Electric furnace for substrate processing apparatus
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The dashed-dot-dashed lines represent the boundary lines of the claimed design.
The broken lines shown in the drawings represent portions of the electric furnace for substrate processing apparatus that form no part of the claimed design.
Claims
The ornamental design for an electric furnace for substrate processing apparatus, as shown and described.
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Type: Grant
Filed: Jul 12, 2018
Date of Patent: Sep 17, 2019
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Tetsuya Kosugi (Toyama), Hitoshi Murata (Toyama), Masaaki Ueno (Toyama)
Primary Examiner: T Chase Nelson
Assistant Examiner: Ania Aman
Application Number: 29/656,364