Susceptor cover

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Description

FIG. 1 is a perspective view of a susceptor showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross sectional view taken along lines 8-8 in FIG. 2.

Claims

The ornamental design for a susceptor cover as shown and described.

Referenced Cited
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Foreign Patent Documents
1711119 March 2022 JP
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Other references
  • TaC Coated Graphite Susceptor,https://www.semicorex.com/tac-coated-graphite-susceptor.html, 2025. (Year: 2025).
  • Wafer Carrier, https://www.semicorex.com/wafer-carrier.html, 2025. (Year: 2025).
  • Focus Ring, https://astindex.com/ceramic/focus-ring, 2025. (Year: 2025).
Patent History
Patent number: D1095472
Type: Grant
Filed: Mar 28, 2023
Date of Patent: Sep 30, 2025
Assignee: NuFlare Technology, Inc. (Kanagawa)
Inventors: Kunihiko Suzuki (Shizuoka), Takuto Umetsu (Kamakura)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/888,131