High performance compliant substrate
A substrate structure is presented that can include a porous polyimide material and electrodes formed in the porous polyimide material. In some examples, a method of forming a substrate can include depositing a barrier layer on a substrate; depositing a resist over the barrier layer; patterning and etching the resist; forming electrodes; removing the resist; depositing a porous polyimide aerogel; depositing a dielectric layer over the aerogel material; polishing a top side of the interposer to expose the electrodes; and removing the substrate from the bottom side of the interposer.
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This application is a divisional of, and hereby claims priority to, pending U.S. patent application Ser. No. 14/686,671, filed on Apr. 14, 2015, the entirety of which is hereby incorporated by reference herein for all purposes.
BACKGROUND OF THE INVENTIONTechnical Field
Embodiments of the present invention relate High Performance Interposers.
Discussion of Related Art
In Chip-first approach, the die are flip-chip mounted on a thick interposer wafer and then molded. In addition to providing electrical connections through the interposer, thermal insulation and warpage characteristics are also considered. Therefore, interposers should have good mechanical and thermal characteristics in order to both thermally insulate between devices mounted on the interposer and to reduce warpage of the final package.
Therefore, there is a need for high performance interposers and substrates.
SUMMARYIn accordance with aspects of the present invention, a substrate structure can include a porous polyimide material; and electrodes formed in the porous polyimide material. A method of forming a substrate can include depositing a barrier layer on a substrate; depositing a resist over the barrier layer; patterning and etching the resist; forming electrodes; removing the resist; depositing a porous polyimide aerogel; depositing a dielectric layer over the aerogel material; polishing a top side of the interposer to expose the electrodes; and removing the substrate from the bottom side of the interposer.
These and other embodiments are further discussed below with respect to the following figures.
In the following description, specific details are set forth describing some embodiments of the present invention. It will be apparent, however, to one skilled in the art that some embodiments may be practiced without some or all of these specific details. The specific embodiments disclosed herein are meant to be illustrative but not limiting. One skilled in the art may realize other elements that, although not specifically described here, are within the scope and the spirit of this disclosure.
This description and the accompanying drawings that illustrate inventive aspects and embodiments should not be taken as limiting—the claims define the protected invention. Various mechanical, compositional, structural, and operational changes may be made without departing from the spirit and scope of this description and the claims. In some instances, well-known structures and techniques have not been shown or described in detail in order not to obscure the invention.
Additionally, the drawings are not to scale. Relative sizes of components are for illustrative purposes only and do not reflect the actual sizes that may occur in any actual embodiment of the invention. Like numbers in two or more figures represent the same or similar elements.
Most aerogel products currently available are silica based and break down on handling, shedding small dust particles. Consequently, most conventional aerogels are encapsulated to prevent the dust. Additionally, the insulation properties of the aerogel degrade significantly over time. However, material 104 can be, for example, formed from a porous polyimide aerogel. Polyimide aerogels are flexible, mechanically robust and do not shed dust. Further, polyimide aerogels have good thermal conductivity and dielectric properties.
One polyimide aerogel has been developed by NASA and is described more fully in “Mechanically Strong, Flexible Polyimide Aerogels Cross-Linked with Aromatic Triamine” by Mary Ann B. Meador, Ericka J. Malow, Rebecca Silva, Sarah Wright, Derek Quade, Stephanie L. Vivod, Haiquan Guo, Jiao Guo, and Miko Cakmark, ACS Applied Materials & Interfaces, Sep. 6, 2012 and “Polyimide Aerogels Cross-Linked through Amine Functionalized Polyoligomeric Silsesquioxane” by Haiquan Guo, Mary Ann B. Meador, Linda McCorkle, Derek J. Quade, Jiao Guo, Bart Hamilton, Miko Cakmak, and Guilherme Sprowl, ACS Applied Materials & Interfaces, Feb. 4, 2011. Polyimide aerogels can be manufactured as a thin film, which can be flexible and yet maintain excellent tensile properties. Polyimide aerogels can be about 500 times stronger than traditional silica aerogels. Polyimide aerogels can be custom manufactured as thicker parts with no need to encapsulate or layer on a flexible matrix. In some embodiments, polyimide aerogels can have low thermal conductivity, for examples k values of 14-20 mW/m-K, which offers 2-5 times improved performance over polymer foams. The R values can range from 2-10 times higher than polymer foams, which is in line with silica aerogels of the same density. Polyimide aerogels can be composed of more than 95 percent air by volume and have densities as low as 0.08 g/cm3. Polyimide aerogels can withstand temperatures up to 300° C.
