Patents by Inventor Vibhor Jain

Vibhor Jain has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230127768
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to transistor with wrap-around extrinsic base and methods of manufacture. The structure includes: a substrate; a collector region within the substrate; an emitter region over the substrate and which comprises mono-crystal silicon based material; an intrinsic base under the emitter region and comprising semiconductor material; and an extrinsic base surrounding the emitter and over the intrinsic base.
    Type: Application
    Filed: October 25, 2021
    Publication date: April 27, 2023
    Inventors: Xinshu Cai, Shyue Seng Tan, Vibhor Jain, John J. Pekarik, Kien Seen Daniel Chong, Yung Fu Chong, Judson R. Holt, Qizhi Liu, Kenneth J. Stein
  • Patent number: 11637181
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to lateral bipolar transistors and methods of manufacture. The structure includes: an extrinsic base comprising semiconductor material; an intrinsic base comprising semiconductor material which is located below the extrinsic base; a polysilicon emitter on a first side of the extrinsic base; a raised collector on a second side of the extrinsic base; and sidewall spacers on the extrinsic base which separate the extrinsic base from the polysilicon emitter and the raised collector.
    Type: Grant
    Filed: October 25, 2021
    Date of Patent: April 25, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Vibhor Jain, Alvin J. Joseph, Alexander Derrickson, Judson R. Holt, John J. Pekarik
  • Patent number: 11637068
    Abstract: Processing forms an integrated circuit structure having first and second layers on opposite sides of an insulator, and an interconnect structure extending through the insulator between the first layer and the second layer. The interconnect structure is formed in an opening extending through the insulator between the first layer and the second layer and has an electrical conductor in the opening extending between the first layer and the second layer and a thermally conductive electrical insulator liner along sidewalls of the opening extending between the first layer and the second layer. The electrical conductor is positioned to conduct electrical signals between the first layer and the second layer, and the thermally conductive electrical insulator liner is positioned to transfer heat between the first layer and the second layer.
    Type: Grant
    Filed: December 15, 2020
    Date of Patent: April 25, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Anthony K. Stamper, Vibhor Jain, Steven M. Shank, John J. Ellis-Monaghan, John J. Pekarik
  • Publication number: 20230124962
    Abstract: The present disclosure relates generally to structures in semiconductor devices and methods of forming the same. More particularly, the present disclosure relates to high electron mobility transistor (HEMT) devices having a silicided polysilicon layer. The present disclosure may provide an active region above a substrate, source and drain electrodes in contact with the active region, a gate above the active region, the gate being laterally between the source and drain electrodes, a polysilicon layer above the substrate, and a silicide layer on the polysilicon layer. The active region includes at least two material layers with different band gaps. The polysilicon layer may be configured as an electronic fuse, a resistor, or a diode.
    Type: Application
    Filed: October 17, 2021
    Publication date: April 20, 2023
    Inventors: VIBHOR JAIN, JOHNATAN AVRAHAM KANTAROVSKY, MARK DAVID LEVY, EPHREM GEBRESELASIE, YVES NGU, SIVA P. ADUSUMILLI
  • Publication number: 20230102573
    Abstract: Disclosed is a semiconductor structure including a device, such as a lateral heterojunction bipolar transistor (HBT), made up of a combination of at least three different semiconductor materials with different bandgap sizes for improved performance. In the device, a base layer of the base region can be positioned laterally between a collector layer of a collector region and an emitter layer of an emitter region and can be physically separated therefrom by buffer layers. The base layer can be made of a narrow bandgap semiconductor material, the collector layer and, optionally, the emitter layer can be made of a wide bandgap semiconductor material, and the buffer layers can be made of a semiconductor material with a bandgap between that of the narrow bandgap semiconductor material and the wide bandgap semiconductor material. Also disclosed herein is a method of forming the structure.
    Type: Application
    Filed: January 28, 2022
    Publication date: March 30, 2023
    Applicant: GlobalFoundries U.S. Inc.
    Inventors: Hong Yu, Vibhor Jain, Judson R. Holt
  • Publication number: 20230087058
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to bipolar transistors and methods of manufacture. The structure includes: a base region composed of a semiconductor on insulator material; an emitter region above the base region; and a collector region under the base region and within a cavity of a buried insulator layer.
    Type: Application
    Filed: December 13, 2021
    Publication date: March 23, 2023
    Inventors: Shesh Mani Pandey, Judson R. Holt, Vibhor Jain
  • Publication number: 20230064512
    Abstract: Embodiments of the disclosure provide a lateral bipolar transistor structure with a superlattice layer and methods to form the same. The bipolar transistor structure may have a semiconductor layer of a first single crystal semiconductor material over an insulator layer. The semiconductor layer includes an intrinsic base region having a first doping type. An emitter/collector (E/C) region may be adjacent the intrinsic base region and may have a second doping type opposite the first doping type. A superlattice layer is on the E/C region of the semiconductor layer. A raised E/C terminal, including a single crystal semiconductor material, is on the superlattice layer. The superlattice layer separates the E/C region from the raised E/C terminal.
