Wafer boat for use in a semiconductor wafer heat processing apparatus

- Tokyo Electron Ltd.
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Description

FIG. 1 a perspective view of a wafer boat for use in a semiconductor wafer heat processing apparatus;

FIG. 2 a front elevational view thereof;

FIG. 3 a top plan view thereof;

FIG. 4 a bottom plan view thereof;

FIG. 5 a cross sectional view taken along line V-V in FIG. 2;

FIG. 6 a right side view thereof, the left side view being a mirror image of the right view;

FIG. 7 a rear elevational view thereof; and,

FIG. 8 a cross sectional view taken along line VIII-VIII in FIG. 2.

Referenced Cited
U.S. Patent Documents
D291413 August 18, 1987 Uehara et al.
D361752 August 29, 1995 Yamaga
D378823 April 15, 1997 Watanabe et al.
4743156 May 10, 1988 Raffay et al.
4857689 August 15, 1989 Lee
5174045 December 29, 1992 Thompson et al.
5314574 May 24, 1994 Takahashi
5320218 June 14, 1994 Yamashita et al.
Patent History
Patent number: D404015
Type: Grant
Filed: Jul 24, 1997
Date of Patent: Jan 12, 1999
Assignee: Tokyo Electron Ltd. (Tokyo-To)
Inventor: Manabu Honma (Kanagawa)
Primary Examiner: Brian N. Vinson
Law Firm: Ladas & Parry
Application Number: 0/74,281
Classifications
Current U.S. Class: Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)
International Classification: 1303;