Patents by Inventor William F. Clark
William F. Clark has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8383443Abstract: A non-uniform gate dielectric charge for pixel sensor cells, e.g., CMOS optical imagers, and methods of manufacturing are provided. The method includes forming a gate dielectric on a substrate. The substrate includes a source/drain region and a photo cell collector region. The method further includes forming a non-uniform fixed charge distribution in the gate dielectric. The method further includes forming a gate structure on the gate dielectric.Type: GrantFiled: May 14, 2010Date of Patent: February 26, 2013Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Andres Bryant, William F. Clark, Jr., John J. Ellis-Monaghan, Edward J. Nowak
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Patent number: 8350338Abstract: A semiconductor device is disclosed. In an embodiment, a semiconductor device includes a N-well within a P-well in a silicon layer, the silicon layer positioned atop a buried oxide layer of a silicon-on-insulator (SOI) substrate; a first source region and a second source region within a portion of the P-well; a first drain region and a second drain region within a portion of the P-well and within a portion of the N-well; and a gate positioned atop the N-well, wherein a lateral high field region is generated between the N-well and the P-well and a vertical high field region is generated between the gate and the N-well. A related method is disclosed.Type: GrantFiled: February 8, 2011Date of Patent: January 8, 2013Assignee: International Business Machines CorporationsInventors: William F. Clark, Jr., Yun Shi
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Publication number: 20120301990Abstract: Pixel sensor cells, methods of fabricating pixel sensor cells, and design structures for a pixel sensor cell. The pixel sensor cell has a gate structure that includes a gate dielectric and a gate electrode on the gate dielectric. The gate electrode includes a layer with first and second sections that have a juxtaposed relationship on the gate dielectric. The second section of the gate electrode is comprised of a conductor, such as doped polysilicon or a metal. The first section of the gate electrode is comprised of a metal having a higher work function than the conductor comprising the second section so that the gate structure has an asymmetric threshold voltage.Type: ApplicationFiled: August 10, 2012Publication date: November 29, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Brent A. Anderson, Andres Bryant, William F. Clark, JR., John J. Ellis-Monaghan, Edward J. Nowak
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Patent number: 8299544Abstract: Disclosed is a field effect transistor (FET), in which ohmic body contact(s) are placed relatively close to the active region. The FET includes a semiconductor layer, where the active region and body contact region(s) are defined by a trench isolation structure and where a body region is below and abuts the active region, the trench isolation structure and the body contact region(s). A gate traverses the active region. Dummy gate(s) are on the body contact region(s). A contact extends through each dummy gate to the body contact region below. Dielectric material isolates the contact(s) from the dummy gate(s). During processing, the dummy gate(s) act as blocks to ensure that the body contact regions are not implanted with source/drain dopants or source/drain extension dopants and, thereby to ensure that the body contacts, as formed, are ohmic. Also disclosed are an integrated circuit structure with stacked FETs, having such ohmic body contacts, and associated methods.Type: GrantFiled: January 4, 2011Date of Patent: October 30, 2012Assignee: International Business Machines CorporationInventors: Michel J. Abou-Khalil, William F. Clark, Jr., Yun Shi
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Patent number: 8299505Abstract: Pixel sensor cells, methods of fabricating pixel sensor cells, and design structures for a pixel sensor cell. The pixel sensor cell has a gate structure that includes a gate dielectric and a gate electrode on the gate dielectric. The gate electrode includes a layer with first and second sections that have a juxtaposed relationship on the gate dielectric. The second section of the gate electrode is comprised of a conductor, such as doped polysilicon or a metal. The first section of the gate electrode is comprised of a metal having a higher work function than the conductor comprising the second section so that the gate structure has an asymmetric threshold voltage.Type: GrantFiled: February 17, 2011Date of Patent: October 30, 2012Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Andres Bryant, William F. Clark, Jr., John Joseph Ellis-Monaghan, Edward J. Nowak
