Patents by Inventor Wen Su

Wen Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11380542
    Abstract: Embodiments disclosed herein relate generally to capping processes and structures formed thereby. In an embodiment, a conductive feature, formed in a dielectric layer, has a metallic surface, and the dielectric layer has a dielectric surface. The dielectric surface is modified to be hydrophobic by performing a surface modification treatment. After modifying the dielectric surface, a capping layer is formed on the metallic surface by performing a selective deposition process. In another embodiment, a surface of a gate structure is exposed through a dielectric layer. A capping layer is formed on the surface of the gate structure by performing a selective deposition process.
    Type: Grant
    Filed: September 4, 2020
    Date of Patent: July 5, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Chien Chi, Pei-Hsuan Lee, Hung-Wen Su, Hsiao-Kuan Wei, Jui-Fen Chien, Hsin-Yun Hsu
  • Patent number: 11374127
    Abstract: A device, structure, and method are provided whereby an insert layer is utilized to provide additional support for weaker and softer dielectric layer. The insert layer may be applied between two weaker dielectric layers or the insert layer may be used with a single layer of dielectric material. Once formed, trenches and vias are formed within the composite layers, and the insert layer will help to provide support that will limit or eliminate undesired bending or other structural motions that could hamper subsequent process steps, such as filling the trenches and vias with conductive material.
    Type: Grant
    Filed: July 27, 2020
    Date of Patent: June 28, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yao-Jen Chang, Chih-Chien Chi, Chen-Yuan Kao, Hung-Wen Su, Kai-Shiang Kuo, Po-Cheng Shih, Jun-Yi Ruan
  • Patent number: 11367494
    Abstract: The present disclosure provides semiconductor device and methods of forming the same. A semiconductor device according to the present disclosure includes a gate structure, a source/drain feature adjacent the gate structure, a dielectric layer disclosed over the gate structure and the source/drain feature, a gate contact disposed in the dielectric layer and over the gate structure, and a source/drain contact disposed in the dielectric layer and over the source/drain feature. The dielectric layer is doped with a dopant and the dopant includes germanium or tin.
    Type: Grant
    Filed: August 31, 2020
    Date of Patent: June 21, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen Su, Shih-Hao Lin, Jui-Lin Chen, Lien Jung Hung, Ping-Wei Wang
  • Publication number: 20220172686
    Abstract: A light-emitting assembly includes a substrate and a plurality of light-emitting elements. The substrate includes a component arrangement region and a planar region in a top view, and includes a base material layer, a filled layer and a protection layer in a sectional view. A thickness of the filled layer is greater than a thickness of the protection layer. The thickness of the protection layer is greater than 0 ?m and less than 30 ?m. The plurality of light-emitting elements are located on the component arrangement region. This disclosure can improve the non-uniform brightness issue (hotspots) or enhance the optical performance.
    Type: Application
    Filed: February 9, 2022
    Publication date: June 2, 2022
    Inventors: Chung-Chun KUO, CHUN-FANG CHEN, HUI-WEN SU, WEI-YUAN CHEN, CHUNG-YU CHENG
  • Publication number: 20220173098
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip (IC) having a device section and a pick-up section. The IC includes a semiconductor substrate. A first fin of the semiconductor substrate is disposed in the device section. A second fin of the semiconductor substrate is disposed in the pick-up section and laterally spaced from the first fin in a first direction. A gate structure is disposed in the device section and laterally spaced from the second fin in the first direction. The gate structure extends laterally over the semiconductor substrate and the first fin in a second direction perpendicular to the first direction. A pick-up region is disposed on the second fin. The pick-up region continuously extends from a first sidewall of the second fin to a second sidewall of the second fin. The first sidewall is laterally spaced from the second sidewall in the first direction.
    Type: Application
    Filed: February 16, 2022
    Publication date: June 2, 2022
    Inventors: Hsin-Wen Su, Lien Jung Hung, Ping-Wei Wang, Wen-Chun Keng, Chih-Chuan Yang, Shih-Hao Lin
  • Patent number: 11345991
    Abstract: A semiconductor device is manufactured by modifying an electromagnetic field within a deposition chamber. In embodiments in which the deposition process is a sputtering process, the electromagnetic field may be modified by adjusting a distance between a first coil and a mounting platform. In other embodiments, the electromagnetic field may be adjusted by applying or removing power from additional coils that are also present.
