Electrode plate for a plasma processing apparatus
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The features shown only in broken lines depict environmental subject matter only and form no part of the claimed design.
Claims
The ornamental design for an electrode plate for a plasma processing apparatus, as shown and described.
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- Taiwanese Office Action, Application No. 101301746, dated Oct. 24, 2012.
Type: Grant
Filed: Mar 29, 2012
Date of Patent: Feb 11, 2014
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Yusei Kuwabara (Miyagi), Keiichi Nagakubo (Nirasaki)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/417,062