Electrostatic chuck

Description

FIG. 1 is a front view of an electrostatic chuck illustrating my new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a left side view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a top plan view thereof, the bottom plan view being a mirror image of the plan view shown; and,

FIG. 6 is a partial cross-sectional view taken through line 6—6 of FIG. 1.

The broken lines shown in the figures are for illustrative purposes only and form no part of the claimed design.

Claims

The ornamental design for an electrostatic chuck, as shown and described.