    Type: Application
    Filed: November 24, 2021
    Publication date: March 2, 2023
    Inventors: Vibhor Jain, John J. Pekarik, Alvin J. Joseph, Alexander M. Derrickson, Judson R. Holt
  • Publication number: 20230067486
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor with gated collector and methods of manufacture. The structure includes: an extrinsic base region vertically over a semiconductor substrate and comprising asymmetrical sidewall spacers on opposing sidewalls of the extrinsic base region; a collector region on the semiconductor substrate and separated from the extrinsic base region by at least a first spacer of the asymmetrical sidewall spacers; and an emitter region on the semiconductor substrate and separated from the extrinsic base region by a second spacer of the asymmetrical sidewall spacers.
    Type: Application
    Filed: November 12, 2021
    Publication date: March 2, 2023
    Inventors: Alexander Derrickson, Vibhor Jain, Judson R. Holt, Jagar Singh, Mankyu Yang
  • Publication number: 20230062194
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. The structure includes: an extrinsic base region; an emitter region on a first side of the extrinsic base region; a collector region on a second side of the extrinsic base region; and a gate structure comprising a gate oxide and a gate control in a same channel region as the extrinsic base region.
    Type: Application
    Filed: November 23, 2021
    Publication date: March 2, 2023
    Inventors: Judson R. Holt, Vibhor Jain, Alexander M. Derrickson
  • Publication number: 20230067948
    Abstract: Structures for a diode and methods of fabricating a structure for a diode. The structure includes a layer comprised of a semiconductor material. The layer includes a first section, a second section, and a third section laterally positioned between the first section and the second section. The structure includes a first terminal having a raised semiconductor layer on the first section of the layer, a second terminal including a portion on the second section of the layer, and a gate on the third section of the layer.
    Type: Application
    Filed: December 2, 2021
    Publication date: March 2, 2023
    Inventors: Vibhor Jain, Judson R. Holt
  • Publication number: 20230065924
    Abstract: Disclosed is a semiconductor structure including a lateral heterojunction bipolar transistor (HBT). The structure includes a substrate (e.g., a silicon substrate), an insulator layer on the substrate, and a semiconductor layer (e.g., a silicon germanium layer) on the insulator layer. The structure includes a lateral HBT with three terminals including a collector, an emitter, and a base, which is positioned laterally between the collector and the emitter and which can include a silicon germanium intrinsic base region for improved performance. Additionally, the collector and/or the emitter includes: a first region, which is epitaxially grown within a trench that extends through the semiconductor layer and the insulator layer to the substrate; and a second region, which is epitaxially grown on the first region. The connection(s) of the collector and/or the emitter to the substrate effectively form thermal exit path(s) and minimize self-heating. Also disclosed is a method for forming the structure.
    Type: Application
    Filed: October 27, 2021
    Publication date: March 2, 2023
    Applicant: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Alexander M. Derrickson, Haiting Wang, Judson R. Holt, Vibhor Jain, Richard F. Taylor, III
  • Publication number: 20230061219
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. A structure includes: an intrinsic base comprising semiconductor material in a channel region of a semiconductor substrate; an extrinsic base vertically above the intrinsic base; a raised collector region on the semiconductor substrate and laterally connected to the intrinsic base; and a raised emitter region on the semiconductor substate and laterally connected to the intrinsic base.
    Type: Application
    Filed: October 25, 2021
    Publication date: March 2, 2023
    Inventors: Haiting Wang, Alexander Derrickson, Jagar Singh, Vibhor Jain, Andreas Knorr, Alexander Martin, Judson R. Holt, Zhenyu Hu
  • Publication number: 20230069207
    Abstract: Structures for a bipolar junction transistor and methods of forming a structure for a bipolar junction transistor. The structure includes an emitter having a raised portion, a collector having a raised portion, and a base having a base layer and an extrinsic base layer stacked with the base layer. The base layer and the extrinsic base layer are positioned in a lateral direction between the raised portion of the emitter and the raised portion of the collector, the base layer has a first width in the lateral direction, the extrinsic base layer has a second width in the lateral direction, and the second width is greater than the first width.
