Support of wafer boat for manufacturing semiconductor wafers

- Tokyo Electron Limited
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Description

FIG. 1 is front perspective view of a support of wafer boat for manufacturing semiconductor wafers illustrating my new design;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a left side view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view taken through line 88 of FIG. 2.

Claims

The ornamental design for a support of wafer boat for manufacturing semiconductor wafers, as shown and described.

Referenced Cited
U.S. Patent Documents
D404375 January 19, 1999 Shimazu
5897311 April 27, 1999 Nishi
6716027 April 6, 2004 Kim et al.
D570308 June 3, 2008 Sato
D574792 August 12, 2008 Sato
D579885 November 4, 2008 Sato
D601979 October 13, 2009 Sato
Patent History
Patent number: D616395
Type: Grant
Filed: Sep 2, 2009
Date of Patent: May 25, 2010
Assignee: Tokyo Electron Limited (Minato-Ku)
Inventor: Izumi Sato (Oshu)
Primary Examiner: Selina Sikder
Attorney: Burr & Brown
Application Number: 29/342,857