Electrode plate for semiconductor manufacturing apparatus

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Description

FIG. 1 is a perspective view of an electrode plate for a semiconductor manufacturing apparatus.

FIG. 2 is a front elevational view of the electrode plate.

FIG. 3 is a rear elevational view of the electrode plate.

FIG. 4 is a left side elevational view of the electrode plate.

FIG. 5 is a right side elevational view of the electrode plate.

FIG. 6 is a top plan view of the electrode plate.

FIG. 7 is a bottom plan view of the electrode plate; and,

FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 6.

Claims

The ornamental design for an electrode plate for a semiconductor manufacturing apparatus, as shown and described.

Referenced Cited
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D609652 February 9, 2010 Nagasaka
D609655 February 9, 2010 Sugimoto
D665055 August 7, 2012 Yanagisawa
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Patent History
Patent number: D789888
Type: Grant
Filed: Mar 22, 2016
Date of Patent: Jun 20, 2017
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Hyun Soo Jang (Daejeon), Jeong Ho Lee (Seoul), Young Hoon Kim (Cheonan-si), Jong Su Kim (Cheonan-si)
Primary Examiner: Eric Goodman
Assistant Examiner: Amy Wierenga
Application Number: 29/558,825
Classifications
Current U.S. Class: Electrode (i.e., Grid Or Plate Type) (D13/121)