    Type: Grant
    Filed: July 12, 2019
    Date of Patent: May 31, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jen-Chun Wang, Ya-Lien Lee, Chih-Chien Chi, Hung-Wen Su
  • Patent number: 11348929
    Abstract: A memory device includes a substrate, a first gate structure and a second gate structure, first, second, third source/drain structures, gate spacers, a first via and a second via, and a semiconductor layer. The first gate structure and the second gate structure are over the substrate. The first, second, third source/drain structures are over the substrate, in which the first and second source/drain structures are on opposite sides of the first gate structure, the second and third source/drain structures are on opposite sides of the second gate structure. The gate spacers are on opposite sidewalls of the first and second gate structures. The first via and the second via are over the first gate structure and the second gate structure, respectively, in which the first via is in contact with the first gate structure. The semiconductor layer is between the second via and the second gate structure.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: May 31, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen Su, Chia-En Huang, Shih-Hao Lin, Lien-Jung Hung, Ping-Wei Wang
  • Publication number: 20220165616
    Abstract: A method includes forming a first conductive feature in a first dielectric layer. A second dielectric layer is formed over the first conductive feature and the first dielectric layer. An opening is formed in the second dielectric layer. The opening exposes a top surface of the first conductive feature. The top surface of the first conductive feature includes a first metallic material and a second metallic material different from the first metallic material. A native oxide layer is removed from the top surface of the first conductive feature. A surfactant soaking process is performed on the top surface of the first conductive feature. The surfactant soaking process forms a surfactant layer over the top surface of the first conductive feature. A first barrier layer is deposited on a sidewall of the opening. The surfactant layer remains exposed at the end of depositing the first barrier layer.
    Type: Application
    Filed: February 11, 2022
    Publication date: May 26, 2022
    Inventors: Yao-Min Liu, Chia-Pang Kuo, Shu-Cheng Chin, Chih-Chien Chi, Cheng-Hui Weng, Hung-Wen Su, Ming-Hsing Tsai
  • Publication number: 20220130971
    Abstract: Methods and devices that provide a first fin structure, a second fin structure, and a third fin structure disposed over a substrate. A dielectric fin is formed between the first fin structure and the second fin structure, and a conductive line is formed between the second fin structure and the third fin structure.
    Type: Application
    Filed: October 27, 2020
    Publication date: April 28, 2022
    Inventors: Chih-Chuan Yang, Jing-Yi Lin, Hsin-Wen Su, Shih-Hao Lin
  • Patent number: 11316225
    Abstract: A battery container is adapted to be disposed at a battery charging station for containing a battery which has a charging port. The battery container includes a container body, a floating connector, and a coupling board. The container body includes a rear wall that is formed with a through hole. The floating connector extends movably through the through hole of the rear wall. The coupling board is secured co-movably to the floating connector and is slidable on the rear wall. The floating connector and the coupling board are movable relative to the container body and along a plane parallel to the rear wall when the battery is inserted into a receiving space of the container body to electrically connect the charging port of the battery to the floating connector.
    Type: Grant
    Filed: May 30, 2019
    Date of Patent: April 26, 2022
    Assignee: KWANG YANG MOTOR CO., LTD.
    Inventors: Wen-Pin Yu, Huang-Wen Su, Sz-Wei Tsai
  • Patent number: 11296095
    Abstract: A memory device includes a substrate, first semiconductor layers and second semiconductor layers alternately stacked over the substrate, a first gate structure and a second gate structure crossing the first semiconductor layers and the second semiconductor layers, a first via and a second via over the first gate structure and the second gate structure, and a first word line and a second word line over the first via and the second via. Along a lengthwise direction of the first and second gate structures, a width of the first semiconductor layers is narrower than a width of the second semiconductor layers.
    Type: Grant
    Filed: June 12, 2020
    Date of Patent: April 5, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsin-Wen Su, Yu-Kuan Lin, Shih-Hao Lin, Lien-Jung Hung, Ping-Wei Wang
  • Publication number: 20220102359
    Abstract: A memory device includes a substrate, first semiconductor fin, second semiconductor fin, first gate structure, second gate structure, first gate spacer, and a second gate spacer. The first gate structure crosses the first semiconductor fin. The second gate structure crosses the second semiconductor fin, the first gate structure extending continuously from the second gate structure, in which in a top view of the memory device, a width of the first gate structure is greater than a width of the second gate structure. The first gate spacer is on a sidewall of the first gate structure. The second gate spacer extends continuously from the first gate spacer and on a sidewall of the second gate structure, in which in the top view of the memory device, a width of the first gate spacer is less than a width of the second gate spacer.
    Type: Application
    Filed: September 28, 2020
    Publication date: March 31, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen SU, Chih-Chuan YANG, Shih-Hao LIN, Yu-Kuan LIN, Lien-Jung HUNG, Ping-Wei WANG
  • Publication number: 20220102366
    Abstract: A memory device includes a substrate, an active region, a first gate structure, a second gate structure, a first word line, and a second word line. The active region protrudes from a top surface of the substrate. The active region has at least one ring structure, in which when viewed from above, the ring structure has a first linear portion, a second linear portion, a first curved portion, and a second curved portion, the first curved portion connects first sides of the first and second linear portions, and the second curved portion connects second sides of the first and second linear portions. The first gate structure and the second gate structure are over the substrate and cross the active region. The first word line and the second word line are electrically connected to the first gate structure and the second gate structure, respectively.
