Seal for chemical mechanical polishing device

- EBARA CORPORATION
Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

1. Seal for chemical mechanical polishing device

1.1 : Perspective

1.2 : Front

1.3 : Back

1.4 : Top

1.5 : Bottom

1.6 : Right

1.7 : Left

1.8 : Cross sectional

1.9 : Enlarged

1.10 : Reference view

The article is a seal for a top ring of a chemical mechanical polishing device. The feature of the design resides in the shape and configuration of the article as shown in the reproductions. Reproduction 1.8 is an enlarged cross-sectional view taken along the line 1.8-1.8 in Reproduction 1.4. Reproduction 1.9 is an enlarged view of a portion 1.9 of the article in Reproduction 1.8. The broken lines shown in Reproduction 1.10 illustrate environmental subject matter and form no part of the claimed design. Additionally, the dash-dot broken lines are for the purpose of illustrating the enlarged views and form no part of the claimed design.

Claims

The ornamental design for a seal for chemical mechanical polishing device as shown and described.

Referenced Cited
U.S. Patent Documents
D450729 November 20, 2001 Welsh
D456824 May 7, 2002 Welsh
D621427 August 10, 2010 Dow
D638380 May 24, 2011 Kuzuoka
D642996 August 9, 2011 Miyake
D643820 August 23, 2011 Kuzuoka
D674364 January 15, 2013 Hirano
D685335 July 2, 2013 Tiner
D692843 November 5, 2013 Masuda
D723596 March 3, 2015 Yuno
D784276 April 18, 2017 Tiner
D879046 March 24, 2020 Wladyka
D881822 April 21, 2020 Wladyka
D909322 February 2, 2021 Yoshida
D920399 May 25, 2021 Shin
D933032 October 12, 2021 Yoshida
D998827 September 12, 2023 Wladyka
D1003328 October 31, 2023 Lin
D1051186 November 12, 2024 Bassir
D1060281 February 4, 2025 Taylor
20240416480 December 19, 2024 Tajima
Patent History
Patent number: D1119829
Type: Grant
Filed: Sep 26, 2023
Date of Patent: Mar 24, 2026
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Kazuhiro Tajima (Ota-ku), Makoto Kashiwagi (Ota-ku), Manato Furusawa (Ota-ku)
Primary Examiner: Rhea Shields
Assistant Examiner: Leah E Hoeferkamp
Application Number: 35/522,479