Substrate holding parts
Latest EBARA CORPORATION Patents:
- Coupling mechanism with spherical bearing, method of determining bearing radius of spherical bearing, and substrate polishing apparatus
- Liquid supplying device and method for draining liquid thereof
- Substrate processing apparatus and substrate processing method
- Cleaning apparatus and polishing apparatus
- POLISHING APPARATUS AND POLISHING METHOD
The broken lines shown are included for the purpose of illustrating the unclaimed portions of the substrate holding parts and form no part of the claimed design.
Claims
The ornamental design for a substrate holding parts, as shown and described.
D732093 | June 16, 2015 | Pak |
D761338 | July 12, 2016 | Gariglio |
D769340 | October 18, 2016 | Hirata |
D807934 | January 16, 2018 | Abe |
D809994 | February 13, 2018 | Braddock, III |
D825629 | August 14, 2018 | Miyamoto |
D832315 | October 30, 2018 | Malmberg |
D834075 | November 20, 2018 | Kamimura |
D851140 | June 11, 2019 | Kamimura |
D851141 | June 11, 2019 | Kamimura |
D851142 | June 11, 2019 | Kamimura |
D861738 | October 1, 2019 | Vittetoe |
D861752 | October 1, 2019 | Boulet Gendron |
D861753 | October 1, 2019 | Saltzman |
20090011651 | January 8, 2009 | Lin |
20140042005 | February 13, 2014 | Lee |
Type: Grant
Filed: Jan 16, 2019
Date of Patent: Jul 21, 2020
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Kenichi Kobayashi (Tokyo), Asagi Matsugu (Tokyo), Makoto Kashiwagi (Tokyo), Manao Hoshina (Tokyo)
Primary Examiner: Khawaja Anwar
Application Number: 29/676,931