Gas supply plate for semiconductor manufacturing apparatus

Description

FIG. 1 is a perspective view of a gas supply plate for a semiconductor manufacturing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a cross sectional view taken along line 8-8 of FIG. 1; and,

FIG. 9 is an enlarged portion view taken along line 9 in FIG. 8.

The even dashed broken lines shown in the drawings represent portions of the gas supply plate for semiconductor manufacturing apparatus, that form no part of the claimed design. The dashed-dot-dashed lines represent the boundary lines of the claimed design.

Claims

The ornamental design for a gas supply plate for a semiconductor manufacturing apparatus, as shown and described.