Wafer boat
Latest Tokyo Electron Limited Patents:
Salients are formed on a bottom board of a wafer boat to get into reentrants of a heat insulating cylinder for manufacturing a semiconductor wafer, and stabilize it in a setting condition. The portion shown in solid lines is my claimed design. The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.
Claims
The ornamental design for a wafer boat, as shown and described.
D411176 | June 22, 1999 | Shimazu |
6110285 | August 29, 2000 | Kitazawa et al. |
6163015 | December 19, 2000 | Moore et al. |
6287112 | September 11, 2001 | Van Voorst Vader et al. |
6454865 | September 24, 2002 | Goodman et al. |
6536608 | March 25, 2003 | Buckley |
6780251 | August 24, 2004 | Tometsuka |
6811040 | November 2, 2004 | Payne et al. |
6840767 | January 11, 2005 | Goodman |
7207763 | April 24, 2007 | Lee |
D580894 | November 18, 2008 | Sato |
7455734 | November 25, 2008 | Yamaguchi et al. |
20020187023 | December 12, 2002 | Araki |
20070157886 | July 12, 2007 | Elgar et al. |
20080041820 | February 21, 2008 | Tong et al. |
Type: Grant
Filed: Sep 26, 2008
Date of Patent: Sep 15, 2009
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Izumi Sato (Oshu)
Primary Examiner: Selina Sikder
Attorney: Smith, Gambrell & Russell, LLP
Application Number: 29/309,701