Quartz cover for manufacturing semiconductor wafers

- Tokyo Electron Limited
Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is top perspective view of a quartz cover for manufacturing semiconductor wafers illustrating my new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a front view thereof, the rear view being the same image and, therefore, not shown;

FIG. 4 is a right side view thereof, the left side view being the same image and, therefore, not shown;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof; and,

FIG. 7 is a cross-sectional view taken through line 77 of FIG. 5.

The broken lines are shown for illustrative purposes only and form no part of the claimed design.

Claims

The ornamental design for a quartz cover for manufacturing semiconductor wafers, as shown and described.

Referenced Cited
U.S. Patent Documents
4978567 December 18, 1990 Miller
5709543 January 20, 1998 Shimazu
D404370 January 19, 1999 Kimura
6423175 July 23, 2002 Huang et al.
6966771 November 22, 2005 Irie et al.
D582949 December 16, 2008 Yamashita
20060199131 September 7, 2006 Kawasaki et al.
20080066682 March 20, 2008 Yamashita
Patent History
Patent number: D616390
Type: Grant
Filed: Sep 2, 2009
Date of Patent: May 25, 2010
Assignee: Tokyo Electron Limited (Minato-Ku)
Inventor: Izumi Sato (Oshu)
Primary Examiner: Selina Sikder
Attorney: Burr & Brown
Application Number: 29/342,844