Semiconductor wafer and susceptor heating
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Description
The broken lines are shown in the views for illustrative purposes only and form no part of the claimed design.
Claims
The ornamental design for a semiconductor wafer and susceptor heating as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
Other references
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Patent History
Patent number: D1052547
Type: Grant
Filed: Mar 28, 2023
Date of Patent: Nov 26, 2024
Assignee: NuFlare Technology, Inc. (Kanagawa)
Inventors: Kunihiko Suzuki (Shizuoka), Takuto Umetsu (Kamakura)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/888,143
Type: Grant
Filed: Mar 28, 2023
Date of Patent: Nov 26, 2024
Assignee: NuFlare Technology, Inc. (Kanagawa)
Inventors: Kunihiko Suzuki (Shizuoka), Takuto Umetsu (Kamakura)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/888,143
Classifications