Vented susceptor

Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a front perspective view of a first embodiment of a vented susceptor, showing our new design;

FIG. 2 is a back perspective view thereof;

FIG. 3 is a left side view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a front perspective view of a second embodiment of a vented susceptor, showing our new design;

FIG. 6 is a back perspective view thereof;

FIG. 7 is a left side view thereof; and,

FIG. 8 is a right side view thereof.

The shaded surface areas are claimed between the broken lines, but the outer perimeter of the broken lines and any surface area within the broken lines that is not shaded forms no part of the claimed design. The shaded surface areas between and adjacent to the solid lines and dash-dash broken lines form part of the claimed design. The dash-dash broken lines in FIGS. 1-8 form no part of the claimed design. The two parallel, horizontal dash-dash lines adjacent to the outer edges of the sides of the vented susceptor in FIGS. 1-8 represent seams that form no part of the claimed design.

Claims

The ornamental design for a vented susceptor, as shown and described.

Referenced Cited
U.S. Patent Documents
3407783 October 1968 Capita
3549847 December 1970 Clark et al.
3641974 February 1972 Yamada et al.
3796182 March 1974 Rosler
4499354 February 12, 1985 Hill et al.
4522149 June 11, 1985 Garbis et al.
4560420 December 24, 1985 Lord
4710428 December 1, 1987 Tamamizu et al.
4821674 April 18, 1989 deBoer et al.
4958061 September 18, 1990 Wakabayashi et al.
4978567 December 18, 1990 Miller
4986215 January 22, 1991 Yamada et al.
4990374 February 5, 1991 Keeley et al.
5033407 July 23, 1991 Mizuno et al.
5044943 September 3, 1991 Bowman et al.
5071670 December 10, 1991 Kelly
5074017 December 24, 1991 Toya et al.
5098198 March 24, 1992 Nulman et al.
5108792 April 28, 1992 Anderson et al.
5119540 June 9, 1992 Kong et al.
5119541 June 9, 1992 Ohmi et al.
5121531 June 16, 1992 Severns et al.
5156820 October 20, 1992 Wong et al.
5188501 February 23, 1993 Tomita et al.
5199483 April 6, 1993 Bahng
5200157 April 6, 1993 Toya et al.
5242501 September 7, 1993 McDiarmid
5292554 March 8, 1994 Sinha et al.
5298465 March 29, 1994 Levy
5304248 April 19, 1994 Cheng et al.
5306699 April 26, 1994 Eddy
5308645 May 3, 1994 Zachman et al.
5332442 July 26, 1994 Kubodera et al.
5343938 September 6, 1994 Schmidt
5354715 October 11, 1994 Wang et al.
5356486 October 18, 1994 Sugarman et al.
5370739 December 6, 1994 Foster et al.
5383971 January 24, 1995 Selbrede
5393349 February 28, 1995 Ohkase
5403401 April 4, 1995 Haafkens et al.
5421893 June 6, 1995 Perlov
5427620 June 27, 1995 deBoer et al.
5444217 August 22, 1995 Moore et al.
5455069 October 3, 1995 Lee
5456757 October 10, 1995 Aruga et al.
5461214 October 24, 1995 Peck et al.
5467220 November 14, 1995 Xu
5492566 February 20, 1996 Sumnitsch
5514439 May 7, 1996 Sibley
5516367 May 14, 1996 Lei et al.
5527393 June 18, 1996 Sato et al.
5549756 August 27, 1996 Sorensen et al.
5551985 September 3, 1996 Brors et al.
5558717 September 24, 1996 Zhao et al.
5584936 December 17, 1996 Pickering et al.
5588827 December 31, 1996 Muka
5620525 April 15, 1997 van de Ven et al.
5645646 July 8, 1997 Beinglass et al.
5656093 August 12, 1997 Burkhart et al.
5683518 November 4, 1997 Moore et al.
5690742 November 25, 1997 Ogata et al.
5700725 December 23, 1997 Hower et al.
5738165 April 14, 1998 Imai
5761023 June 2, 1998 Lue et al.
5800622 September 1, 1998 Takemi et al.
5803977 September 8, 1998 Tepman et al.
5834737 November 10, 1998 Hirose et al.
D404370 January 19, 1999 Kimura
5895530 April 20, 1999 Shrotriya et al.
5938850 August 17, 1999 Arami et al.
5960159 September 28, 1999 Ikeda et al.
6001183 December 14, 1999 Gurary et al.
6020212 February 1, 2000 Mathis
6068441 May 30, 2000 Raaijmakers et al.
6077357 June 20, 2000 Rossman et al.
6086680 July 11, 2000 Foster et al.
6090212 July 18, 2000 Mahawili
6093252 July 25, 2000 Wengert et al.
6167834 January 2, 2001 Wang et al.
6293749 September 25, 2001 Raaijmakers et al.
6325858 December 4, 2001 Wengert et al.
6331023 December 18, 2001 Goodwin et al.
6343183 January 29, 2002 Halpin et al.
6394797 May 28, 2002 Sugaya et al.