In some embodiments, polyimide gels can be formed from combinations of diamine and dianhydride. For example, a combination of polyamic acid solutions of 3,3′,4,4′-bipheeyltetracroboxylic dianhydride (BPDA), bisaniline-p-xylidene (BAX) and OAPS that are chemically imidized and dried using supercritical CO2. The polyimide gels can be cross-linked through a polyhedral oligomeric silsesquioxane (POSS) or aromatic triamine (TAB).
Polyimide aerogels can have a density as low as 0.08 g/cm3, prosity greater than 90%, dielectric constant (X-band between 1.1 and 1.3), and Young's Modulas of 1-100 MPa depending on density.
The thermal conductivity of polyimide aerogels such as those used in the present embodiments, at room temperature, is about k=14 mW/m-K. This thermal conductivity is very low. For comparison, the thermal conductivity of various materials is provided in the following table:
As shown in
In some embodiments, the coated metal 102 protrudes beyond the surface of the coated polymer aerogel. For example, the coated metal 102 may protrude at least more than 1 micron over the surface of the formed aerogel. A removal may be performed to expose the conductive electrode 102 on the top prior to the attachment of device 404. In certain embodiments, metal features 102 may not extend through the foam material, e.g. where damascene, conductive lines, traces, or other conductive features are desired. Moreover, while metal features 102 are shown extending through layers 302 and 304, this is not required and the features may not protrude through either or both of these layers.
In some embodiments, in step 216, a low-stress dielectric layer, for example a Si-containing layer 310, is deposited over foam 104 as shown in
In some embodiments, the mesoporous layer of material 104 may be disposed over the seed layer 304. Cavities are then formed in the mesoporous layer material 104 by RIE methods or by ablation using laser beam for example. The exposed seed layer is cleaned and the conductive electrode is formed by plating methods or screen printing or particle filling methods, prior to subsequent steps. For example, solder balls or particles may be deposited in the cavities in material 104. The material 104 is thermal treated to fuse the solder material within the cavity. Any unwanted solder or other materials on the surface of material 104 is removed. In some applications, the removal step can comprise of high precision milling step to remove for example the top five (5) microns of material 104.
In some embodiments, the attached devices can be encapsulated, for example by transfer molding methods. In some embodiments, the Young's modulus of the encapsulant material is higher than that of aerogel material 104. In some embodiments, the Young's modulus of the encapsulant is similar to that of the aerogel material 104. In some embodiments, the Young's modulus of the encapsulant is lower than that of the aerogel 104. In some embodiments, the encapsulant can be mesoporous material. The top surface of the encapsulant may be polished if necessary to further reduce the thickness of the die and encapsulant. The encapsulated structures can be separated from the support layer 302 and any unwanted material on 104 can be removed including the original plating seed layer to expose the conductive feature 102.
Porous polyimide or mesoporous material 104 provides high thermal performance, high mechanical strength and the ability to blunt stress fields and blunt propagating cracks. The ability to block cracks suppresses the propagation of cracks emanating from disposed on the topside or bottom side of material 104. In some embodiments, the material 104 may deform microscopically locally to cushion the large stresses generated by the various mechanical and electrical elements it supports. The suppression of stress fields and crack propagation in microelectronic packages improves the yield and reliability of the entire package or packaged devices.
The top surface may be attached to a support layer to remove the support layer 302. In some applications where the support layer is comprised of embedded conductor 102, the support layer 302 may thinned down by known methods and processed to reveal the bottom side of the electrodes 102 in the remaining support layer 302 (not shown). Other structures may be attached to the backside of the support layer. The other structures may include a board, a substrate, a chip, a cooling element or another interposer.
