Arm for wafer transportation for manufacturing semiconductor

- Tokyo Electron Limited
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Description

FIG. 1 is front perspective view of an arm for wafer transportation for manufacturing semiconductor illustrating my new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom view thereof;

FIG. 4 is a front view thereof;

FIG. 5 is a rear view thereof;

FIG. 6 is a left side view thereof; and,

FIG. 7 is a right side view thereof.

The broken lines in the drawings form no part of the claimed design.

Claims

The ornamental design for arm for wafer transportation for manufacturing semiconductor, as shown and described.

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Patent History
Patent number: D673923
Type: Grant
Filed: Jun 24, 2011
Date of Patent: Jan 8, 2013
Assignee: Tokyo Electron Limited (Minato-Ku)
Inventor: Hideki Kajiwara (Koshi)
Primary Examiner: Selina Sikder
Attorney: Burr & Brown
Application Number: 29/396,042