6402850 June 11, 2002 Beinglass et al.
6464790 October 15, 2002 Sherstinsky et al.
6608287 August 19, 2003 Halpin et al.
6634882 October 21, 2003 Goodman
6709267 March 23, 2004 Hawkins et al.
D496008 September 14, 2004 Takahashi et al.
6893507 May 17, 2005 Goodman et al.
7033445 April 25, 2006 Keeton et al.
D525127 July 18, 2006 Cogley et al.
D600223 September 15, 2009 Aggarwal et al.
7601224 October 13, 2009 Foree
7602224 October 13, 2009 Foree
7648579 January 19, 2010 Goodman et al.
7722441 May 25, 2010 Goela et al.
7740703 June 22, 2010 Hasegawa et al.
8088225 January 3, 2012 Goodman et al.
8287648 October 16, 2012 Reed et al.
8366830 February 5, 2013 Nakamura et al.
8394229 March 12, 2013 Aggarwal et al.
8801857 August 12, 2014 Aggarwal et al.
D743357 November 17, 2015 Vyne
9558985 January 31, 2017 Wang et al.
D784276 April 18, 2017 Tiner et al.
9633889 April 25, 2017 Cuvalci et al.
10068791 September 4, 2018 Parsey, Jr. et al.
D830981 October 16, 2018 Jeong
10242890 March 26, 2019 Volfovski et al.
10269614 April 23, 2019 Chu et al.
10376916 August 13, 2019 Ranish et al.
D864134 October 22, 2019 Watarai et al.
D914620 March 30, 2021 Rokkam et al.
11018047 May 25, 2021 Rokkam et al.
D920936 June 1, 2021 Rokkam et al.
11261525 March 1, 2022 Yudovsky et al.
D958764 July 26, 2022 Rokkam
11530480 December 20, 2022 Yudovsky et al.
11764101 September 19, 2023 Rathi
11961756 April 16, 2024 Rokkam
D1030687 June 11, 2024 Huang
D1052547 November 26, 2024 Suzuki
D1067204 March 18, 2025 Huang
12278129 April 15, 2025 Ganguli
20020011211 January 31, 2002 Halpin
20020043337 April 18, 2002 Goodman et al.
20030000472 January 2, 2003 Lim et al.
20030049580 March 13, 2003 Goodman
20040040632 March 4, 2004 Oosterlaken
20040060512 April 1, 2004 Waldhauer et al.
20040229002 November 18, 2004 Davis et al.
20050092439 May 5, 2005 Keeton et al.
20050284372 December 29, 2005 Murugesh et al.
20060057826 March 16, 2006 De Boer
20090280248 November 12, 2009 Goodman et al.
20100031884 February 11, 2010 Aggarwal et al.
20100107974 May 6, 2010 Givens et al.
20130109192 May 2, 2013 Hawkins
20140251542 September 11, 2014 Parsey, Jr.
20160002778 January 7, 2016 Ravi et al.
20160068996 March 10, 2016 Lau et al.
20160133504 May 12, 2016 Chu et al.
20160369398 December 22, 2016 Yudovsky et al.
20170175265 June 22, 2017 Shah et al.
20180094350 April 5, 2018 Verghese et al.
20190355612 November 21, 2019 Sakurai
20200234996 July 23, 2020 Rokkam et al.
20200373187 November 26, 2020 Singu et al.
20210125853 April 29, 2021 Rathi et al.
20220162748 May 26, 2022 Yudovsky et al.
Foreign Patent Documents
102308362 January 2012 CN
103733327 April 2014 CN
106463365 February 2017 CN
0339279 November 1989 EP
0448346 March 1991 EP
0445596 September 1991 EP
0634785 January 1995 EP
0669640 August 1995 EP
0766289 April 1997 EP
0840358 May 1998 EP
2181458 April 1987 GB
7-58039 March 1995 JP
2000-269310 September 2000 JP
2002-184843 June 2002 JP
2002-526915 August 2002 JP
2003-124167 April 2003 JP
2006-228802 August 2006 JP
2007-502022 February 2007 JP
D1422195 August 2014 JP
D1547357 April 2016 JP
D1570747 February 2018 JP
D1570748 February 2018 JP
10-1999-0069084 September 1999 KR
1999-0069091 September 1999 KR
100460338 January 2005 KR
10-2007-0098025 October 2007 KR
10-2017-0054447 May 2017 KR
10-2017-0085548 July 2017 KR
10-2018-0010331 January 2018 KR
3020190032451 July 2020 KR
D111900 July 2006 TW
D136587 August 2010 TW
D184695 August 2017 TW
D191199 June 2018 TW
WO 1996/30713 October 1996 WO
WO 1997/08743 March 1997 WO
WO 2010/016964 February 2010 WO
Other references
  • TaC Coated LED epi susceptor,https://www.semixlab.com/Cvd-tantalum-carbide-tac-coating/tac-coated-led-epi-susceptor,2025. ( Year: 2025).
  • “Shaping the Future in Semiconductor Processing.” Advertisement for Morton International, Inc., Ceramic Solutions. Vol. 73, No. 7, Jul. 1994: advertisements (circa 1993).
Patent History
Patent number: D1148718
Type: Grant
Filed: Jul 22, 2022
Date of Patent: Sep 22, 2026
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Uday Kiran Rokkam (San Diego, CA), Sam Kim (Chandler, AZ), Saket Rathi (Tempe, AZ), Dakai Bian (Tempe, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/865,404