In step 220, as illustrated in
Additionally, the porous polyimide or mesoporous material 408 provides high mechanical strength and also blunts stress fields and blunts propagating cracks that may originate from the presence of devices 404. In some embodiments, the layer 408 may deform microscopically locally to cushion the large stresses generated by the presence of various devices 404 and electrical elements 102. The suppression of stress fields and crack propagation protects the devices 404 from cracking and experiencing stress fields from neighboring devices in microelectronic packages.
In some embodiments, there are no conducting thru-electrodes in the polyimide aerogel or mesoporous layer 104. Conductive features can be formed in the patterned mesoporous layer 104 by damascene or non-damascene method or by combination of both methods. A suitable dielectric layer or the polyimide aerogel or polyimide layer can be used to fabricated multilevel metallization feature over the layer 104. Various homogenous and/or heterogeneous devices may be assembled or attached or couple electrically and mechanically to the metallization features or pads disposed over layer 104. The various attached said devices communicate with each other through the interconnect layer disposed over layer 104. In some embodiments, active or passive devices can be embedded in layer 104 and the embedded devices can communicate with other devices via their terminals exposed on the top or bottom surface of layer 104.
In other embodiments of this invention layer 104 comprise a mesoporous inorganic material formed by aerogel and thermal methods. In one application, Young's modulus of the inorganic mesoporous layer 104 is higher than the dielectric layer formed on the top or bottom surface of the mesoporous layer 104. While the implementations described above generally indicate that the metal features 102 are formed and patterned before foam layer 104 is formed, this is not a requirement. The foam layer 104 maybe formed first with openings formed therein. The metal features 102 may then be formed within the openings as described above, e.g. with regard to
In the preceding specification, various embodiments have been described with reference to the accompanying drawings. It will, however, be evident that various modifications and changes may be made thereto, and additional embodiments may be implemented, without departing from the broader scope of the invention as set for in the claims that follow. The specification and drawings are accordingly to be regarded in an illustrative rather than restrictive sense.
Claims
1. A substrate structure, comprising:
- a porous polyimide material;
- a plurality of electrodes extending in the porous polyimide material;
- a barrier layer coating each of the electrodes to isolate each of the plurality of electrodes from the porous polyimide material; and
- a first redistribution layer on a first side of the porous polyimide material, the redistribution layer making electrical contact with the electrodes.
2. The structure of claim 1, further including a second redistribution layer on a second side of the porous polyimide material, the electrodes providing electrical paths from the first redistribution layer to the second redistribution layer.
3. The structure of claim 1, further including a porous spacer formed over the first redistribution layer to thermally separate a first device from a second device.
4. A substrate structure, comprising:
- a porous polyimide material;
- a plurality of electrodes extending in the porous polyimide material;
- a barrier layer coating each of the electrodes to isolate each of the plurality of electrodes from the porous polyimide material; and
- a top fiber based layer on a top side of the porous polyimide material.
5. The structure of claim 4, further including a bottom fiber based layer on a bottom side of the porous polyimide material.
6. The structure of claim 4, further including a top redistribution layer over the top fiber based layer.
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Type: Grant
Filed: May 11, 2017
Date of Patent: Sep 10, 2019
Patent Publication Number: 20170250140
Assignee: Invensas Corporation (San Jose, CA)
Inventors: Cyprian Emeka Uzoh (San Jose, CA), Rajesh Katkar (San Jose, CA)
Primary Examiner: Xiaoliang Chen
Application Number: 15/592,973
International Classification: H01M 2/08 (20060101); H01M 2/16 (20060101); H01M 2/18 (20060101); H01M 4/02 (20060101); H01M 4/04 (20060101); H01M 4/52 (20100101); H01M 4/80 (20060101); H01M 4/485 (20100101); H05K 1/00 (20060101); H05K 3/10 (20060101); H05K 3/40 (20060101); H05K 3/46 (20060101); H01L 23/00 (20060101); H01L 21/48 (20060101); H01L 23/498 (20060101); H01L 23/538 (20060101); H05K 1/02 (20060101); H05K 1/03 (20060101); H01L 23/15 (20060101);