Wafer boat
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Description
In the drawings, the left-hand side of each figure is regarded as the top of the figure.
Claims
The ornamental design for a wafer boat, as shown and described.
Referenced Cited
U.S. Patent Documents
D378675 | April 1, 1997 | Iwai |
5752609 | May 19, 1998 | Kato et al. |
D404015 | January 12, 1999 | Honma |
D409158 | May 4, 1999 | Shimazu |
D411176 | June 22, 1999 | Shimazu |
6056123 | May 2, 2000 | Niemirowski et al. |
6065615 | May 23, 2000 | Uchiyama et al. |
6110285 | August 29, 2000 | Kitazawa et al. |
20020130061 | September 19, 2002 | Hengst |
Patent History
Patent number: D570309
Type: Grant
Filed: Apr 24, 2007
Date of Patent: Jun 3, 2008
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Izumi Sato (Tokyo), Hirofumi Kaneko (Tokyo)
Primary Examiner: Selina Sikder
Attorney: Smith, Gambrell & Russell, LLP
Application Number: 29/274,445
Type: Grant
Filed: Apr 24, 2007
Date of Patent: Jun 3, 2008
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Izumi Sato (Tokyo), Hirofumi Kaneko (Tokyo)
Primary Examiner: Selina Sikder
Attorney: Smith, Gambrell & Russell, LLP
Application Number: 29/274,445
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)