Abstract: Embodiments discussed herein generally include methods of fabricating MEMS devices within a structure. The MEMS device may be formed in a cavity above the structure, and additional metallization may occur above the MEMS device. The cavity may be formed by depositing an encapsulating layer over the sacrificial layers that enclose the MEMS device. The encapsulating layer may then be etched to expose portions of the sacrificial layers. The sacrificial layers are exposed because they extend through the sidewalls of the encapsulating layer. Therefore, no release holes are etched through the top of the encapsulating layer. An etchant then removes the sacrificial layers to free the MEMS device and form the cavity and an opening through the sidewall of the encapsulating layer. Another encapsulating layer may then be deposited to seal the cavity and the opening.

Abstract: A detector system is described including arrays having a plurality of nanoelectronic sensors comprising a channel including a nanostructured element disposed on a substrate, the nanostructured element functionalized by one or more materials disposed on or adjacent to the nanostructured element so as to operatively influence one or more sensor electrical properties. In certain embodiments, the nanostructured element comprise one or more nanotubes, and the functionalization material may include nanoparticles composed of one or more metals, metal oxides, salts, or other inorganic or organic materials or composites of these. In one exemplary embodiment, an array includes plurality of sensors which are configured as field effect transistors, the nanostructured element comprising a randomly dispersed interconnecting network of single-walled carbon nanotubes (SWNTs) having semiconducting properties, and functionalized by deposition of metallic nanoparticles comprising one or more metallic elements.

Abstract: A capnometer adaptor includes a nanostructure sensor configured to selectively respond to a gaseous constituent of exhaled breath, such as to carbon dioxide. In certain embodiments, the adaptor includes an airway adaptor having at least one channel configured for the passage of respiratory gas; at least one nanostructure sensor in fluid communication with the passage, the sensor configured to selectively respond to at least one gaseous constituent of exhaled breath comprising carbon dioxide; and electronic hardware connected to the nanostructure sensor and configured to provide a signal indicative of a response of the sensor to the at least one gaseous constituent of exhaled breath. The sensor may be provided as a compact and solid-state device, and may be adapted for a variety of respiratory monitoring applications.

Abstract: Embodiments disclosed herein generally include using a large number of small MEMS devices to replace the function of an individual larger MEMS device or digital variable capacitor. The large number of smaller MEMS devices perform the same function as the larger device, but because of the smaller size, they can be encapsulated in a cavity using complementary metal oxide semiconductor (CMOS) compatible processes. Signal averaging over a large number of the smaller devices allows the accuracy of the array of smaller devices to be equivalent to the larger device. The process is exemplified by considering the use of a MEMS based accelerometer switch array with an integrated analog to digital conversion of the inertial response. The process is also exemplified by considering the use of a MEMS based device structure where the MEMS devices operate in parallel as a digital variable capacitor.

Abstract: A system for measuring an analyte of interest, particularly carbon dioxide, dissolved in a fluid media of a patient including a nanoelectronic sensor and a measurement instrument in communication with the sensor and configured to receive at least a signal from the sensor indicative of a response of the sensor to at least the analyte of interest.

Abstract: Embodiments of nanoelectronic sensors are described, including sensors for detecting analytes such as anesthesia gases, CO2 and the like in human breath. An integrated monitor system and disposable sensor unit is described which permits a number of different anesthetic agents to be identified and monitored, as well as concurrent monitoring of other breath species, such as CO2. The sensor unit may be configured to be compact, light weight, and inexpensive. Wireless embodiments provide such enhancements as remote monitoring. A simulator system for modeling the contents and conditions of human inhalation and exhalation with a selected mixture of a treatment agent is also described, particularly suited to the testing of sensors to be used in airway sampling.

Abstract: A system for measuring an analyte of interest, particularly carbon dioxide, dissolved in a fluid media of a patient including a nanoelectronic sensor and a measurement instrument in communication with the sensor and configured to receive at least a signal from the sensor indicative of a response of the sensor to at least the analyte of interest.