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Patent number: 8288806Abstract: Disclosed are embodiments of an asymmetric field effect transistor structure and a method of forming the structure in which both series resistance in the source region (Rs) and gate to drain capacitance (Cgd) are reduced in order to provide optimal performance (i.e., to provide improved drive current with minimal circuit delay). Specifically, different heights of the source and drain regions and/or different distances between the source and drain regions and the gate are tailored to minimize series resistance in the source region (i.e., in order to ensure that series resistance is less than a predetermined resistance value) and in order to simultaneously to minimize gate to drain capacitance (i.e., in order to simultaneously ensure that gate to drain capacitance is less than a predetermined capacitance value).Type: GrantFiled: September 27, 2011Date of Patent: October 16, 2012Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Andres Bryant, William F. Clark, Jr., Edward J. Nowak
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Publication number: 20120235216Abstract: Semiconductor structures with damascene metal gates and pixel sensor cell shields, methods of manufacture and design structures are provided. The method includes forming a dielectric layer over a dummy gate structure. The method further includes forming one or more recesses in the dielectric layer. The method further includes removing the dummy gate structure in the dielectric layer to form a trench. The method further includes forming metal in the trench and the one more recesses in the dielectric layer to form a damascene metal gate structure in the trench and one or more metal components in the one or more recesses.Type: ApplicationFiled: March 18, 2011Publication date: September 20, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Brent A. ANDERSON, Andres Bryant, William F. Clark, JR., John J. Ellis-Monaghan, Edward J. Nowak
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Publication number: 20120211854Abstract: Pixel sensor cells, methods of fabricating pixel sensor cells, and design structures for a pixel sensor cell. The pixel sensor cell has a gate structure that includes a gate dielectric and a gate electrode on the gate dielectric. The gate electrode includes a layer with first and second sections that have a juxtaposed relationship on the gate dielectric. The second section of the gate electrode is comprised of a conductor, such as doped polysilicon or a metal. The first section of the gate electrode is comprised of a metal having a higher work function than the conductor comprising the second section so that the gate structure has an asymmetric threshold voltage.Type: ApplicationFiled: February 17, 2011Publication date: August 23, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Brent A. Anderson, Andres Bryant, William F. Clark, JR., John J. Ellis-Monaghan, Edward J. Nowak
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Publication number: 20120199906Abstract: A semiconductor device is disclosed. In an embodiment, a semiconductor device includes a N-well within a P-well in a silicon layer, the silicon layer positioned atop a buried oxide layer of a silicon-on-insulator (SOI) substrate; a first source region and a second source region within a portion of the P-well; a first drain region and a second drain region within a portion of the P-well and within a portion of the N-well; and a gate positioned atop the N-well, wherein a lateral high field region is generated between the N-well and the P-well and a vertical high field region is generated between the gate and the N-well. A related method is disclosed.Type: ApplicationFiled: February 8, 2011Publication date: August 9, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: William F. Clark, JR., Yun Shi
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Publication number: 20120181588Abstract: Pixel sensor cells, methods of fabricating pixel sensor cells, and design structures for a pixel sensor cell. A transistor in the pixel sensor cell has a gate structure that includes a gate dielectric with a thick region and a thin region. A gate electrode of the gate structure is formed on the thick region of the gate dielectric and the thin region of the gate dielectric. The thick region of the gate dielectric and the thin region of the gate dielectric provide the transistor with an asymmetric threshold voltage.Type: ApplicationFiled: January 13, 2011Publication date: July 19, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Brent A. Anderson, Andres Bryant, William F. Clark, JR., John J. Ellis-Monaghan, Edward J. Nowak
