Collimator for a physical vapor deposition chamber
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The dashed lines in the drawings represent unclaimed environment and form no part of the claimed design.
Claims
The ornamental design for a collimator for a physical vapor deposition chamber, as shown and described.
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Type: Grant
Filed: Mar 16, 2018
Date of Patent: Sep 10, 2019
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Milpitas, CA), Lanlan Zhong (Santa Clara, CA), Fuhong Zhang (San Jose, CA), Zheng Wang (Mountain View, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/640,788