiment, a first interface between the first electrode and the semiconductor region is an ohmic contact, and a second interface between the semiconductor region and the second electrode is a Schottky contact.
    Type: Application
    Filed: December 23, 2020
    Publication date: June 23, 2022
    Inventors: Arnab SEN GUPTA, Urusa ALAAN, Justin WEBER, Charles C. KUO, Yu-Jin CHEN, Kaan OGUZ, Matthew V. METZ, Abhishek A. SHARMA, Prashant MAJHI, Brian S. DOYLE, Van H. LE
  • Publication number: 20220189913
    Abstract: Disclosed herein are transistors, memory cells, and arrangements thereof. For example, in some embodiments, an integrated circuit (IC) structure may include a plurality of transistors, wherein the transistors are distributed in a hexagonally packed arrangement. In another example, in some embodiments, an IC structure may include a memory cell including an axially symmetric transistor coupled to an axially symmetric capacitor, wherein the axis of the transistor is aligned with the axis of the capacitor.
    Type: Application
    Filed: December 10, 2020
    Publication date: June 16, 2022
    Applicant: Intel Corporation
    Inventors: Sarah Atanasov, Abhishek A. Sharma, Bernhard Sell, Chieh-Jen Ku, Elliot Tan, Hui Jae Yoo, Noriyuki Sato, Travis W. Lajoie, Van H. Le, Thoe Michaelos
  • Publication number: 20220189957
    Abstract: Disclosed herein are transistors, memory cells, and arrangements thereof. For example, in some embodiments, an integrated circuit (IC) structure may include a plurality of transistors, wherein the transistors are distributed in a hexagonally packed arrangement. In another example, in some embodiments, an IC structure may include a memory cell including an axially symmetric transistor coupled to an axially symmetric capacitor, wherein the axis of the transistor is aligned with the axis of the capacitor.
    Type: Application
    Filed: December 10, 2020
    Publication date: June 16, 2022
    Applicant: Intel Corporation
    Inventors: Sarah Atanasov, Abhishek A. Sharma, Bernhard Sell, Chieh-Jen Ku, Elliot Tan, Hui Jae Yoo, Noriyuki Sato, Travis W. Lajoie, Van H. Le
  • Publication number: 20220190121
    Abstract: Disclosed herein are transistor channel materials, and related methods and devices. For example, in some embodiments, a transistor may include a channel material including a semiconductor material having a first conductivity type, and the channel material may further include a dopant including (1) an insulating material and/or (2) a material having a second conductivity type opposite to the first conductivity type.
    Type: Application
    Filed: December 14, 2020
    Publication date: June 16, 2022
    Applicant: INTEL CORPORATION
    Inventors: Abhishek A. Sharma, Noriyuki Sato, Van H. Le, Sarah Atanasov, Arnab Sen Gupta, Matthew V. Metz, Hui Jae Yoo
  • Patent number: 11362215
    Abstract: Described is a thin film transistor which comprises: a dielectric comprising a dielectric material; a first structure adjacent to the dielectric, the first structure comprising a first material; a second structure adjacent to the first structure, the second structure comprising a second material wherein the second material is doped; a second dielectric adjacent to the second structure; a gate comprising a metal adjacent to the second dielectric; a spacer partially adjacent to the gate and the second dielectric; and a contact adjacent to the spacer.
    Type: Grant
    Filed: March 30, 2018
    Date of Patent: June 14, 2022
    Assignee: INTEL CORPORATION
    Inventors: Abhishek A. Sharma, Sean T. Ma, Van H. Le, Jack T. Kavalieros, Gilbert Dewey
  • Publication number: 20220173090
    Abstract: Various aspects of the present disclosure set forth IC dies, microelectronic assemblies, as well as related devices and packages. One aspect relates to disaggregating 3D monolithic memory and compute functions to enable tight coupling for fast memory access at high bandwidth. Another aspect relates to microelectronic assemblies relate to nano-TSVs with 3D monolithic memory. Further aspects relate to die stitching and the use of glass carrier structures in microelectronic assemblies. Various aspects disclosed herein advantageously provide a robust set of implementations that may enable significant improvements in terms of optimizing performance of individual IC dies, microelectronic assemblies including one or more of such dies, and IC packages and devices including one or more of such microelectronic assemblies.
    Type: Application
    Filed: March 24, 2021
    Publication date: June 2, 2022
    Applicant: Intel Corporation
    Inventors: Wilfred Gomes, Abhishek A. Sharma, Van H. Le, Doug B. Ingerly
  • Patent number: 11348973
    Abstract: Embodiments include a threshold switching selector. The threshold switching selector may include a threshold switching layer and a semiconductor layer between two electrodes. A memory cell may include the threshold switching selector coupled to a storage cell. The storage cell may be a PCRAM storage cell, a MRAM storage cell, or a RRAM storage cell. In addition, a RRAM device may include a RRAM storage cell, coupled to a threshold switching selector, where the threshold switching selector may include a threshold switching layer and a semiconductor layer, and the semiconductor layer of the threshold switching selector may be shared with the semiconductor layer of the RRAM storage cell.
    Type: Grant
    Filed: September 23, 2016
    Date of Patent: May 31, 2022
    Assignee: Intel Corporation
    Inventors: Abhishek A. Sharma, Van H. Le, Gilbert Dewey, Rafael Rios, Jack T. Kavalieros, Shriram Shivaraman