Abstract: Embodiments discussed herein generally include methods of fabricating MEMS devices within a structure. The MEMS device may be formed in a cavity above the structure, and additional metallization may occur above the MEMS device. The cavity may be formed by depositing an encapsulating layer over the sacrificial layers that enclose the MEMS device. The encapsulating layer may then be etched to expose portions of the sacrificial layers. The sacrificial layers are exposed because they extend through the sidewalls of the encapsulating layer. Therefore, no release holes are etched through the top of the encapsulating layer. An etchant then removes the sacrificial layers to free the MEMS device and form the cavity and an opening through the sidewall of the encapsulating layer. Another encapsulating layer may then be deposited to seal the cavity and the opening.

Abstract: A capnometer adaptor includes a nanostructure sensor configured to selectively respond to a gaseous constituent of exhaled breath, such as to carbon dioxide. In certain embodiments, the adaptor includes an airway adaptor having at least one channel configured for the passage of respiratory gas; at least one nanostructure sensor in fluid communication with the passage, the sensor configured to selectively respond to at least one gaseous constituent of exhaled breath comprising carbon dioxide; and electronic hardware connected to the nanostructure sensor and configured to provide a signal indicative of a response of the sensor to the at least one gaseous constituent of exhaled breath. The sensor may be provided as a compact and solid-state device, and may be adapted for a variety of respiratory monitoring applications.

Abstract: A nanoelectronic device includes a nanostructure, such as a nanotube or network of nanotube, disposed on a substrate. Nanoparticles are disposed on or adjacent to the nanostructure so as to operatively effect the electrical properties of the nanostructure. The nanoparticles may be composed of metals, metal oxides or salts and nanoparticles composed of different materials may be present. The amount of nanoparticles may be controlled to preserve semiconductive properties of the nanostructure, and the substrate immediately adjacent to the nanostructure may remain substantially free of nanoparticles. A method for fabricating the device includes electrodeposition of the nanoparticles using one of more solutions of dissolved ions while providing an electric current to the nanostructures but not to the surrounding substrate.

Abstract: A portable sensor device incorporates a low-power, nanostructure sensor coupled to a wireless transmitter. The sensor uses a nanostructure conducting channel, such as a nanotube network, that is functionalized to respond to a selected analyte. A measurement circuit connected to the sensor determines a change in the electrical characteristic of the sensor, from which information concerning the present or absence of the analyte may be determined. The portable sensor device may include a portable power source, such as a battery. It may further include a transmitter for wirelessly transmitting data to a base station.

Abstract: An automated method of rapidly producing customized 3D graphics images in which various user images and video are merged into 3D computer graphics scenes, producing hybrid images that appear to have been created by a computationally intensive 3D rendering process, but which in fact have been created by a much less computationally intensive series of 2D image operations. To do this, a 3D graphics computer model is rendered into a 3D graphics image using a customized renderer designed to automatically report on some of the renderer's intermediate rendering operations, and store this intermediate data in the form of metafilm. User images and video may then be automatically combined with the metafilm, producing a 3D rendered quality final image with orders of magnitude fewer computing operations. The process can be used to inexpensively introduce user content into sophisticated images and videos suitable for many internet, advertising, cell phone, and other applications.

Abstract: A three-dimensional (“3-D”) memory capacitor comprises a bottom electrode, a ferroelectric thin film, and a top electrode that conform to a 3-D surface of an insulator layer. The capacitance area is greater than the horizontal footprint area of the capacitor. Preferably, the footprint of the capacitor is less than 0.2 nm2, and the corresponding capacitance area is typically in a range of from 0.4 nm2 to 1.0 nm2 The ferroelectric thin film preferably has a thickness not exceeding 60 nm. A capacitor laminate including the bottom electrode, ferroelectric thin film, and the top electrode preferably has a thickness not exceeding 200 nm. A low-thermal-budget MOCVD method for depositing a ferroelectric thin film having a thickness in a range of from 30 nm to 90 nm includes an RTP treatment before depositing the top electrode and an RTP treatment after depositing the top electrode and etching the ferroelectric layer.

Abstract: A nanoelectronic device includes a nanostructure, such as a nanotube or network of nanotubes, disposed on a substrate. Nanoparticles are disposed on or adjacent to the nanostructure so as to operatively effect the electrical properties of the nanostructure. The nanoparticles may be composed of metals, metal oxides, or salts, and nanoparticles composed of different materials may be present. The amount of nanoparticles may be controlled to preserve semiconductive properties of the nanostructure, and the substrate immediately adjacent to the nanostructure may remain substantially free of nanoparticles. A method for fabricating the device includes electrodeposition of the nanoparticles using one or more solutions of dissolved ions while providing an electric current to the nanostructures but not to the surrounding substrate.