    Type: Application
    Filed: November 11, 2021
    Publication date: March 2, 2023
    Inventors: Alexander Derrickson, Judson R. Holt, Haiting Wang, Jagar Singh, Vibhor Jain
  • Publication number: 20230057695
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to lateral bipolar transistors and methods of manufacture. The structure includes: an extrinsic base comprising semiconductor material; an intrinsic base comprising semiconductor material which is located below the extrinsic base; a polysilicon emitter on a first side of the extrinsic base; a raised collector on a second side of the extrinsic base; and sidewall spacers on the extrinsic base which separate the extrinsic base from the polysilicon emitter and the raised collector.
    Type: Application
    Filed: October 25, 2021
    Publication date: February 23, 2023
    Inventors: Vibhor Jain, Alvin J. Joseph, Alexander Derrickson, Judson R. Holt, John J. Pekarik
  • Publication number: 20230058451
    Abstract: Embodiments of the disclosure provide a lateral bipolar transistor structure with a marker layer for emitter and collector terminals. A lateral bipolar transistor structure according to the disclosure includes a semiconductor layer over an insulator layer. The semiconductor layer includes an emitter/collector (E/C) region having a first doping type and an intrinsic base region adjacent the E/C region and having a second doping type opposite the first doping type. A marker layer is on the E/C region of the semiconductor layer, and a raised E/C terminal is on the marker layer. An extrinsic base is on the intrinsic base region of the semiconductor layer, and a spacer is horizontally between the raised E/C terminal and the extrinsic base.
    Type: Application
    Filed: October 14, 2021
    Publication date: February 23, 2023
    Inventors: Vibhor Jain, Alexander M. Derrickson, Judson R. Holt
  • Patent number: 11581450
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to photodiodes and/or PIN diode structures and methods of manufacture. The structure includes: at least one vertical pillar feature within a trench; a photosensitive semiconductor material extending laterally from sidewalls of the at least one vertical pillar feature; and a contact electrically connecting to the photosensitive semiconductor material.
    Type: Grant
    Filed: June 11, 2020
    Date of Patent: February 14, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Mark D. Levy, Siva P. Adusumilli, Vibhor Jain, John J. Ellis-Monaghan
  • Patent number: 11574867
    Abstract: An electrical fuse (e-fuse) includes a fuse link including a silicided semiconductor layer over a dielectric layer covering a gate conductor. The silicided semiconductor layer is non-planar and extends orthogonally over the gate conductor. A first terminal is electrically coupled to a first end of the fuse link, and a second terminal is electrically coupled to a second end of the fuse link. The fuse link may be formed in the same layer as an intrinsic and/or extrinsic base of a bipolar transistor. The gate conductor may control a current source for programming the e-fuse. The e-fuse reduces the footprint and the required programming energy compared to conventional e-fuses.
    Type: Grant
    Filed: November 25, 2020
    Date of Patent: February 7, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Ephrem G. Gebreselasie, Vibhor Jain, Yves T. Ngu, Johnatan A. Kantarovsky, Alain F. Loiseau
  • Patent number: 11569405
    Abstract: Structures including a photodetector and methods of fabricating such structures. The photodetector is positioned over the top surface of the substrate. The photodetector includes a portion of a semiconductor layer comprised of a semiconductor alloy, a p-type doped region in the portion of the semiconductor layer, and an n-type doped region in the portion of the semiconductor layer. The p-type doped region and the n-type doped region converge along a p-n junction. The portion of the semiconductor layer has a first side and a second side opposite from the first side. The semiconductor alloy has a composition that is laterally graded from the first side to the second side of the portion of the semiconductor layer.
    Type: Grant
    Filed: November 18, 2019
    Date of Patent: January 31, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Steven M. Shank, Vibhor Jain, Anthony K. Stamper, John J. Ellis-Monaghan, John J. Pekarik
  • Patent number: 11549913
    Abstract: Methods of forming a shear-mode chemical/physical sensor for liquid environment sensing on V-shaped grooves of a [100] crystal orientation Si layer and the resulting devices are provided. Embodiments include forming a set of V-shaped grooves in a [100] Si layer over a substrate; forming an acoustic resonator over and along the V-shaped grooves, the acoustic resonator including a first metal layer, a thin-film piezoelectric layer, and a second metal layer in an IDT pattern or a sheet; and forming at least one functional layer along a slope of the acoustic resonator.
    Type: Grant
    Filed: May 10, 2018
    Date of Patent: January 10, 2023
    Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
    Inventors: Humberto Campanella-Pineda, You Qian, Vibhor Jain, Anthony Stamper, Rakesh Kumar
  • Publication number: 20220406833
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to photodetectors with buried airgap mirror reflectors. The structure includes a photodetector and at least one airgap in a substrate under the photodetector.
    Type: Application
    Filed: August 26, 2022
    Publication date: December 22, 2022
    Inventors: Siva P. ADUSUMILLI, Vibhor JAIN, Alvin J. JOSEPH, Steven M. SHANK