Gas inlet attachment for wafer processing apparatus
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Description
Claims
The ornamental design for a gas inlet attachment for wafer processing apparatus, as shown and described.
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Patent History
Patent number: D901564
Type: Grant
Filed: Jul 26, 2019
Date of Patent: Nov 10, 2020
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Satoru Murata (Toyama), Shinya Morita (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/699,539
Type: Grant
Filed: Jul 26, 2019
Date of Patent: Nov 10, 2020
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Satoru Murata (Toyama), Shinya Morita (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/699,539
Classifications
Current U.S. Class:
Scientific, Laboratory, Or Industrial Heating Equipment (D15/144.1)