Abstract: A method and apparatus for maintaining an item-to-node mapping among nodes in a distributed cluster is provided. Each node maintains locally-stored system-state information indicating that node's understanding of which master nodes are alive and dead. Instead of employing a global item-to-node mapping, each node acts upon a locally determined mapping based on its locally-stored system-state information. For any two nodes with the same locally-stored system-state information, the locally determined mapping is the same. A node updates its locally-stored system-state information upon detecting a node failure or receiving a message from another node indicating different locally-stored system-state information. The new locally-stored system-state information is transmitted on a need-to-know basis, and consequently nodes with different item-to-node mappings may operate concurrently.

Abstract: Embodiments of nanoelectronic sensors are described, including sensors for detecting analytes such as anesthesia gases, CO2 and the like in human breath. An integrated monitor system and disposable sensor unit is described which permits a number of different anesthetic agents to be identified and monitored, as well as concurrent monitoring of other breath species, such as CO2. The sensor unit may be configured to be compact, light weight, and inexpensive. Wireless embodiments provide such enhancements as remote monitoring. A simulator system for modeling the contents and conditions of human inhalation and exhalation with a selected mixture of a treatment agent is also described, particularly suited to the testing of sensors to be used in airway sampling.

Abstract: A nonconductive hydrogen barrier layer is deposited on a substrate and completely covers the surface area over a memory capacitor and a MOSFET switch of an integrated circuit memory cell. A portion of an insulator layer adjacent to the bottom electrode of a memory capacitor is removed by etching to form a moat region. A nonconductive oxygen barrier layer is deposited to cover the sidewall and bottom of the moat. The nonconductive oxygen barrier layer and a conductive diffusion barrier beneath the capacitor together provide a substantially continuous diffusion barrier between the capacitor and a switch. Also, the nonconductive hydrogen barrier layer, the nonconductive oxygen barrier, and the conductive diffusion barrier substantially completely envelop the capacitor, in particular a ferroelectric thin film in the capacitor.

Abstract: Nanoelectronic sensors, including sensors for detecting analytes such as CO2, NO, anesthesia gases, and the like in human breath. An integrated multivalent monitor system is described which permits two or more analytes to be measured in breath, for example to monitor pulmonary conditions such as asthma. The monitor system may be configured to be compact, light weight, inexpensive, and to include a microprocessor capable of both analyzing measurements to determine patient status, and storing measurement history. Wireless embodiments provide such enhancements as remote monitoring.

Abstract: An electronic system and method for detecting analytes, such as carbon dioxide, is provided, using an improved nanostructure sensor (CO2 sensor). The CO2 sensor may comprise a substrate and a nanostructure, such as a one or more carbon nanotubes disposed over the substrate (e.g., as a network). One or more conductive elements may electrically communicate with the nanostructure. A counter or gate electrode may be positioned adjacent the nanostructure. A functionalization material reactive with carbon dioxide may be included, either disposed in contact with the nanostructure or isolated by a dielectric. The sensor may be connected to a circuit responsive to changes in CO2 concentration in the environment. Embodiments are described of medical sensing systems including one or more CO2 sensors. One embodiment comprises a breath sampling cannula which is connected to a sensor unit.

Abstract: A three-dimensional (“3-D”) memory capacitor comprises a bottom electrode, a ferroelectric thin film, and a top electrode that conform to a 3-D surface of an insulator layer. The capacitance area is greater than the horizontal footprint area of the capacitor. Preferably, the footprint of the capacitor is less than 0.2 nm2, and the corresponding capacitance area is typically in a range of from 0.4 nm2 to 1.0 nm2 The ferroelectric thin film preferably has a thickness not exceeding 60 nm. A capacitor laminate including the bottom electrode, ferroelectric thin film, and the top electrode preferably has a thickness not exceeding 200 nm. A low-thermal-budget MOCVD method for depositing a ferroelectric thin film having a thickness in a range of from 30 nm to 90 nm includes an RTP treatment before depositing the top electrode and an RTP treatment after depositing the top electrode and etching the ferroelectric layer.