Substrate holding parts
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The broken lines shown are included for the purpose of illustrating the unclaimed portions of the substrate holding parts and form no part of the claimed design.
Claims
The ornamental design for a substrate holding parts, as shown and described.
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Type: Grant
Filed: Jan 16, 2019
Date of Patent: Jul 21, 2020
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Kenichi Kobayashi (Tokyo), Asagi Matsugu (Tokyo), Makoto Kashiwagi (Tokyo), Manao Hoshina (Tokyo)
Primary Examiner: Khawaja Anwar
Application Number: 29/676,941