Multi-chamber processing apparatus
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FIG. 1 is a front view of a first embodiment of a multi-chamber processing apparatus embodying our design;
FIG. 2 is a back view thereof;
FIG. 3 is a left-side view thereof;
FIG. 4 is a right-side view thereof;
FIG. 5 is a plan view thereof;
FIG. 6 is a bottom view thereof;
FIG. 7 is a front view of a second embodiment of a multi-chamber processing apparatus embodying our design;
FIG. 8 is a back view thereof;
FIG. 9 is a left-side view thereof;
FIG. 10 is a right-side view thereof;
FIG. 11 is a plan view thereof;
FIG. 12 is a bottom view thereof;
FIG. 13 is a front view of a third embodiment of a multi-chamber processing apparatus embodying our design;
FIG. 14 is back view thereof;
FIG. 15 is a left-side view thereof;
FIG. 16 is a right-side view thereof;
FIG. 17 is a plan view thereof;
FIG. 18 is a bottom view thereof;
FIG. 19 is a front view of a fourth embodiment of a multi-chamber processing apparatus embodying our design;
FIG. 20 is back view thereof;
FIG. 21 is a left-side view thereof;
FIG. 22 is a right-side view thereof;
FIG. 23 is a plan view thereof;
FIG. 24 is a bottom view thereof;
FIG. 25 is a front view of a fifth embodiment of a multi-chamber processing apparatus embodying our design;
FIG. 26 is a back view thereof;
FIG. 27 is a left-side view thereof;
FIG. 28 is a right-side view thereof;
FIG. 29 is a plan view thereof; and,
FIG. 30 is a bottom view thereof.
The broken line showing is for illustrative purposes only and forms no part of the claimed design.
Claims
The ornamental design for a multi-chamber processig apparatus, as shown and described.
Type: Grant
Filed: Oct 19, 2000
Date of Patent: Jun 25, 2002
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Jun Hirose (Yamanashi), Eiji Hirose (Yamanashi), Jun Ozawa (Yamanashi), Takaaki Hirooka (Yamanashi)
Primary Examiner: Antoine Duval Davis
Attorney, Agent or Law Firm: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
Application Number: 29/131,294
International Classification: 1004;