Susceptor cover of semiconductor manufacturing apparatus
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The broken lines shown in the drawings represent portions of the susceptor cover of semiconductor manufacturing apparatus that form no part of the claimed design. The dot-dashed lines represent the boundary lines of the claimed design.
Claims
The ornamental design for a susceptor cover of semiconductor manufacturing apparatus, as shown and described.
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Type: Grant
Filed: Sep 8, 2023
Date of Patent: Mar 31, 2026
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventor: Daiki Taniguchi (Toyama)
Primary Examiner: Barbara Fox
Assistant Examiner: Lorna M Georges
Application Number: 29/911,808