Collimator for a physical vapor deposition (PVD) chamber
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Description
The broken lines in the drawings illustrate portions of the article that form no part of the claimed design.
Claims
We claim the ornamental design for a collimator for a physical vapor deposition (PVD) chamber, as shown and described.
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Patent History
Patent number: D1026054
Type: Grant
Filed: Apr 22, 2022
Date of Patent: May 7, 2024
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Round Rock, TX), Keith A. Miller (Mountain View, CA), Luke Vianney Varkey (Milpitas, CA), Xiangjin Xie (Fremont, CA), Kishor Kumar Kalathiparambil (Santa Clara, CA)
Primary Examiner: Christy Nemeth
Assistant Examiner: Justin M. Donaldson
Application Number: 29/835,991
Type: Grant
Filed: Apr 22, 2022
Date of Patent: May 7, 2024
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Round Rock, TX), Keith A. Miller (Mountain View, CA), Luke Vianney Varkey (Milpitas, CA), Xiangjin Xie (Fremont, CA), Kishor Kumar Kalathiparambil (Santa Clara, CA)
Primary Examiner: Christy Nemeth
Assistant Examiner: Justin M. Donaldson
Application Number: 29/835,991
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)