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Publication number: 20120168832Abstract: Disclosed are embodiments of an asymmetric field effect transistor structure and a method of forming the structure in which both series resistance in the source region (Rs) and gate to drain capacitance (Cgd) are reduced in order to provide optimal performance (i.e., to provide improved drive current with minimal circuit delay). Specifically, different heights of the source and drain regions and/or different distances between the source and drain regions and the gate are tailored to minimize series resistance in the source region (i.e., in order to ensure that series resistance is less than a predetermined resistance value) and in order to simultaneously to minimize gate to drain capacitance (i.e., in order to simultaneously ensure that gate to drain capacitance is less than a predetermined capacitance value).Type: ApplicationFiled: September 27, 2011Publication date: July 5, 2012Applicant: International Business Machines CorporationInventors: Brent A. Anderson, Andres Bryant, William F. Clark, JR., Edward J. Nowak
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Publication number: 20120168878Abstract: Disclosed is a field effect transistor (FET), in which ohmic body contact(s) are placed relatively close to the active region. The FET includes a semiconductor layer, where the active region and body contact region(s) are defined by a trench isolation structure and where a body region is below and abuts the active region, the trench isolation structure and the body contact region(s). A gate traverses the active region. Dummy gate(s) are on the body contact region(s). A contact extends through each dummy gate to the body contact region below. Dielectric material isolates the contact(s) from the dummy gate(s). During processing, the dummy gate(s) act as blocks to ensure that the body contact regions are not implanted with source/drain dopants or source/drain extension dopants and, thereby to ensure that the body contacts, as formed, are ohmic. Also disclosed are an integrated circuit structure with stacked FETs, having such ohmic body contacts, and associated methods.Type: ApplicationFiled: January 4, 2011Publication date: July 5, 2012Applicant: International Business Machines CorporationInventors: Michel J. Abou-Khalil, William F. Clark, JR., Yun Shi
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Publication number: 20120132994Abstract: Embodiments of the present invention relate generally to semiconductor devices and, more particularly, to a structure for high-voltage (HV) semiconductor-on-insulator (SOI) devices and methods for their formation. In one embodiment, the invention provides a semiconductor-on-insulator (SOI) device comprising: a substrate; an insulator layer atop the substrate; a polysilicon layer atop the insulator layer; a device layer atop the polysilicon layer, the device layer comprising: a P-well; an N-well; and an undoped silicon region between the P-well and the N-well; and a trench isolation adjacent one of the P-well and the N-well and extending through the device layer and the polysilicon layer to the insulator layer.Type: ApplicationFiled: November 29, 2010Publication date: May 31, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: William F. Clark, JR., Yun Shi
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Patent number: 8106457Abstract: Structures and a method for detecting ionizing radiation using silicon-on-insulator (SOI) technology are disclosed. In one embodiment, the invention includes a substrate having a buried insulator layer formed over the substrate and an active layer formed over the buried insulator layer. Active layer may be fully depleted. A transistor is formed over the active layer, and includes a first gate conductor, a first gate dielectric and source/drain diffusion regions. The first gate conductor may include a material having a substantially (or fully) depleted doping concentration such that it has a resistivity higher than doped polysilicon such as intrinsic polysilicon. A second gate conductor is formed below the buried insulator layer and provides a second gate dielectric corresponding to the second gate conductor. A channel region between the first gate conductor and the second gate conductor is controlled by the second gate conductor (back gate) such that it acts as a radiation detector.Type: GrantFiled: December 19, 2007Date of Patent: January 31, 2012Assignee: International Business Machines CorporationInventors: William F. Clark, Jr., Edward J. Nowak
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Publication number: 20110291171Abstract: A variable capacitance device including a plurality of FETs, the sources and drains of each FET being coupled to a first terminal, the gates of each FET being coupled to a second terminal, the capacitance of said device between said first and second terminals varying as a function of the voltage across said terminals, the device further including a biasing providing a respective backgate bias voltage to each the FETs setting a respective gate threshold voltage thereof. The aggregate V-C characteristic can be tuned as desired, either at design time or dynamically. The greater the number of FETs forming the varactor, the greater the number of possible Vt values that can be individually set, so that arbitrary V-C characteristics can be more closely approximated.Type: ApplicationFiled: March 17, 2011Publication date: December 1, 2011Applicant: International Business Machines CorporationInventors: John J. Pekarik, William F. Clark, JR., Robert J. Gauthier, JR., Yun Shi, Yanli Zhang