    Type: Application
    Filed: September 28, 2020
    Publication date: March 31, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen SU, Yu-Kuan LIN, Lien-Jung HUNG, Ping-Wei WANG, Chia-En HUANG
  • Publication number: 20220102368
    Abstract: A memory device includes a substrate, a first gate structure and a second gate structure, first, second, third source/drain structures, gate spacers, a first via and a second via, and a semiconductor layer. The first gate structure and the second gate structure are over the substrate. The first, second, third source/drain structures are over the substrate, in which the first and second source/drain structures are on opposite sides of the first gate structure, the second and third source/drain structures are on opposite sides of the second gate structure. The gate spacers are on opposite sidewalls of the first and second gate structures. The first via and the second via are over the first gate structure and the second gate structure, respectively, in which the first via is in contact with the first gate structure. The semiconductor layer is between the second via and the second gate structure.
    Type: Application
    Filed: September 28, 2020
    Publication date: March 31, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen SU, Chia-En HUANG, Shih-Hao LIN, Lien-Jung HUNG, Ping-Wei WANG
  • Patent number: 11289812
    Abstract: The disclosure provides a single antenna system comprising a ground element, a feeding metal part, at least one shorting metal part, a radiating metal part, a decoupling circuit, a first feed source, and a second feed source. The single antenna system with an integrated decoupled circuit not only effectively achieves size reduction, but achieve high antenna isolation. Moreover, the single antenna system is applied for narrow-bezel notebooks and small-size antenna systems in future.
    Type: Grant
    Filed: October 21, 2020
    Date of Patent: March 29, 2022
    Assignee: ASUSTEK COMPUTER INC.
    Inventors: Che-Chi Wan, Saou-Wen Su, Cheng-Tse Lee
  • Patent number: 11282465
    Abstract: A display device includes a backlight module, and the backlight module includes a light-guiding plate, a light-emitting assembly, and an adhesive member. The light-emitting assembly is disposed correspondingly to the light-guiding plate, and includes a substrate and a plurality of light-emitting elements. The substrate includes a component arrangement region and a planar region in a top view, and includes a base material layer, a filled layer and a protection layer in a sectional view. A thickness of the protection layer is greater than 0 ?m and less than 30 ?m. The light-emitting elements are located on the component arrangement region. The adhesive member connects the light-guiding plate and the planar region of the substrate. An assembling method of the display device is also provided. This disclosure can improve the non-uniform brightness issue (hotspots) or enhance the optical performance.
    Type: Grant
    Filed: February 1, 2021
    Date of Patent: March 22, 2022
    Assignee: INNOLUX CORPORATION
    Inventors: Chung-Chun Kuo, Chun-Fang Chen, Hui-Wen Su, Wei-Yuan Chen, Chung-Yu Cheng
  • Publication number: 20220084937
    Abstract: A semiconductor structure and a method of forming the same are provided. A method includes depositing a dielectric layer over a conductive feature. The dielectric layer is patterned to form an opening therein. The opening exposes a first portion of the conductive feature. A first barrier layer is deposited on a sidewall of the opening. The first portion of the conductive feature remains exposed at the end of depositing the first barrier layer.
    Type: Application
    Filed: January 7, 2021
    Publication date: March 17, 2022
    Inventors: Yao-Min Liu, Chia-Pang Kuo, Chien Chung Huang, Chih-Yi Chang, Ya-Lien Lee, Chun-Chieh Lin, Hung-Wen Su, Ming-Hsing Tsai
  • Publication number: 20220077300
    Abstract: A gate structure includes a substrate divided into an N-type transistor region and a P-type transistor region. An interlayer dielectric covers the substrate. A first trench is embedded in the interlayer dielectric within the N-type transistor region. A first gate electrode having a bullet-shaped profile is disposed in the first trench. A gate dielectric contacts the first trench. An N-type work function layer is disposed between the gate dielectric layer and the first gate electrode. A second trench is embedded in the interlayer dielectric within the P-type transistor region. A second gate electrode having a first mushroom-shaped profile is disposed in the second trench. The gate dielectric layer contacts the second trench. The N-type work function layer is disposed between the gate dielectric layer and the second gate electrode. A first P-type work function layer is disposed between the gate dielectric layer and the N-type work function layer.
    Type: Application
    Filed: November 11, 2021
    Publication date: March 10, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Jie-Ning Yang, Wen-Tsung Chang, Po-Wen Su, Kuan-Ying Lai, Bo-Yu Su, Chun-Mao Chiou, Yao-Jhan Wang
  • Patent number: D949061
    Type: Grant
    Filed: September 9, 2020
    Date of Patent: April 19, 2022
    Assignee: ENERMAX TECHNOLOGY CORPORATION
    Inventor: Yen-Wen Su
  • Patent number: D953935
    Type: Grant
    Filed: April 26, 2019
    Date of Patent: June 7, 2022
    Assignee: GOGORO INC.
    Inventors: Sung-Fu Wang, Hsin-Wen Su, Chien-Chih Weng, Hsi-Wen Chen