Self-centering wafer carrier for chemical vapor deposition

- Veeco Instruments, Inc.
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Description

FIG. 1 is a top perspective view of a first embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;

FIG. 2 is a bottom perspective view of the first embodiment thereof;

FIG. 3 is a top view of the first embodiment thereof;

FIG. 4 is a bottom view of the first embodiment thereof;

FIG. 5 is a right view of the first embodiment thereof;

FIG. 6 is a left view of the first embodiment thereof;

FIG. 7 is a rear view of the first embodiment thereof; and

FIG. 8 is a front view of the first embodiment thereof.

FIG. 9 is a top perspective view of a second embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;

FIG. 10 is a bottom perspective view of the second embodiment thereof;

FIG. 11 is a top view of the second embodiment thereof;

FIG. 12 is a bottom view of the second embodiment thereof;

FIG. 13 is a right view of the second embodiment thereof;

FIG. 14 is a left view of the second embodiment thereof;

FIG. 15 is a rear view of the second embodiment thereof; and

FIG. 16 is a front view of the second embodiment thereof.

FIG. 17 is a cross sectional view of the second embodiment taken along 17-17 in FIG. 11 thereof.

FIG. 18 is a top perspective view of a third embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;

FIG. 19 is a bottom perspective view of the third embodiment thereof;

FIG. 20 is a top view of the third embodiment thereof;

FIG. 21 is a bottom view of the third embodiment thereof;

FIG. 22 is a right view of the third embodiment thereof;

FIG. 23 is a left view of the third embodiment thereof;

FIG. 24 is a rear view of the third embodiment thereof; and,

FIG. 25 is a front view of the third embodiment thereof.

Claims

The ornamental design for a self-centering wafer carrier for chemical vapor deposition, as shown and described.

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Patent History
Patent number: D819580
Type: Grant
Filed: Apr 1, 2016
Date of Patent: Jun 5, 2018
Assignee: Veeco Instruments, Inc. (Plainview, NY)
Inventors: Sandeep Krishnan (Jersey City, NJ), Alexander I. Gurary (Bridgewater, NJ), Chenghung Paul Chang (Easton, PA), Earl Marcelo (Franklin Park, NJ)
Primary Examiner: Jeffrey D Asch
Assistant Examiner: Tracey J Bell
Application Number: 29/559,939