Semiconductor wafer and susceptor heating

- NuFlare Technology, Inc.
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Description

FIG. 1 is a perspective view of a semiconductor wafer and susceptor heating showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 2.

The broken lines are shown in the views for illustrative purposes only and form no part of the claimed design.

Claims

The ornamental design for a semiconductor wafer and susceptor heating as shown and described.

Referenced Cited
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Other references
  • Semiconductor and Wafer Processing Solutions,https://www.castaluminumsolutions.com/semiconductor-wafer-heaters/,2024. (Year: 2024).
Patent History
Patent number: D1052547
Type: Grant
Filed: Mar 28, 2023
Date of Patent: Nov 26, 2024
Assignee: NuFlare Technology, Inc. (Kanagawa)
Inventors: Kunihiko Suzuki (Shizuoka), Takuto Umetsu (Kamakura)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/888,143