Pedestal base of a heat insulating cylinder for manufacturing semiconductor wafers
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Description
Claims
The ornamental design for a pedestal base of a heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.
Referenced Cited
U.S. Patent Documents
5534074 | July 9, 1996 | Koons |
D404375 | January 19, 1999 | Shimazu |
6811040 | November 2, 2004 | Payne et al. |
D570309 | June 3, 2008 | Sato et al. |
D574792 | August 12, 2008 | Sato |
D579885 | November 4, 2008 | Sato |
20020092815 | July 18, 2002 | Kim et al. |
20050145584 | July 7, 2005 | Buckley et al. |
Patent History
Patent number: D601979
Type: Grant
Filed: Sep 26, 2008
Date of Patent: Oct 13, 2009
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Izumi Sato (Oshu)
Primary Examiner: Selina Sikder
Attorney: Smith, Gambrell & Russell, LLP
Application Number: 29/309,697
Type: Grant
Filed: Sep 26, 2008
Date of Patent: Oct 13, 2009
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Izumi Sato (Oshu)
Primary Examiner: Selina Sikder
Attorney: Smith, Gambrell & Russell, LLP
Application Number: 29/309,697
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)