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Publication number: 20110278649Abstract: A non-uniform gate dielectric charge for pixel sensor cells, e.g., CMOS optical imagers, and methods of manufacturing are provided. The method includes forming a gate dielectric on a substrate. The substrate includes a source/drain region and a photo cell collector region. The method further includes forming a non-uniform fixed charge distribution in the gate dielectric. The method further includes forming a gate structure on the gate dielectric.Type: ApplicationFiled: May 14, 2010Publication date: November 17, 2011Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Brent A. ANDERSON, Andres BRYANT, William F. CLARK, JR., John J. ELLIS-MONAGHAN, Edward J. NOWAK
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Patent number: 8053314Abstract: Disclosed are embodiments of an asymmetric field effect transistor structure and a method of forming the structure in which both series resistance in the source region (Rs) and gate to drain capacitance (Cgd) are reduced in order to provide optimal performance (i.e., to provide improved drive current with minimal circuit delay). Specifically, different heights of the source and drain regions and/or different distances between the source and drain regions and the gate are tailored to minimize series resistance in the source region (i.e., in order to ensure that series resistance is less than a predetermined resistance value) and in order to simultaneously to minimize gate to drain capacitance (i.e., in order to simultaneously ensure that gate to drain capacitance is less than a predetermined capacitance value).Type: GrantFiled: January 5, 2011Date of Patent: November 8, 2011Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Andres Bryant, William F. Clark, Jr., Edward J. Nowak
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Patent number: 8039376Abstract: A method for forming a semiconductor structure. The method includes providing a semiconductor structure including a semiconductor substrate. The semiconductor substrate includes (i) a top substrate surface which defines a reference direction perpendicular to the top substrate surface and (ii) a semiconductor body region. The method further includes implanting an adjustment dose of dopants of a first doping polarity into the semiconductor body region by an adjustment implantation process. Ion bombardment of the adjustment implantation process is in the reference direction. The method further includes (i) patterning the semiconductor substrate resulting in side walls of the semiconductor body region being exposed to a surrounding ambient and then (ii) implanting a base dose of dopants of a second doping polarity into the semiconductor body region by a base implantation process. Ion bombardment of the base implantation process is in a direction which makes a non-zero angle with the reference direction.Type: GrantFiled: November 14, 2007Date of Patent: October 18, 2011Assignee: International Business Machines CorporationInventors: William F. Clark, Jr., Edward Joseph Nowak
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Publication number: 20110221030Abstract: A semiconductor device including at least one capacitor formed in wiring levels on a silicon-on-insulator (SOI) substrate, wherein the at least one capacitor is coupled to an active layer of the SOI substrate. A method of fabricating a semiconductor structure includes forming an SOI substrate, forming a BOX layer over the SOI substrate, and forming at least one capacitor in wiring levels on the BOX layer, wherein the at least one capacitor is coupled to an active layer of the SOI substrate.Type: ApplicationFiled: May 26, 2011Publication date: September 15, 2011Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: William F. CLARK, JR., Stephen E. LUCE
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Patent number: 8017489Abstract: A semiconductor structure and a method for fabricating the semiconductor structure provide a field effect device structure. The field effect device structure includes a gate electrode located over a channel region within a semiconductor substrate that separates a plurality of source and drain regions within the semiconductor substrate. The channel region includes a surface layer that comprises a carbon doped semiconductor material. The source and drain regions include a surface layer that comprises a semiconductor material that is not carbon doped. The particular selection of material for the channel region and source and drain regions provide for inhibited dopant diffusion and enhanced mechanical stress within the channel region, and thus enhanced performance of the field effect device.Type: GrantFiled: March 13, 2008Date of Patent: September 13, 2011Assignee: International Business Machines CorporationInventors: William F. Clark, Jr., Ephrem G. Gebgreselasie, Xuefeng Liu, Robert Russell Robison