Wafer boat

- Tokyo Electron Limited
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Description

FIG. 1 is a perspective view of the design for a wafer boat in accordance with the invention;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a left side view thereof;

FIG. 6 is a top view thereof;

FIG. 7 is a bottom view thereof;

FIG. 8 is a sectional view thereof along line 88 of FIG. 6; and,

FIG. 9 is a sectional view thereof along line 99 of FIG. 2.

In the drawings, the left-hand side of each figure is regarded as the top of the figure.

Claims

The ornamental design for a wafer boat, as shown and described.

Referenced Cited
U.S. Patent Documents
D378675 April 1, 1997 Iwai
5752609 May 19, 1998 Kato et al.
D404015 January 12, 1999 Honma
D409158 May 4, 1999 Shimazu
D411176 June 22, 1999 Shimazu
6056123 May 2, 2000 Niemirowski et al.
6065615 May 23, 2000 Uchiyama et al.
6110285 August 29, 2000 Kitazawa et al.
20020130061 September 19, 2002 Hengst
Patent History
Patent number: D570309
Type: Grant
Filed: Apr 24, 2007
Date of Patent: Jun 3, 2008
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Izumi Sato (Tokyo), Hirofumi Kaneko (Tokyo)
Primary Examiner: Selina Sikder
Attorney: Smith, Gambrell & Russell, LLP
Application Number: 29/274,445