Pressing member for substrate polishing apparatus

- EBARA CORPORATION
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Description

FIG. 1 is a first perspective view, observed from a front of a pressing member for a substrate polishing apparatus showing our new design;

FIG. 2 is a second perspective view, observed from a rear thereof;

FIG. 3 is a front view thereof;

FIG. 4 is a rear view thereof;

FIG. 5 is a top view thereof;

FIG. 6 is a bottom view thereof; and,

FIG. 7 is a right-side view thereof, a left-side view being a mirror image thereof.

Claims

The ornamental design for a pressing member for a substrate polishing apparatus, as shown and described.

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Patent History

Patent number: D851140
Type: Grant
Filed: Aug 14, 2018
Date of Patent: Jun 11, 2019
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Kenji Kamimura (Tokyo), Masayuki Nakanishi (Tokyo), Satoru Yamamoto (Tokyo), Yasuyuki Miyasawa (Tokyo), Kenji Kodera (Tokyo)
Primary Examiner: Patricia A Palasik
Application Number: 29/659,963

Classifications

Current U.S. Class: Element Or Attachment (D15/126)